【摘要】：目前,諸如集成電路制造、微機(jī)電系統(tǒng)加工制造等產(chǎn)業(yè)都對多自由度精密定位平臺有著十分迫切的需求。研制一種具有多自由度、定位精度較高、結(jié)構(gòu)簡單以及推力較大等特點(diǎn)的精密定位平臺已經(jīng)迫在眉睫。本文將針對由改進(jìn)Y形平面電機(jī)驅(qū)動的多自由度精密定位平臺的控制方法、出力特性的優(yōu)化、熱特性等問題進(jìn)行分析。首先,本文針對改進(jìn)Y形平面電機(jī)的耦合機(jī)理進(jìn)行了分析,發(fā)現(xiàn)系統(tǒng)的控制模型有較強(qiáng)的耦合特性,進(jìn)而根據(jù)其耦合特性設(shè)計(jì)了解耦算法。算法主要應(yīng)用了線性化思想。通過假設(shè)一組與各自由度力矢量成比例的控制電流來對各自由度的運(yùn)動進(jìn)行控制,使得各自由度運(yùn)動的控制模型得以獨(dú)立。除此之外,本文還對影響改進(jìn)Y形平面電機(jī)出力特性的主要原因進(jìn)行了分析。針對動子翻轉(zhuǎn)運(yùn)動和線圈繞組內(nèi)反電動勢引起的推力波動加以了補(bǔ)償,減小了平面電機(jī)推力的波動,提高了控制精度。其次,本文根據(jù)改進(jìn)Y形平面電機(jī)的結(jié)構(gòu)特點(diǎn)設(shè)計(jì)了一種獨(dú)立水套式的冷卻結(jié)構(gòu)。通過仿真計(jì)算的方式確定了冷卻結(jié)構(gòu)的蛇形水厚度為4mm。此時(shí)對流散熱系數(shù)達(dá)到5.6×103W/(m2·℃),進(jìn)而利用該參數(shù)對驅(qū)動單元的溫度場進(jìn)行了仿真。在未添加強(qiáng)制水冷的條件下,當(dāng)驅(qū)動單元兩線圈繞組內(nèi)電流均為2A時(shí),驅(qū)動單元最高溫度達(dá)到了77℃。加入強(qiáng)制水冷后,同等條件下驅(qū)動單元的最高溫度下降到30℃。加入強(qiáng)制水冷后驅(qū)動單元推力變化由-2.16%下降到-0.3%以下。除此之外,通過對驅(qū)動單元進(jìn)行的溫升實(shí)驗(yàn),驗(yàn)證了仿真結(jié)果。最后,本文搭建了實(shí)驗(yàn)平臺并對所設(shè)計(jì)定位平臺的運(yùn)動指標(biāo)進(jìn)行了實(shí)驗(yàn)測試。實(shí)驗(yàn)表明定位平臺Y方向的行程為7mm,位移分辨力達(dá)到7μm,空載最大加速度不小于0.34m/s2,負(fù)載為1kg時(shí)最大加速度不小于0.27m/s2,推力不小于1.31N。定位平臺X方向的行程為6.8mm,位移分辨力達(dá)到7μm,空載最大加速度不小于0.42m/s2,負(fù)載為1kg時(shí)最大加速度不小于0.33m/s2,推力不小于1.54N。定位平臺Rz方向的行程為±0.6°,轉(zhuǎn)動分辨力達(dá)到11.5″。本文還針對定位平臺各自由度運(yùn)動的耦合情況進(jìn)行了實(shí)驗(yàn)測試,并且針對定位平臺在二維平面上任一點(diǎn)的定位以及跟隨特性進(jìn)行了圓形軌跡運(yùn)動實(shí)驗(yàn)。
[Abstract]:At present, many industries, such as integrated circuit manufacturing, micro-electromechanical system manufacturing and so on, have an urgent need for multi-degree-of-freedom precision positioning platform. It is urgent to develop a precision positioning platform with many degrees of freedom, high positioning accuracy, simple structure and large thrust. In this paper, the control method of multi-degree-of-freedom precision positioning platform driven by the improved Y-shaped planar motor, the optimization of the output characteristics and the thermal characteristics are analyzed. Firstly, this paper analyzes the coupling mechanism of the improved Y-shaped planar motor, finds that the control model of the system has strong coupling characteristics, and then designs a decoupling algorithm according to its coupling characteristics. The linearization idea is mainly used in the algorithm. By assuming a set of control currents proportional to the force vectors of each degree of freedom to control the motion of each degree of freedom, the control model of the motion of each degree of freedom is independent. In addition, the main reasons that affect the improvement of the output characteristics of Y-shaped planar motor are also analyzed in this paper. The thrust fluctuation caused by the rotor flipping motion and the back EMF in the coil winding is compensated to reduce the thrust fluctuation of the planar motor and to improve the control precision. Secondly, an independent water-sleeve cooling structure is designed according to the structural characteristics of the improved Y-shaped planar motor. The thickness of the snake-shaped water of the cooling structure is determined to be 4 mm by simulation. The convection heat dissipation coefficient is 5. 6 脳 103W/ (m2 鈩，

本文編號：2392539