發(fā)布時(shí)間：2018-12-15 20:01

【摘要】：采用等離子體發(fā)射監(jiān)測(cè)(PEM)系統(tǒng)實(shí)現(xiàn)閉環(huán)控制反應(yīng)氣體流量,使反應(yīng)濺射穩(wěn)定在滯回曲線過渡區(qū),并以氣相CO_2和O_2為碳源和氧源制備了碳摻雜鈦氧(C∶Ti-O)薄膜。采用原子力顯微鏡、掠入射X射線衍射和X射線光電子能譜表征薄膜的表面形貌、結(jié)構(gòu)、成分,紫外-可見分光光度計(jì)測(cè)試薄膜透射率并用Tauc作圖法計(jì)算薄膜的帶隙寬度。結(jié)果表明,隨著輝光強(qiáng)度設(shè)定點(diǎn)(SP)的增大,沉積速率增大,薄膜中Ti-C鍵含量增多,帶隙寬度降低,薄膜的結(jié)晶性增強(qiáng)且有利于金紅石相的形成。
[Abstract]:The plasma emission monitoring (PEM) system is used to realize the closed-loop control of the reactive gas flow and the reactive sputtering is stabilized in the hysteretic curve transition region. Carbon doped titanium oxide (C:Ti-O) thin films were prepared by gas phase CO_2 and O _ 2 as carbon and oxygen sources. The surface morphology, structure, composition and transmittance of the films were measured by atomic force microscope, grazing incident X-ray diffraction and X-ray photoelectron spectroscopy. The band gap width of the films was calculated by Tauc method. The results show that with the increase of (SP), the deposition rate increases, the Ti-C bond content in the film increases, the band gap width decreases, the crystallinity of the film increases and the rutile phase is formed.
【作者單位】： 南海海洋資源與利用國(guó)家重點(diǎn)實(shí)驗(yàn)室;海南大學(xué)材料與化工學(xué)院熱帶島嶼資源先進(jìn)材料教育部重點(diǎn)實(shí)驗(yàn)室;
【基金】：國(guó)家自然科學(xué)基金(51461015) 海南省重點(diǎn)項(xiàng)目(ZDYF2016019) 海南大學(xué)研究生實(shí)踐創(chuàng)新項(xiàng)目
【分類號(hào)】：TB383.2

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1 段永利;許生;巴德純;范垂禎;;使用PEM監(jiān)控制備光致親水性TiO_2薄膜的研究[A];中國(guó)真空學(xué)會(huì)2006年學(xué)術(shù)會(huì)議論文摘要集[C];2006年

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