本文關(guān)鍵詞： 移相全橋 環(huán)流損耗 占空比丟失 輔助變壓器 軟開關(guān)　出處：《西安理工大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：磁控濺射作為一種鍍膜工藝,能有效提高材料的耐腐蝕性、耐磨損性、抗氧化性而受到重視。但磁控濺射負(fù)載變化范圍大且具有非線性的特點(diǎn),對磁控濺射電源提出了較高的要求。在電源輸出寬范圍可調(diào)的條件下,變換器損耗成為制約磁控濺射電源性能提升的重要問題。本文圍繞磁控濺射電源主電路的拓?fù)浣Y(jié)構(gòu)、寬范圍的軟開關(guān)實(shí)現(xiàn)等問題展開研究。首先,在分析多種加輔助網(wǎng)絡(luò)的全橋變換器的基礎(chǔ)上,確定采用加輔助變壓器ZVS全橋變換器拓?fù)?并對其拓?fù)浣Y(jié)構(gòu)和工作原理作了詳細(xì)分析。該拓?fù)淅米钄嚯娙輰ψ儔浩髟叚h(huán)流進(jìn)行抑制,降低了環(huán)流損耗,同時(shí)利用輔助變壓器網(wǎng)絡(luò)為滯后臂開關(guān)管提供足夠的能量,使變換器能夠?qū)崿F(xiàn)寬負(fù)載范圍的軟開關(guān)。其次,對變換器的關(guān)鍵問題進(jìn)行了詳細(xì)的分析,主要包括滯后臂ZVS軟開關(guān)的實(shí)現(xiàn)、變壓器原邊環(huán)流的抑制、占空比丟失和變壓器二次側(cè)寄生振蕩等問題。然后對影響變換器性能的主要參數(shù)進(jìn)行研究,推導(dǎo)了阻斷電容、變壓器勵(lì)磁電感和輔助電容的計(jì)算公式。根據(jù)磁控濺射電源的設(shè)計(jì)指標(biāo),對主電路的參數(shù)進(jìn)行了設(shè)計(jì)和器件選型,并在Pspicel6.3的仿真環(huán)境下對變換器的主電路進(jìn)行了仿真分析,仿真結(jié)果證明了理論分析的正確性。最后,在理論分析和仿真的基礎(chǔ)上搭建實(shí)驗(yàn)平臺進(jìn)行實(shí)驗(yàn)研究。實(shí)驗(yàn)結(jié)果表明,本文所采用的變換器拓?fù)渚哂锌刂坪唵巍㈤_關(guān)管能夠?qū)崿F(xiàn)寬負(fù)載范圍的軟開關(guān)、無占空比丟失、無環(huán)流損耗等優(yōu)點(diǎn),驗(yàn)證了理論分析的正確性和變換器設(shè)計(jì)的合理性。
[Abstract]:As a coating process, magnetron sputtering can effectively improve the corrosion resistance, wear resistance and oxidation resistance of materials. The high requirement for magnetron sputtering power supply is put forward. Under the condition that the output range is adjustable, converter loss becomes an important problem that restricts the performance improvement of magnetron sputtering power supply. This paper revolves around the topology structure of the main circuit of magnetron sputtering power supply. The realization of soft switching in a wide range is studied. Firstly, based on the analysis of various full-bridge converters with auxiliary networks, the topology of ZVS full-bridge converters with auxiliary transformers is determined. The topology and working principle are analyzed in detail. The topology uses the blocking capacitance to suppress the primary circulation of the transformer and reduces the circulation loss. At the same time, the auxiliary transformer network is used to provide sufficient energy for the hysteresis arm switch tube. The converter can realize the soft switch with wide load range. Secondly, the key problems of the converter are analyzed in detail, including the realization of the ZVS soft switch with the hysteresis arm, the suppression of the primary circulation of the transformer, The loss of duty cycle and the secondary side parasitic oscillation of transformer are discussed. The main parameters affecting the performance of the converter are studied and the blocking capacitance is derived. According to the design index of magnetron sputtering power supply, the parameters of the main circuit and the device selection are designed, and the main circuit of the converter is simulated and analyzed in the Pspicel6.3 simulation environment. The simulation results prove the correctness of the theoretical analysis. Finally, the experimental platform is built on the basis of theoretical analysis and simulation. The experimental results show that the topology of the converter used in this paper has simple control. The switching tube has the advantages of wide load range soft switch, no duty cycle loss, no circulation loss and so on. The correctness of the theoretical analysis and the rationality of the converter design are verified.
【學(xué)位授予單位】：西安理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號】：TM46

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