【摘要】：磁浮平面電機(jī)具有結(jié)構(gòu)簡單、動(dòng)態(tài)特性好、定位精度高等特點(diǎn)，廣泛應(yīng)用于光刻機(jī)六自由度運(yùn)動(dòng)控制場合。本文以六自由度動(dòng)磁式磁浮平面電機(jī)為研究對象，在分析磁場的基礎(chǔ)上，建立了磁浮平面電機(jī)在定子磁場中的受力和力矩模型，研究了直接力旋量電機(jī)解耦方法，實(shí)現(xiàn)了磁浮平面電機(jī)的解耦控制。將重復(fù)控制和PID控制相結(jié)合，提高了6-DOF磁浮電機(jī)的控制精度。 首先，推導(dǎo)Halbach陣列磁感應(yīng)強(qiáng)度分布，綜合磁場基本方程以及邊界條件，獲得磁感應(yīng)強(qiáng)度分布諧波模型。根據(jù)諧波模型，將單個(gè)線圈進(jìn)行簡化，應(yīng)用洛侖茲力公式，解決了永磁陣列磁場對單線圈的作用力和力矩問題。根據(jù)作用力與反作用力關(guān)系，分析了Halbach永磁陣列作為動(dòng)子時(shí)的受力和力矩分布，為消除力矩干擾提供理論依據(jù)。 其次，為了消除dq0解耦引入的干擾力矩，，分析了動(dòng)磁式平面電機(jī)輸入控制電流與輸出的力和力矩之間的耦合關(guān)系。提出了直接力旋量解耦方法，實(shí)現(xiàn)電流與電磁力和力矩的獨(dú)立解耦控制，運(yùn)行穩(wěn)定、效果良好。 最后，建立了磁浮平面電機(jī)仿真模型，分析了Halbach永磁陣列作為電機(jī)動(dòng)子時(shí)的受力情況。并且推導(dǎo)出動(dòng)子永磁陣列的動(dòng)力學(xué)模型，并將其與電磁力和力矩模型相結(jié)合。采用基于改進(jìn)重復(fù)控制的PID控制算法，解決了傳統(tǒng)PID反饋算法的精度問題。仿真結(jié)果表明，磁浮平面電機(jī)每個(gè)自由度位置跟蹤誤差能夠達(dá)到納米級(jí)要求，說明改進(jìn)的磁浮重復(fù)控制方法可以應(yīng)用于6-DOF磁浮電機(jī)控制中，驗(yàn)證了所提方法的正確性和有效性。
[Abstract]:The maglev planar motor is widely used in the six degree of freedom motion control of lithography machine because of its simple structure, good dynamic characteristics and high positioning accuracy. In this paper, based on the analysis of magnetic field, the force and torque model of maglev plane motor in stator magnetic field is established, and the decoupling method of direct force spinning motor is studied. The decoupling control of maglev plane motor is realized. The control precision of 6-DOF maglev motor is improved by combining repetitive control with PID control. Firstly, the magnetic induction intensity distribution of Halbach array, the basic magnetic field equation and boundary conditions are derived, and the harmonic model of magnetic induction intensity distribution is obtained. According to the harmonic model the single coil is simplified and the Lorentz force formula is applied to solve the problem of the force and torque of the permanent magnet array magnetic field on the single coil. According to the relationship between force and reaction force, the force and torque distribution of Halbach permanent magnet array are analyzed, which provides a theoretical basis for eliminating torque interference. Secondly, in order to eliminate the disturbance torque introduced by dq0 decoupling, the coupling relationship between the input control current and the output force and torque of the moving magnetic planar motor is analyzed. A direct force spinor decoupling method is proposed to realize the decoupling control of current, electromagnetic force and torque independently. The method is stable and has a good effect. Finally, the simulation model of planar maglev motor is established, and the force acting on Halbach permanent magnet array is analyzed. The dynamic model of the permanent magnet array is derived and combined with the electromagnetic force and torque model. The PID control algorithm based on improved repetitive control is used to solve the accuracy problem of the traditional PID feedback algorithm. The simulation results show that the position tracking error of each degree of freedom of the maglev plane motor can meet the requirement of nanometer level. The improved repetitive control method of maglev can be applied to the control of 6-DOF maglev motor, and the correctness and effectiveness of the proposed method are verified.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2014
【分類號(hào)】：TM301.2

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