【摘要】：采用金屬-絕緣體-金屬(MIM)測試結(jié)構(gòu)表征薄膜高頻特性時(shí),差動(dòng)法能有效地剝離測量過程中寄生效應(yīng)對(duì)表征結(jié)果的消極影響。為此,借助仿真軟件ADS深入探究了差動(dòng)法中不同內(nèi)徑的結(jié)構(gòu)組合,以及結(jié)構(gòu)中底部電極的厚度和材料對(duì)表征結(jié)果的影響。結(jié)果表明:組合DM65-55(兩個(gè)結(jié)構(gòu)的內(nèi)徑分別為65μm和55μm)能較大限度剝離寄生效應(yīng)的影響,其表征精度高達(dá)98.7%;底部電極厚度為0.1μm時(shí),能得到較理想的表征結(jié)果;底部電極材料的改變對(duì)損耗角正切值的計(jì)算影響較大,其均值隨著材料的電阻率減小而減小。
[Abstract]:When the high frequency characteristics of the films are characterized by metal-insulator-metal (MIM), the differential method can effectively peel off the negative effect of parasitic effect on the characterization results. For this reason, the structure combination of different inner diameters in the differential method, and the influence of the thickness of the bottom electrode and the material on the characterization results were investigated by the simulation software ADS. The results show that the combined DM65-55 (65 渭 m and 55 渭 m internal diameters of the two structures) can greatly affect the exfoliation parasitic effect, and the characterization accuracy is up to 98.7m, and the better characterization results can be obtained when the bottom electrode thickness is 0.1 渭 m. The change of the bottom electrode material has a great influence on the calculation of the tangent value of the loss angle, and its mean value decreases with the decrease of the resistivity of the material.
【作者單位】： 桂林電子科技大學(xué)機(jī)電工程學(xué)院;
【基金】：國家自然科學(xué)基金資助項(xiàng)目(No.61361004) 廣西科學(xué)研究與技術(shù)開發(fā)計(jì)劃資助項(xiàng)目(No.桂科轉(zhuǎn)14124005-1-7)
【分類號(hào)】：TB383.2

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