發(fā)布時間：2018-01-21 20:08

  本文關(guān)鍵詞： 光軸檢測 衍射光柵 動態(tài)范圍 測量精度 質(zhì)心探測　出處：《中國科學(xué)院大學(xué)(中國科學(xué)院光電技術(shù)研究所)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：在激光光軸誤差檢測、光電成像跟蹤系統(tǒng)等應(yīng)用場景中,需要利用聚焦成像遠場光斑位置探測器對目標光軸進行探測。遠場光斑位置探測器一般采用CCD相機,利用接收到的目標光斑,計算出其質(zhì)心在靶面的偏移量,從而探測出光軸的傾斜位置。在光軸探測過程中,期望遠場成像探測器同時具有大動態(tài)范圍和高探測精度的能力,其中目標光軸期望具有度級的探測范圍,同時需要微弧度級的探測精度。聚焦成像遠場光斑位置探測器的動態(tài)范圍和探測精度均受限于成像透鏡的焦距長短。在相同靶面尺寸大小的條件下,采用長焦距的成像透鏡能夠提高光軸的探測精度,但是會降低光軸的動態(tài)探測范圍。大動態(tài)范圍和高精度探測的實現(xiàn)是一對矛盾的過程。本文正是希望解決這一矛盾過程,提出一種基于二維正交衍射光柵的新型光軸測量方法,使得傾斜跟蹤探測器具有大動態(tài)范圍和高精度探測的能力。利用光柵將入射光束分割成具有相同入射方向的多光束,在CCD探測器靶面成像為一個光斑陣列。相對于單個光斑,光斑陣列擁有更多的目標光斑輸入信息,由于增加了目標光斑的探測信息,從而可以提高光軸的探測精度。同時,光柵使得光斑陣列分布范圍大于CCD靶面大小,當(dāng)主光斑偏離出靶面區(qū)域時,仍可以通過其余光斑陣列強度分布測量出入射光軸偏移量,從而增大光軸的動態(tài)范圍。本文重點研究了利用光柵分束特性的原理增大光軸動態(tài)探測范圍和提高光軸探測精度。針對大動態(tài)范圍和高精度探測兩部分內(nèi)容,分別從理論分析、數(shù)字仿真和實驗驗證三個方面展開了全面深入的研究。首先,本文介紹了光柵的基本特性和分光原理,接著從理論上分析了利用光柵增大光軸動態(tài)探測范圍的基本原理,并根據(jù)大動態(tài)范圍原理進行了數(shù)字仿真分析,仿真分析了利用?1級衍射光斑探測光軸動態(tài)范圍,仿真結(jié)果表明光柵可以增大光軸的動態(tài)范圍。其次,本文介紹了二維正交光柵的成像原理,利用正交光柵探測高精度光斑質(zhì)心。在理論上分析了質(zhì)心探測過程中存在的主要誤差來源,利用可探測的光斑陣列,推導(dǎo)出了高精度質(zhì)心探測方法。根據(jù)高精度質(zhì)心探測原理,進行了數(shù)字仿真,仿真結(jié)果與理論分析是吻合的。最后,為了驗證理論分析與仿真結(jié)果的正確性,搭建了一套基于衍射光柵的光學(xué)平臺進行實驗驗證。利用CCD相機數(shù)據(jù)采集軟件,獲取遠場光斑圖像數(shù)據(jù),對數(shù)據(jù)處理后得到的實驗結(jié)果分別驗證了光柵能增大光軸動態(tài)范圍和提高光軸探測精度�？傊�,利用本文提出的光軸探測方法,聚焦成像遠場光斑位置探測器能同時具有大動態(tài)范圍和高精度光軸誤差探測能力,這對于在激光光軸誤差檢測、光電成像跟蹤系統(tǒng)等應(yīng)用場景中需要探測光軸具有重要的研究意義。
[Abstract]:In the laser optical axis error detection, photoelectric imaging tracking system and other applications in the scene. The focal imaging far-field spot position detector is needed to detect the optical axis of the target. The far-field spot position detector generally uses the CCD camera and the received target spot. The deviation of the center of mass in the target surface is calculated, and the tilt position of the optical axis is detected. In the optical axis detection process, the far-field imaging detector is expected to have the capability of both large dynamic range and high detection accuracy. The target optical axis is expected to have a degree of detection range. At the same time, the detection accuracy of micro-radians is required. The dynamic range and detection accuracy of focusing far-field spot position detector are limited by the focal length of the imaging lens and under the condition of the same target size. The detection accuracy of optical axis can be improved by using long focal length imaging lens. However, the dynamic detection range of optical axis will be reduced. The realization of large dynamic range and high precision detection is a contradictory process. A novel optical axis measurement method based on two-dimensional orthogonal diffraction grating is proposed. The tilt tracking detector has the capability of large dynamic range and high precision detection. The incident beam is divided into multiple beams with the same incident direction by grating. Compared with a single spot, the spot array has more input information of the target spot, because the detection information of the target spot is increased. At the same time, the grating makes the distribution range of the spot array larger than the size of the CCD target, when the main spot deviates from the target area. The offset of the incident optical axis can still be measured by the intensity distribution of the remaining spot arrays. In order to increase the dynamic range of optical axis, this paper focuses on increasing the dynamic detection range of optical axis and improving the precision of optical axis detection by using the principle of grating beam splitting, aiming at the two parts of large dynamic range and high precision detection. From the theoretical analysis, digital simulation and experimental verification of three aspects of comprehensive and in-depth research. First, this paper introduces the basic characteristics of the grating and the principle of light separation. Then the basic principle of using grating to increase the dynamic detection range of optical axis is analyzed theoretically, and the digital simulation analysis is carried out according to the principle of large dynamic range. The first order diffraction spot detects the dynamic range of optical axis. The simulation results show that the grating can increase the dynamic range of optical axis. Secondly, this paper introduces the imaging principle of two-dimensional orthogonal grating. Using orthogonal grating to detect high precision spot centroid, the main error sources in centroid detection are analyzed theoretically, and the detectable spot array is used. The high precision centroid detection method is derived. According to the high precision centroid detection principle, the digital simulation is carried out. The simulation results are consistent with the theoretical analysis. Finally, in order to verify the correctness of the theoretical analysis and simulation results. An optical platform based on diffractive grating is built for experimental verification. The far-field spot image data is obtained by using CCD camera data acquisition software. The experimental results obtained after data processing verify that the grating can increase the dynamic range of optical axis and improve the accuracy of optical axis detection. In short, the optical axis detection method proposed in this paper is used. Focusing imaging far field spot position detector can simultaneously have large dynamic range and high precision optical axis error detection ability, which can be used in laser optical axis error detection. It is of great significance to detect the optical axis in the application of photoelectric imaging tracking system.
【學(xué)位授予單位】：中國科學(xué)院大學(xué)(中國科學(xué)院光電技術(shù)研究所)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TN25

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