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  本文關(guān)鍵詞： 壓電驅(qū)動器 超聲電機 慣性沖擊式電機 精密調(diào)焦 位移分辨率　出處：《南京航空航天大學》2014年碩士論文　論文類型：學位論文

【摘要】：隨著科學技術(shù)的不斷進步和發(fā)展,許多領(lǐng)域都對精密驅(qū)動和定位提出了更高的要求,不僅要有較高的分辨率,而且要有足夠的輸出力和較大的輸出剛度,傳統(tǒng)形式的驅(qū)動器已經(jīng)不能滿足這些要求。基于壓電材料制成的壓電驅(qū)動器具有慣性小、響應(yīng)快、分辨率高等優(yōu)點,可以滿足驅(qū)動元器件小型化、微型化的要求。本課題創(chuàng)新性地利用壓電材料作為驅(qū)動元件,設(shè)計了2套用于顯微鏡物鏡精密調(diào)焦的壓電驅(qū)動器。第一套裝置利用旋轉(zhuǎn)型超聲電機作為動力源,驅(qū)動物鏡完成精密定位的功能,實現(xiàn)顯微鏡精密調(diào)焦的目的;第二套裝置利用壓電疊堆作為驅(qū)動源,驅(qū)動顯微鏡物鏡完成精密定位的功能。分別加工制造了樣機并開展了相關(guān)的實驗研究。本文主要內(nèi)容如下:1.介紹了壓電驅(qū)動器的概念,綜述了壓電驅(qū)動器的分類和應(yīng)用場合,對行波型旋轉(zhuǎn)超聲電機和慣性沖擊式電機的特點和應(yīng)用研究做了概述。2.介紹了壓電材料的性質(zhì)和參數(shù),論述了壓電疊堆的結(jié)構(gòu)、基本特性和使用注意事項。3.提出了以TRUM-30型旋轉(zhuǎn)超聲電機為驅(qū)動源的精密調(diào)焦裝置設(shè)計方案。分別設(shè)計了各組成機構(gòu)的結(jié)構(gòu)和尺寸,根據(jù)預定設(shè)計要求對柔性機構(gòu)進行了有限元分析。加工制造了樣機并進行了實驗,針對調(diào)焦裝置的關(guān)鍵性能指標,如位移分辨率、工作性能開展了實驗研究。實驗結(jié)果表明:該精密調(diào)焦裝置工作性能穩(wěn)定,能夠?qū)崿F(xiàn)顯微鏡物鏡的雙向位移調(diào)節(jié),其最小位移分辨率可以達到15μm。4.基于慣性沖擊理論,提出了以壓電疊堆為驅(qū)動源的慣性沖擊式直線電機的設(shè)計方案。選定了壓電疊堆的類型和型號,分別對電機的各組成機構(gòu)進行了設(shè)計。加工制造了樣機并進行了實驗,針對電機的關(guān)鍵性能指標,如位移分辨率、性能穩(wěn)定性開展了實驗研究。實驗結(jié)果表明:該慣性沖擊式電機工作性能平穩(wěn),步距均勻,可以實現(xiàn)顯微鏡物鏡的雙向位移調(diào)節(jié),其位移分辨率最小可以達到2μm的精度。
[Abstract]:With the continuous progress and development of science and technology, many fields have put forward higher requirements for precision driving and positioning, not only to have a higher resolution, but also to have sufficient output force and greater output stiffness. Traditional actuators can not meet these requirements. Piezoelectric actuators based on piezoelectric materials have the advantages of small inertia, fast response, high resolution and so on, which can meet the miniaturization of driving components. According to the requirement of miniaturization, two sets of piezoelectric actuators for precision focusing of microscope objective lens are designed by using piezoelectric material as driving element. The first set of devices uses rotary ultrasonic motor as power source. The purpose of precision focusing of microscope is realized by driving objective lens to complete precise positioning function. The second device uses piezoelectric stack as the driving source. The precision positioning function of driving microscope objective lens is realized. The prototype is manufactured and the related experimental research is carried out. The main contents of this paper are as follows: 1. The concept of piezoelectric actuator is introduced. The classification and application of piezoelectric actuators are reviewed. The characteristics and application of traveling wave rotary ultrasonic motors and inertial impulse motors are summarized. 2. The properties and parameters of piezoelectric materials are introduced. The structure of piezoelectric stack is discussed. 3. The design scheme of precision focusing device with TRUM-30 rotary ultrasonic motor as driving source is put forward, and the structure and size of each mechanism are designed respectively. The finite element analysis of the flexible mechanism is carried out according to the predetermined design requirements. The prototype is manufactured and tested. The key performance indexes of the focusing device, such as displacement resolution, are analyzed. The experimental results show that the precision focusing device has stable working performance and can realize the bidirectional displacement adjustment of the microscope objective. The minimum displacement resolution can reach 15 渭 m.4.Based on the theory of inertial shock, the design scheme of inertial shock linear motor with piezoelectric stack as driving source is proposed. The type and type of piezoelectric stack are selected. Each component mechanism of the motor is designed, the prototype is manufactured and experimented, aiming at the key performance index of the motor, such as displacement resolution. The experimental results show that the inertial impulse motor has a stable working performance and a uniform step distance, which can realize the bi-directional displacement adjustment of the microscope objective lens. The minimum displacement resolution can reach 2 渭 m precision.
【學位授予單位】：南京航空航天大學
【學位級別】：碩士
【學位授予年份】：2014
【分類號】：TM359.4

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本文編號：1475430