【摘要】：本實驗中,通過嘗試不同的Ti O_2溶液以及Ta_2O_5溶液的配制比例,最終配制出穩(wěn)定性好且涂膜效果良好的溶液。在制備薄膜的過程中,配制溶液,涂制薄膜,以及薄膜的熱處理等過程均對薄膜的光學性能及激光損傷閾值有著一定的影響。對此進行了探索研究,尋找合適的工藝條件來解決這些問題。在研究過程中,采用了多種方法對制備所得薄膜樣品的性能進行測試表征,綜合評價分析了薄膜樣品的性能特點。通過測試和表征,得出以下結論:實驗中涂制薄膜的溶液需一定的陳化時間,Ti O2溶液陳化約7天效果較佳,Ta_2O_5溶液則需要陳化20天左右。在涂制薄膜的過程中,需要對實驗所處環(huán)境中的溫度和濕度進行控制。室溫為20℃左右,濕度低于35%,并且溫度與濕度的控制對于涂制Ta_2O_5薄膜的作用效果尤為明顯。同時,采用旋涂法涂制的薄膜容易出現(xiàn)輻射狀條紋,而采用提拉法涂制薄膜,則可以有效的減輕或者避免薄膜出現(xiàn)輻射狀條紋。在對薄膜樣品的熱處理過程中,發(fā)現(xiàn)緩慢升溫可以有效避免薄膜開裂,并且升溫的速率對Ti O2薄膜的作用效果尤為明顯。采用一定壓力的純氧氣氛圍及較長時間的保溫處理可以減輕或避免薄膜變色。當采用較高熱處理溫度時,可以提高薄膜樣品的折射率;同時較高的熱處理溫度及較長的熱處理時間可以使薄膜中的有機物和積碳等揮發(fā)徹底,從而減輕薄膜變色程度。但同時也發(fā)現(xiàn)采用較低溫度熱處理后的Ti O2薄膜及Ta_2O_5薄膜的激光閾值較高。因此,在實驗中需要綜合考慮各個方面的影響因素。
[Abstract]:In this experiment, the solution with good stability and good coating effect was prepared by using different proportions of Ti O _ 2 solution and Ta_2O_5 solution. In the process of preparing thin films, the preparation of solution, the coating of films and the heat treatment of the films all have a certain influence on the optical properties and laser damage threshold of the films. To solve these problems, we have explored and studied to find suitable technological conditions to solve these problems. In the course of the study, the properties of the films were tested and characterized by various methods, and the properties of the films were comprehensively evaluated and analyzed. By testing and characterizing, the following conclusions are drawn: in the experiment, the solution of coated film needs a certain aging time and the aging effect of TIO _ 2 solution is about 7 days. The solution of Ta2O5 needs to be aged for about 20 days. In the process of coating the film, the temperature and humidity in the experimental environment should be controlled. The temperature is about 20 鈩，

本文編號：2243629