本文關(guān)鍵詞：半導(dǎo)體設(shè)備預(yù)防性維護(hù)建模與優(yōu)化方法研究　出處：《系統(tǒng)工程理論與實(shí)踐》2017年03期 　論文類(lèi)型：期刊論文

  更多相關(guān)文章： 費(fèi)用模型 預(yù)防性維護(hù) 檢測(cè)間隔時(shí)間 機(jī)會(huì)維護(hù)

【摘要】：半導(dǎo)體生產(chǎn)線造價(jià)昂貴,制造工藝復(fù)雜.其維護(hù)具有維護(hù)費(fèi)用高、維護(hù)難度大等特點(diǎn).為了降低生產(chǎn)系統(tǒng)的整體維護(hù)成本,保證整個(gè)生產(chǎn)系統(tǒng)的穩(wěn)定運(yùn)行,本文通過(guò)伽馬過(guò)程描述設(shè)備退化規(guī)律,對(duì)設(shè)備的衰退情況進(jìn)行分類(lèi)維護(hù).針對(duì)隨機(jī)退化的生產(chǎn)線提出考慮機(jī)會(huì)維護(hù)的預(yù)防性維護(hù)建模方法.以總維護(hù)費(fèi)用最小化為目標(biāo),建立了維修費(fèi)用模型,結(jié)合更新定理給出了模型求解的方法,對(duì)檢測(cè)周期等參數(shù)進(jìn)行優(yōu)化分析.并分析了檢測(cè)成本、間隔時(shí)間相互影響關(guān)系.仿真結(jié)果表明建立的預(yù)防性維護(hù)模型可行且有效.
[Abstract]:Semiconductor production line is expensive in cost and complex in manufacturing process. Its maintenance is characterized by high maintenance cost and difficult maintenance. In order to reduce the overall maintenance cost of the production system and ensure the stable operation of the whole production system. In this paper, the law of equipment degradation is described by gamma process. A preventive maintenance modeling method considering opportunity maintenance is proposed for the randomly degraded production line. Aiming at minimizing the total maintenance cost, the maintenance cost model is established. Combined with the renewal theorem, the method of solving the model is given, and the parameters such as the detection period are optimized and the detection cost is analyzed. The simulation results show that the proposed preventive maintenance model is feasible and effective.
【作者單位】： 廣東工業(yè)大學(xué)機(jī)電工程學(xué)院;
【基金】：國(guó)家自然科學(xué)基金(51275093)~~
【分類(lèi)號(hào)】：TN305
【正文快照】： i引言 半導(dǎo)體生產(chǎn)線⑴是造價(jià)昂貴、工藝復(fù)雜的集成系統(tǒng),這其中涉及到氧化、光刻、淀積、擴(kuò)散、摻金、光刻等一系列復(fù)雜的工藝流程,生產(chǎn)過(guò)程中若某個(gè)環(huán)節(jié)所對(duì)應(yīng)的生產(chǎn)設(shè)備出現(xiàn)故障則有可能出現(xiàn)大批量的半成品或成品報(bào)廢,這將對(duì)企業(yè)的生產(chǎn)效益造成沉重的負(fù)擔(dān);以生產(chǎn)LED芯片的金

【相似文獻(xiàn)】

相關(guān)期刊論文 前1條

1 閆志瑞;硅片參數(shù)測(cè)試儀的預(yù)防性維護(hù)[J];電子工業(yè)專(zhuān)用設(shè)備;2004年01期

，

本文編號(hào)：1420492