【摘要】：超聲波電機是一種典型的振動學、材料學、物理學等多個學科綜合的超聲驅動設備，其高精度、快速響應等優(yōu)點使其在很多領域有較好的應用價值。目前我國的超聲波電機普遍存在輸出效率較低、扭矩較小，壽命短等問題，還沒能夠實現(xiàn)產(chǎn)業(yè)化。 夾心式復合型駐波超聲電機多用于實現(xiàn)直線運動，因其結構靈活、輸出力矩大、速度高等特點，是近年來超聲電機領域的研究熱點。復合型駐波超聲電機多利用壓電陶瓷的d33模式或d15模式，要求壓電陶瓷具有盡量高的壓電常數(shù)和機電耦合系數(shù)，，高機械品質因數(shù)Qm和低介質損耗因數(shù)tan等特點。 切向極化的扭振壓電陶瓷，采用平面切變d15模式，具有壓電應變常數(shù)較大，機電耦合系數(shù)k15較高等諸多優(yōu)點，直接用于驅動，輸出能力更優(yōu)，較適合在駐波型直線超聲電機中應用。然而其在超聲電機中應用研究還相對較少，尤其是對于彎振模態(tài)和扭振模態(tài)復合型的超聲電機還很少見，因此本文提出了一種彎振模態(tài)和扭振模態(tài)復合型的超聲電機新構型。彎振模態(tài)采用厚度伸縮的d33模式用于提供正壓力，扭振模態(tài)采用平面切變的d15模式，直接用于驅動，使得電機在驅動效率和驅動輸出能力上具有很大的優(yōu)勢。 首先對彎扭復合模態(tài)超聲電機構型進行設計，對壓電陶瓷的極化和安裝布置進行研究，對彎扭復合型超聲電機的橢圓軌跡形成和驅動機理進行分析。對電機各部分的選材以及等效電路模型進行了研究，導出扭振共振頻率方程，然后以此為基礎，建立電機的有限元模型，選擇電機合適的振型模態(tài)，通過變幅桿加等截面驅動足的設計方法實現(xiàn)彎扭模態(tài)的頻率簡并，通過瞬態(tài)分析對定子驅動端的振動軌跡進行分析。最后進行彎扭復合模態(tài)超聲電機實驗樣機的研制，并進行性能測試，電機空載最大輸出速度為380mm/s，最大推力為13N。
[Abstract]:Ultrasonic motor (USM) is a typical ultrasonic driving device in many fields, such as vibration, materials, physics and so on. It has the advantages of high precision and fast response, so it has good application value in many fields. At present, the ultrasonic motor in our country has many problems, such as low output efficiency, low torque, short life and so on. Sandwich composite standing wave ultrasonic motor is widely used to realize linear motion. Because of its flexible structure, large output torque and high speed, it is a hot research topic in the field of ultrasonic motor in recent years. The composite standing wave ultrasonic motor usually uses the d33 mode or d15 mode of piezoelectric ceramics, which requires piezoelectric ceramics to have as high piezoelectric constant and electromechanical coupling coefficient as possible, high mechanical quality factor QM and low dielectric loss factor (tan). Torsional piezoelectric ceramics with tangential polarization, which adopt plane shear d15 mode, have many advantages, such as high piezoelectric strain constant, high electromechanical coupling coefficient k15, and so on. It is suitable for application in standing wave linear ultrasonic motor. However, the research of its application in ultrasonic motor is relatively few, especially for ultrasonic motor with combined mode of bending vibration and torsional vibration. Therefore, a new configuration of ultrasonic motor with combined mode of bending and torsional vibration is proposed in this paper. The bending mode is used to provide the positive pressure with the thickness expansion of D33 mode, and the torsional vibration mode is the plane shear d15 mode, which is directly used to drive the motor, which makes the motor have a great advantage in driving efficiency and driving output ability. Firstly, the configuration of bending-torsional composite mode ultrasonic motor is designed, the polarization and installation of piezoelectric ceramics are studied, and the ellipse track formation and driving mechanism of bending-torsion composite ultrasonic motor are analyzed. The material selection and equivalent circuit model of each part of the motor are studied, and the resonance frequency equation of torsional vibration is derived. Based on this, the finite element model of the motor is established, and the suitable mode of the motor is selected. The frequency degeneracy of the bending and torsional modes is realized by the design method of variable amplitude bar with constant cross section driving foot, and the vibration trajectory of the stator driving end is analyzed by transient analysis. Finally, the experimental prototype of bending-torsional mode ultrasonic motor is developed, and its performance is tested. The maximum output speed of the motor is 380 mm / s and the maximum thrust is 13 N.
【學位授予單位】：哈爾濱工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2014
【分類號】：TM302

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