【摘要】：近年來，隨著工業(yè)化進(jìn)程的加快，環(huán)境污染日趨嚴(yán)重，迫切需要人們對有毒有害、易燃易爆氣體進(jìn)行實時監(jiān)測和控制。此外，交通運輸中的酒駕檢查以及恐怖襲擊中的毒氣檢測預(yù)防等，也都迫切需要對氣體組分進(jìn)行快速識別，面對這些威脅和挑戰(zhàn)，氣敏傳感器的開發(fā)已成為當(dāng)今關(guān)系到人類發(fā)展的重要組成部分，成為世界各國共同關(guān)注的主要課題之一。作為氣敏傳感器核心部分之一的氣敏材料，其種類和結(jié)構(gòu)對傳感器的使用性能都有著重要影響。人們通過各種方法來提高氣體傳感器件的性能，，如金屬摻雜、材料多孔化等，而開發(fā)和設(shè)計具有多孔結(jié)構(gòu)、大比表面積的氧化物半導(dǎo)體材料，是有效改善傳感器傳感特性的有效方案之一，多孔化材料能顯著提高材料的比表面積、載流子遷移率、多孔性和通透性，對提高氣敏傳感器的靈敏度，響應(yīng)恢復(fù)特性和檢測下限具有重要作用，我們通過對氧化物半導(dǎo)體材料氧化鋅進(jìn)行結(jié)構(gòu)調(diào)控，制作出性能優(yōu)良的氣敏傳感器件。 本文是以水熱合成法作為平臺，以ZnO微納的材料為主要的研究對象，通過調(diào)節(jié)水熱前驅(qū)體溶液中各原材料之間的比例、溶液的pH值以及添加表面活性劑等方法來設(shè)計合成不同形貌和結(jié)構(gòu)的ZnO微納材料，以期改善ZnO材料的氣敏性能，從而制作出高性能的氣體傳感器件。主要內(nèi)容如下： 1.殼狀氧化鋅納米材料制備及其傳感器件研究 用水熱法合成了形貌呈殼狀結(jié)構(gòu)的氧化鋅納米材料，制作了基于該殼狀結(jié)構(gòu)氧化鋅納米材料的的氣體傳感器，并對其氣敏特性進(jìn)行了研究。結(jié)果顯示，該氣體傳感器在300℃的最佳工作溫度下，對100ppm丙酮氣體的靈敏度為24.8，響應(yīng)和恢復(fù)時間分別為2s和3s。此外，還測試了該傳感器對普遍幾種干擾氣體的氣敏性能，結(jié)果表明了該器件具有良好的選擇性能。 2.表面無孔和多孔氧化鋅納米棒的制備及其傳感器件研究 利用簡單的水熱法成功制備了表面無孔和多孔的棒狀氧化鋅納米材料。我們將這兩種材料作為敏感材料制成了氣體傳感器件，研究表明，在最佳工作溫度280℃的條件下，基于多孔納米棒狀氧化鋅氣體傳感器件對100ppm乙醇?xì)怏w的靈敏度為27.9，其是在相同條件下基于無孔納米棒狀氧化鋅傳感器件對同濃度乙醇?xì)怏w靈敏度（其值為5.8）的4.8倍，并且是相同條件下干擾氣體中靈敏度最大的丙酮氣體的3.1倍，說明該器件具有優(yōu)異的選擇。此外，基于多孔納米棒狀氧化鋅傳感器件對100ppm乙醇?xì)怏w的響應(yīng)恢復(fù)時間分別為3s和10s。 3.多孔氧化鋅微米球的制備及其傳感器件研究 通過常用的水熱法成功合成了多孔氧化鋅微米球材料，以其為敏感材料制作了氣敏傳感器件，研究了該器件的氣敏特性。研究表明，在工作溫度為280℃條件下，該氣敏傳感器件對含量為50ppm丙酮氣體的靈敏度為26.8，響應(yīng)恢復(fù)的時間分別為4s和10s。此外，基于多孔氧化鋅微米球該傳感器件對常見其它干擾氣體的靈敏度比較小，因此，該器件具有良好的選擇性能。
[Abstract]:In recent years, with the acceleration of the industrialization process, the environmental pollution is becoming more and more serious, and people need to monitor and control the toxic and harmful, inflammable and explosive gases in real time. In addition, there is an urgent need for rapid identification of gas components and the development of gas-sensitive sensors has become an important component of human development in the face of these threats and challenges. It is one of the main topics of common concern to all countries of the world. As the air-sensitive material of the core part of the gas-sensitive sensor, its kind and structure have important influence on the performance of the sensor. various methods are adopted to improve the performance of gas sensor devices, such as metal doping, porous materials and the like, and the development and design of oxide semiconductor materials with porous structure and large specific surface area are one of the effective schemes for effectively improving sensor sensing characteristics, The porous material can remarkably improve the specific surface area, the carrier mobility, the porosity and the permeability of the material, and has an important role in improving the sensitivity, the response recovery characteristic and the detection lower limit of the gas-sensitive sensor, and the structure of the oxide semiconductor material zinc oxide is controlled, and the gas-sensitive sensor device with excellent performance is manufactured. In this paper, using hydrothermal synthesis method as a platform, ZnO micro-nano material is used as the main research object. By adjusting the ratio of raw materials in the hydrothermal precursor solution, the pH value of the solution and the addition of surfactants, ZnO micro-nano materials with different shapes and structures are designed. Materials, with a view to improving the gas-sensitive properties of ZnO materials, to produce high-performance gas sensing Devices. Main Content The preparation method of the shell-like zinc oxide nano material In this paper, a gas sensor based on the shell-like structure of zinc oxide nano-material was prepared by using hydrothermal method, and the gas sensor based on the shell-like structure zinc oxide nano-material was prepared. The sensitivity of the gas sensor to 100ppm acetone gas was 24. 8, response and recovery time at the optimum operating temperature of 300 鈩

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