本文選題：壓電響應(yīng)力顯微技術(shù)(PFM)　切入點(diǎn)：壓電材料　出處：《湘潭大學(xué)》2014年博士論文　論文類型：學(xué)位論文

【摘要】：壓電、鐵電材料因具有優(yōu)異的力電耦合性能，而廣泛的應(yīng)用于各類微電子器件。近年來(lái)，壓電響應(yīng)力顯微技術(shù)(PFM)已經(jīng)發(fā)展成為在納米尺度無(wú)損表征壓電、鐵電等極性材料的重要工具。但是，基于PFM的定量分析存在很大的困難，而且相應(yīng)的研究極富挑戰(zhàn)性。本論文主要針對(duì)PFM技術(shù)定量分析的相關(guān)問(wèn)題展開(kāi)研究，包括導(dǎo)電探針與壓電材料間的電彈性場(chǎng)分析，壓電系數(shù)定量分析，靜態(tài)鐵電疇成像，以及PFM對(duì)納米尺度鐵電疇結(jié)構(gòu)分辨率分析�；诎l(fā)展的數(shù)值解耦方法和全耦合方法，定量分析PFM中的力電耦合效應(yīng)。研究?jī)?nèi)容包括以下幾個(gè)方面： 第一，發(fā)展了數(shù)值解耦方法并提出了新的全耦合方法，用于分析導(dǎo)電SPM探針與樣品間的電彈性場(chǎng)。首先，基于解耦格林函數(shù)理論，提出了數(shù)值積分方法，發(fā)展了現(xiàn)有的解耦格林函數(shù)方法。另外，通過(guò)空氣和壓電材料間的耦合作用，發(fā)展了一套新的力電全耦合方法。其次，，基于這兩種方法我們分析了壓電材料內(nèi)的電彈性場(chǎng)分布。最后，針對(duì)不同幾何形狀的針尖，提出了全耦合方法的針尖模型。結(jié)果表明，電場(chǎng)和位移場(chǎng)都具有高度的局域性和非均勻性，而且全耦合方法對(duì)應(yīng)的電勢(shì)在壓電材料半空間衰減更快，從而針尖附近電場(chǎng)較大，但是位移則相應(yīng)較小。不同針尖模型電場(chǎng)集中度不同，但是位移響應(yīng)與針尖模型無(wú)關(guān)，而是取決于計(jì)算采用的是解耦方法，還是耦合方法。 第二，考慮PFM的接觸模式和非接觸模式，分析了壓電系數(shù)定量分析困難的原因，并提出了準(zhǔn)確定量分析壓電系數(shù)的兩種新方法。首先，考慮PFM測(cè)試為接觸模式，基于解耦方法和全耦合方法，分析了有效壓電系數(shù)與材料本征參數(shù)的關(guān)系。其次，我們提出了PFM測(cè)試的非接觸模式，分析了有效壓電系數(shù)與測(cè)試條件的關(guān)系。最后，我們提出了兩種定量分析納米尺度壓電系數(shù)的新方法，即雙針頭測(cè)試方法和反演優(yōu)化材料參數(shù)方法。結(jié)果表明，有效壓電系數(shù)與材料本征電彈性常數(shù)和測(cè)試條件密切相關(guān)，甚至具有非線性關(guān)系，使得定量分析壓電系數(shù)非常困難。然而，我們提出的雙探針?lè)椒ê头囱輧?yōu)化方法都能實(shí)現(xiàn)對(duì)分析壓電系數(shù)的準(zhǔn)確定量分析。 第三，基于解耦格林函數(shù)方法，發(fā)展分區(qū)數(shù)值積分方法，分析了PFM技術(shù)對(duì)非均勻靜態(tài)鐵電疇結(jié)構(gòu)的成像。以180度疇、90度疇和復(fù)雜鐵電疇為例，分析了極化非均勻性對(duì)PFM振幅和相位響應(yīng)的影響。結(jié)果表明，PFM位移響應(yīng)取決于材料內(nèi)部三維的極化分布，因而重構(gòu)三維鐵電疇結(jié)構(gòu)，則必需已知VPFM和LPFM的振幅和相位響應(yīng)。 第四，基于相位響應(yīng)，分析了PFM對(duì)納米尺度鐵電疇結(jié)構(gòu)的分辨率。我們分別以180度面外疇和90度疇，以及180度面內(nèi)疇為例，分析了疇界響應(yīng)半寬與針尖半徑關(guān)系，進(jìn)而分析VPFM和LPFM對(duì)納米鐵電疇的分辨能力。同時(shí)，還探討了PFM對(duì)內(nèi)部鐵電疇的分辨能力。結(jié)果表明，PFM分辨率取決于疇界響應(yīng)半寬，VPFM比LPFM的分辨率更高。而且PFM還能分辨內(nèi)部鐵電疇結(jié)構(gòu)，但是對(duì)深度非常敏感。 本論文發(fā)展了數(shù)值解耦方法和全耦合方法，實(shí)現(xiàn)了對(duì)PFM中力電耦合問(wèn)題的納米尺度定量分析。這為未來(lái)分析異質(zhì)鐵電材料以及動(dòng)態(tài)疇翻轉(zhuǎn)等問(wèn)題打下了堅(jiān)實(shí)的基礎(chǔ)。
[Abstract]:Piezoelectric and ferroelectric materials because of the excellent performance of electromechanical coupling, and widely used in all kinds of microelectronic devices. In recent years, piezoresponse force microscopy (PFM) has become the nondestructive characterization of piezoelectric in nanometer scale, an important tool for ferroelectric polar materials. However, the quantitative analysis is based on the PFM great difficulties and challenging research accordingly. This thesis focuses on the issues related to quantitative analysis of PFM technology is studied, including the conductive probe and the piezoelectric material of the electric elastic piezoelectric coefficient field analysis, quantitative analysis, static ferroelectric domain imaging, and PFM on the nanoscale resolution analysis. Numerical decoupling the development and the full coupling method based on quantitative analysis of electromechanical coupling effect in PFM. The study includes the following aspects:
First, the development of numerical decoupling method and put forward the whole new coupling method, for the analysis of conductive SPM probe and the sample of the electric elastic field. Firstly, decoupling theory of Green function based on the proposed numerical integration method, the development of the existing methods of decoupling Green function. In addition, through the interaction of air and piezoelectric materials the development of a new set of mechanical and electrical coupling method. Secondly, based on these two methods, we analyzed the electro elastic piezoelectric materials in the