本論文主要針對(duì)TiAlN系光吸收膜的制備及性能開展研究工作。利用磁控濺射法在銅片和硅片上沉積了具有熱穩(wěn)定的TiAlN選擇性光吸收薄膜。通過控制TiAlN薄膜的柱狀結(jié)構(gòu),鍍層實(shí)現(xiàn)在70℃下對(duì)太陽光的高吸收率（0.92）同時(shí)還具有低的發(fā)射率（0.06）。利用紫外可見分光光度計(jì)、掃描電子顯微鏡、透射電子顯微鏡、顯微拉曼光譜儀和X射線光電子能譜儀測(cè)試了薄膜的熱穩(wěn)定性。結(jié)果表明,TiAlN選擇性吸收薄膜的性能和結(jié)構(gòu)在550℃下保持了高的穩(wěn)定性。采用直流脈沖磁控濺射工藝對(duì)鈦靶和鋁靶共同濺射,制備出了近似黑體的納米結(jié)構(gòu)TiAlN超寬頻光吸收薄膜。通過控制氮?dú)饬髁亢湾兡すに噮?shù),獲得底層與基體平行的納米層狀結(jié)構(gòu),外層為具有錐形頂部的納米柱狀結(jié)構(gòu)。研究表明,該結(jié)構(gòu)底層提供較高的附著力,可是鍍層在各類基體上穩(wěn)定生長(zhǎng),外層柱狀結(jié)構(gòu)可以使得盡可能多的入射光能夠進(jìn)入到鍍膜內(nèi)部,柱狀結(jié)構(gòu)的晶界可為入射光提供多次反射,保證入射光的充分吸收。在200nm²500nm較寬的波長(zhǎng)范圍內(nèi)單膜的平均吸收率為0.89,加了減反層后在200nm²500nm較寬的波長(zhǎng)范圍內(nèi)吸收率提高到了... 

【文章來源】：中國(guó)科學(xué)院大學(xué)(中國(guó)科學(xué)院寧波材料技術(shù)與工程研究所)浙江省

【文章頁數(shù)】：152 頁

【學(xué)位級(jí)別】：博士

【文章目錄】：
摘要
Abstract
Chapter 1.Introduction
    1.1 Electromagnetic Radiations
    1.2 Thermal Radiations
    1.3 Solar Radiations
    1.4 Propagation of Light through Inhomogeneous Media
        1.4.1 Lorenz-Mie Theory
        1.4.2 Effective Medium Theory
        1.4.3 Kobelka and Munk Theory
        1.4.4 Stefan-Boltzmann Law
        1.4.5 Planck’s Law
        1.4.6 Kirchhoff’s Law
    1.5 Conversion of Solar Energy
    1.6 Optical Materials
    1.7 Selective Solar Absorbers
        1.7.1 Historical Background and Industrial Attraction
        1.7.2 Understanding and Characterization of Selective Solar Absorber
        1.7.3 Ideal Spectral Selectivity
        1.7.4 Selective Solar Absorber-State of the Art
        1.7.5 Absorber-Reflector Tandem
            1.7.5.1 Semiconductor-Reflector Coatings
            1.7.5.2 Textured Surface Coatings
            1.7.5.3 Multilayer-Metal Coatings
            1.7.5.4 Composite Coatings
        1.7.6 Stability
            1.7.6.1 Performance Criterion
        1.7.7 Flat-Plate Collector
    1.8 Broadband Absorbers
        1.8.1 Historical Background and Industrial Attraction
        1.8.2 Understanding and Characterization of Broadband Solar Absorber
        1.8.3 Ideal Broadband Solar Absorbers
        1.8.4 Broadband Absorbers-State of the Art
            1.8.4.1 Plasmonic Materials
            1.8.4.2 Nanophotonic Structures
        1.8.5 Stability
    1.9 Recent Progress in Selective Solar Absorbers
    1.10 Recent Progress in Broadband Solar Absorbers
    1.11 Future Perspectives
Chapter 2 Experimental Methods
    2.1 Thin Film Development
    2.2 Sputtering
        2.2.1 DC Magnetron Sputtering
        2.2.2 Reactive Magnetron Sputtering
    2.3 Characterization Techniques
        2.3.1 Scanning Electron Microscopy(SEM)
        2.3.2 Transmission Electron Microscopy(TEM)
        2.3.3 X-ray Diffraction(XRD)
        2.3.4 Scanning Probe Microscopy(SPM)
        2.3.5 UV-Vis-NIR Spectrophotometry
        2.3.6 Fourier Transform Infra-red Spectroscopy(FTIR)
        2.3.7 Ellipsometry
        2.3.8 Raman Spectroscopy
        2.3.9 X-ray Photoelectron Spectroscopy(XPS)
        2.3.10 Adhesion Test
        2.3.11 Thickness Measurements
        2.3.12 Electrochemical Corrosion Study
Chapter 3 Design,Fabrication and Thermal Stability of Spectrally Selective TiAlN/SiO2Tandem Absorber
    3.1 Experimental Details
    3.2 Results and Discussion
        3.2.1 Scanning Electron Microscopy(SEM)
        3.2.2 X-ray Diffraction(XRD)
        3.2.3 UV-Vis-NIR Spectrophotometry
        3.2.4 Ellipsometry
    3.3 Thermal Stability
        3.3.1 Raman Spectroscopy
        3.3.2 X-ray Photoelectron Spectroscopy
    3.4 Summary
Chapter 4.Enhancing spectral selectivity of TiAlN/SiO_2 solar absorbing coatings by post deposition annealing
    4.1 Experimental Details
    4.2 Results and Discussion
    4.3 Summary
Chapter 5 Refractory Metal Based Nanophotonic Structures as Broadband Light Absorbers with Robust Stability
    5.1 Experimental Details
        5.1.1 Materials and Methods
        5.1.2 Measurements
        5.1.3 Stability Tests
    5.2 Results and Discussion
        5.2.1 Growth and Structural Analysis
        5.2.2 Broadband Absorption
        5.2.3 Structural and Absorption Viability
        5.2.4 Suppression of Surface Reflections
        5.2.5 Stability of VATAN Black Coatings
    5.3 Comparison with Literature
    5.4 Summary
Chapter 6 Conclusions and Future Work
    6.1 Conclusions
    6.2 Future Work
Bibliography
Publications
Achievements and Awards
Acknowledgements



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