發(fā)布時(shí)間：2018-03-26 15:01

  本文選題：B-C-N薄膜　切入點(diǎn)：脈沖激光沉積　出處：《武漢理工大學(xué)》2015年碩士論文

【摘要】：硼碳氮(B-C-N)三元化合物兼具立方氮化硼與金剛石的優(yōu)良特性,作為一類超硬結(jié)構(gòu)材料,在防護(hù)涂層、切削工具等工程領(lǐng)域具有廣泛而重要的應(yīng)用。特定鍵結(jié)構(gòu)是B-C-N薄膜獲得優(yōu)異力學(xué)性能的前提,而現(xiàn)有研究卻很少涉及沉積過(guò)程中B-C-N薄膜的鍵結(jié)構(gòu)演變問(wèn)題。為此,本文采用脈沖激光沉積技術(shù)制備B-C-N薄膜,重點(diǎn)研究其鍵結(jié)構(gòu)和力學(xué)性能隨沉積工藝(氮?dú)鈮毫�、襯底溫度、激光能量密度)的演變規(guī)律,以期通過(guò)建立鍵結(jié)構(gòu)和力學(xué)性能之間的相互關(guān)系實(shí)現(xiàn)對(duì)B-C-N薄膜力學(xué)性能的優(yōu)化。通過(guò)調(diào)整沉積工藝,分別在不同氮?dú)鈮毫?2.5~5.0 Pa)、襯底溫度(RT~600?C)和激光能量密度(1.0~3.0 J/cm2)條件下制備出B-C-N薄膜。利用紅外光譜和X射線光電子能譜對(duì)薄膜結(jié)構(gòu)進(jìn)行分析,結(jié)果表明薄膜中均含有B-N、B-C、C-N和C=N等不同結(jié)合鍵,說(shuō)明形成了B-C-N三元化合物,得到的薄膜為原子級(jí)雜化。隨著氮?dú)鈮毫Φ脑龃?B-C-N薄膜的沉積速率不斷增大,粗糙度先減小后增大,同時(shí)N含量增加,B含量先增加后減小,而C含量先減小后增加。此外,薄膜鍵結(jié)構(gòu)也發(fā)生相應(yīng)演變:當(dāng)?shù)獨(dú)鈮毫?.5 Pa增大到3.5 Pa時(shí),鍵結(jié)構(gòu)由sp2雜化的B-N和C=N鍵向B-C鍵和sp3雜化的C-N鍵演變;由3.5 Pa繼續(xù)增大到5.0 Pa時(shí),薄膜的鍵結(jié)構(gòu)又發(fā)生由B-C和sp3雜化的C-N鍵向sp2雜化的B-N和C=N鍵逆向演變。隨著襯底溫度的升高,B-C-N薄膜的沉積速率和表面粗糙度均不斷減小,同時(shí)C和N含量逐漸降低而B(niǎo)含量增大,而且鍵結(jié)構(gòu)也發(fā)生相應(yīng)演變:當(dāng)襯底溫度從室溫升高到400?C時(shí),鍵結(jié)構(gòu)從sp2雜化的B-N和C=N鍵向B-C鍵和sp3雜化的C-N鍵演變;從400?C繼續(xù)升高到600?C時(shí),又由B-C和sp3雜化的C-N鍵向sp2雜化的B-N和C=N鍵逆向演變。隨著激光能量密度的增大,B-C-N薄膜的沉積速率不斷增大,表面粗糙度先增大后減少,同時(shí)B和N的含量逐漸增加而C含量則不斷降低,而且鍵結(jié)構(gòu)逐漸由sp2雜化的B-N和C=N鍵向B-C鍵和sp3雜化的C-N鍵演變。在不同脈沖激光沉積條件下制備的B-C-N薄膜,其硬度和彈性模量的變化范圍分別為7.5~33.7 GPa和128~256 GPa,這與沉積過(guò)程中薄膜鍵結(jié)構(gòu)和鍵含量的演變規(guī)律相一致:高含量的B-C鍵和sp3雜化的C-N鍵有利于提高薄膜硬度和彈性模量,而高含量sp2雜化的B-N和C=N鍵則會(huì)劣化薄膜的力學(xué)性能。
[Abstract]:Boron carbon nitride B-C-N) ternary compound has the excellent properties of cubic boron nitride and diamond, as a kind of superhard structure material, in the protective coating, Cutting tools and other engineering fields have a wide range of important applications. Specific bond structure is the prerequisite for obtaining excellent mechanical properties of B-C-N thin films, while the existing research rarely involves the evolution of bond structure of B-C-N thin films during deposition. In this paper, B-C-N thin films were prepared by pulsed laser deposition. The evolution of bond structure and mechanical properties with the deposition process (nitrogen pressure, substrate temperature, laser energy density) was studied. By establishing the relationship between bond structure and mechanical properties, the mechanical properties of B-C-N films can be optimized. The structure of B-C-N thin films was analyzed by infrared spectroscopy and X-ray photoelectron spectroscopy. The results show that the films contain different binding bonds, such as B-N B-Con C-N and Con N, indicating the formation of ternary compounds of B-C-N. With the increase of nitrogen pressure, the deposition rate of B-C-N films increases, the roughness decreases first and then increases, while the N content increases first and then decreases, while the C content decreases first and then increases. When the nitrogen pressure increased from 2.5 Pa to 3.5 Pa, the bond structure changed from B-N and Con N bonds of sp2 hybrid to B-C bond and C-N bond of sp3 hybrid, and increased from 3.5 Pa to 5.0 Pa. The bond structure of the films changed from B-C and sp3 hybrid C-N bonds to sp2 hybrid B-N and Con N bonds. The deposition rate and surface roughness of B-C-N films decreased with the increase of substrate temperature. At the same time, the content of C and N decreases gradually, while the content of B increases, and the bond structure evolves accordingly: when the substrate temperature increases from room temperature to 400? At C, the bond structure evolves from B-N and Con N bonds of sp2 hybrid to B-C bond and C-N bond from sp3 hybrid bond, from 400? C continues to rise to 600? With the increase of laser energy density, the deposition rate of B-C-N films increases and the surface roughness increases first and then decreases with the increase of laser energy density. At the same time, the contents of B and N increased and the content of C decreased, and the bond structure gradually changed from B-N and Con N bonds of sp2 hybrid to C-N bonds of B-C bond and sp3 hybrid. B-C-N thin films were prepared under different pulsed laser deposition conditions. The variation range of hardness and modulus of elasticity is 7.5g / 33.7 GPa and 128256GParespectively, which is consistent with the evolution of bond structure and bond content during deposition: high content B-C bond and sp3 hybrid C-N bond can improve the hardness and elastic modulus of the film. The mechanical properties of the films were degraded by B-N and Con N bonds with high content of sp2 hybrid.
【學(xué)位授予單位】：武漢理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TB383.2

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