field. Finally, according to the different geometry of the tip, put forward the model of tip coupling method. The results show that the electric field and displacement field are highly localized and non uniformity, and potential corresponding to full coupling method in piezoelectric half space attenuation faster, so the electric field near the tip is larger, but the displacement is smaller. The different tip model of electric field concentration is different, but the displacement The response is independent of the pinpoint model, but depends on whether the calculation is used as a decoupling method or a coupling method.
Second, consider the PFM contact mode and non contact mode, analyzes the piezoelectric coefficient of quantitative analysis of the reasons for the difficulties, and puts forward two new methods for piezoelectric coefficient quantitative analysis. Firstly, considering the PFM test for contact mode, decoupling method and coupling method based on the analysis of the relationship between the intrinsic parameters of piezoelectric coefficient and materials. Secondly, we put forward the non contact mode PFM test, analysis of the relationship between effective piezoelectric coefficient and the testing conditions. Finally, we put forward a new method of piezoelectric coefficient of nano scale two quantitative analysis, namely double needle test method and material parameter inversion optimization method. The results show that the effective the piezoelectric coefficient and intrinsic electric elastic constants and test conditions are closely related, and even has a nonlinear relationship, makes quantitative analysis of the piezoelectric coefficient is very difficult. However, the double probe of our proposed method and inverse optimization method The accurate quantitative analysis of the analytical piezoelectric coefficient can be achieved.
Third, decoupling based on Green function method, development division numerical integral method, analysis of PFM imaging technology on non uniform static ferroelectric domain structure. Based on the 180 degree domain, 90 degree domain and complex domain as an example, analyzes the polarization effects of nonuniformity on PFM amplitude and phase response. The results show that the displacement of PFM the response depends on the polarization distribution in the material internal three-dimensional, three-dimensional reconstruction and ferroelectric domain structure, it is necessary to amplitude and phase of the known VPFM and LPFM response.
Fourth, based on the phase response analysis of PFM resolution on the nanoscale structure. We were at 180 degrees and 90 degrees out of plane domain domain, and 180 degree plane domain as an example, analyzes the relationship between the half width and tip radius response boundary, and analysis of resolution of VPFM and LPFM on nano ferroelectrics at the same time, also discussed the resolution of internal PFM ferroelectric domain. The results show that the PFM resolution depends on the boundary of the half width of the VPFM response, a higher resolution than the LPFM. But PFM can distinguish internal ferroelectric domain structure, but very sensitive to depth.
The numerical decoupling method and the fully coupled method have been developed in this paper to achieve the nanoscale quantitative analysis of the electromechanical coupling in PFM. This will lay a solid foundation for future analysis of heterogeneous ferroelectric materials and dynamic domain upset.

【學(xué)位授予單位】：湘潭大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2014
【分類號(hào)】：TM221;TB383.1

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本文編號(hào)：1565685