本文選題：類金剛石涂層　切入點(diǎn)：硼摻雜　出處：《上海工程技術(shù)大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

【摘要】：通常把一系列含有sp3和sp2雜化的不穩(wěn)定的非晶碳膜統(tǒng)稱為類金剛石薄膜(DLC),這類薄膜具有高的硬度,低的摩擦因數(shù),優(yōu)異的耐磨性,良好的光學(xué)透過(guò)性和生物相容性,是近年來(lái)引起廣泛重視的一種新型功能薄膜材料。并且摻B類金剛石涂層可以做成BDD電極,BDD電極具有高的析氧電位、低的背景電流、吸附惰性等特性,因而成為電化學(xué)電極的優(yōu)良之選。但是類金剛石薄膜存在內(nèi)應(yīng)力過(guò)高、熱穩(wěn)定性差、脆性大、不能大面積沉積、摩擦磨損機(jī)理不完善的缺陷,國(guó)內(nèi)外學(xué)者通過(guò)金屬和非金屬摻雜、多層膜結(jié)構(gòu)設(shè)計(jì)等方法來(lái)降低薄膜內(nèi)應(yīng)力,提高熱穩(wěn)定性能;通過(guò)制備方法的改變來(lái)實(shí)現(xiàn)大面積沉積;通過(guò)不同條件下的摩擦行為來(lái)分析其摩擦磨損機(jī)理;這些解決辦法均是在復(fù)合鍍膜技術(shù)的“五化”思想(沉積技術(shù)復(fù)合化,涂層組成多元化,晶體結(jié)構(gòu)納米化,組成和結(jié)構(gòu)多層化/梯度化)上衍生出來(lái)的。膜基結(jié)合力強(qiáng)弱是決定涂層壽命的關(guān)鍵因素,也是決定所有涂層應(yīng)用價(jià)值的最基礎(chǔ)因素。DLC涂層結(jié)合強(qiáng)度不高,一直是困擾其進(jìn)一步應(yīng)用的難題之一。目前主要通過(guò)元素?fù)诫s、過(guò)渡層制備、納米調(diào)制等手段來(lái)提高其結(jié)合力。其中硼摻雜類金剛石涂層的研究主要集中在電化學(xué)和生物相容性方面,對(duì)膜基結(jié)合力其最基礎(chǔ)的力學(xué)性能鮮有研究,因此研究摻硼類金剛石涂層這方面性能不僅能解決其最基本的問(wèn)題,而且能擴(kuò)寬其應(yīng)用途徑。本課題主要采用磁控濺射方法制備類金剛石涂層,首先采用射頻磁控濺射法在不同基底材料上制備了類金剛石涂層,分析了基底材料對(duì)涂層結(jié)構(gòu)及膜基結(jié)合力的影響;其次采用閉合場(chǎng)非平衡磁控設(shè)備在不同石墨靶電流下制備了類金剛石涂層,通過(guò)原子力顯微鏡、掃描電鏡、拉曼光譜、X衍射等方法分析了其微觀形貌與結(jié)構(gòu),通過(guò)納米壓痕、劃痕測(cè)試、摩擦磨損表征了其性能;最后采用固體硼作為濺射靶材制備了摻硼DLC涂層,采用多種檢測(cè)方法分析了其微觀結(jié)構(gòu)及表征了其性能,分析硼元素對(duì)DLC涂層的影響。結(jié)果表明:射頻磁控濺射和閉合場(chǎng)非平衡磁控濺射制備的類金剛石涂層,采用后者制備的涂層sp2鍵含量更高,膜基結(jié)合力更好,摩擦系數(shù)很低,一般在0.10以下;摻雜硼元素使得類金剛石涂層的表面粗糙度降低,sp2鍵含量增多;少量的硼元素可以使涂層彈性模量和硬度均提高,膜基結(jié)合力也小范圍提高,摩擦系數(shù)降低,磨損率降低;但是硼元素過(guò)多,涂層彈性模量、硬度和膜基結(jié)合力均大大下降。
[Abstract]:A series of unstable amorphous carbon films containing sp3 and sp2 hybrids are commonly referred to as diamond-like carbon films with high hardness, low friction coefficient, excellent wear resistance, good optical transmission and biocompatibility. It is a new functional thin film material which has attracted much attention in recent years, and B-doped diamond coating can be made into BDD electrode with high oxygen evolution potential, low background current, adsorption inertia and so on. But the diamond-like carbon film has the defects of high internal stress, poor thermal stability, large brittleness, no large area deposition, imperfect friction and wear mechanism. Scholars at home and abroad reduce the internal stress and improve the thermal stability of the films by metal and non-metal doping, multilayer structure design and so on, and achieve large area deposition by changing the preparation methods. The mechanism of friction and wear is analyzed by friction behavior under different conditions. These solutions are based on the "five" idea of composite coating technology (composite deposition technology, coating composition diversity, crystal structure nanocrystalline, etc. Composition and structure of multilayer / gradient). The strength of membrane base adhesion is the key factor to determine the coating life and the most basic factor to determine the application value of all coatings. The bonding strength of DLC coating is not high. It has been one of the difficult problems for its further application. At present, it is mainly prepared by element doping and transition layer. The study of boron doped diamond-like carbon coatings is mainly focused on the electrochemical and biocompatibility, and the most basic mechanical properties of the films are rarely studied. Therefore, the study on the properties of boron doped diamond-like carbon coatings can not only solve its most basic problems, but also broaden its application. In this paper, diamond-like carbon coatings are prepared by magnetron sputtering. Firstly, diamond-like carbon coatings were prepared on different substrates by RF magnetron sputtering, and the effect of substrate materials on the structure and adhesion of the coatings was analyzed. Secondly, the diamond-like carbon coating was prepared by using closed field unbalanced magnetic control equipment under different graphite target currents. The microstructure and microstructure of the coating were analyzed by atomic force microscope, scanning electron microscope and Raman spectrum X-ray diffraction. The properties of the coatings were characterized by scratch test, friction and wear. Finally, boron doped DLC coatings were prepared by using solid boron as sputtering target. The microstructure and properties of the coatings were analyzed by various methods. The effect of boron element on DLC coating is analyzed. The results show that the diamond-like carbon coatings prepared by RF magnetron sputtering and closed field unbalanced magnetron sputtering have higher sp2 bond content, better adhesion and lower friction coefficient. Generally below 0.10, doping boron makes the surface roughness of diamond-like carbon coating decrease the content of sp2 bond, and a small amount of boron element can increase the elastic modulus and hardness of the coating, increase the adhesion of film base in a small range, and decrease the friction coefficient. The wear rate decreased, but the elastic modulus, hardness and adhesion of the coating decreased greatly.
【學(xué)位授予單位】：上海工程技術(shù)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類號(hào)】：TQ163;TB306

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