本文關(guān)鍵詞： 金剛石薄膜 類(lèi)金剛石薄膜 摩擦學(xué)性能 特殊環(huán)境　出處：《中國(guó)地質(zhì)大學(xué)(北京)》2015年碩士論文　論文類(lèi)型：學(xué)位論文

【摘要】：碳膜因其具有高硬度、高耐磨性、低摩擦系數(shù)、高電阻率、高熱導(dǎo)率、化學(xué)惰性、抗腐蝕等優(yōu)良性能在特種環(huán)境中有著廣泛的應(yīng)用。但是碳膜的摩擦學(xué)性能受環(huán)境影響較大,特殊環(huán)境與普通工況下的摩擦學(xué)性能有很大差異,不同環(huán)境下對(duì)性能的要求也不同。本文探究了空間鉆探、地球物理勘探和噴絲頭沖孔等工況環(huán)境下碳膜的摩擦磨損性能。結(jié)果表明:(1)采用熱絲化學(xué)氣相沉積法在硬質(zhì)合金表面沉積金剛石薄膜,測(cè)定了薄膜在大氣和真空環(huán)境中4種不同溫度下的摩擦系數(shù)。發(fā)現(xiàn)在大氣環(huán)境中,金剛石薄膜的摩擦系數(shù)曲線較平穩(wěn),摩擦系數(shù)值隨溫度升高而減小,磨損主要與磨屑和氧化膜保護(hù)層有關(guān);而在真空環(huán)境中,摩擦系數(shù)曲線波動(dòng)劇烈,起初隨溫度升高而增大,650 oC時(shí)減小,磨損主要與轉(zhuǎn)變層及表面裂紋有關(guān)。真空環(huán)境中磨損比大氣環(huán)境嚴(yán)重,薄膜失效溫度更低。溫度升高到650 oC后,兩種環(huán)境中均出現(xiàn)石墨化現(xiàn)象,導(dǎo)致摩擦系數(shù)降低。(2)采用非平衡中頻雙靶磁控濺射法在Cr12Mo4V鋼表面沉積Cr/Cr Nx/CryCz/Cr-DLC多層梯度膜。通過(guò)表面形貌觀察到在偏壓-140 V時(shí),Cr-DLC薄膜表面光滑、結(jié)構(gòu)致密;并且該偏壓下薄膜的硬度較高,膜基結(jié)合力好,摩擦磨損率最低,性能最佳。大氣和海水環(huán)境中薄膜的摩擦學(xué)性能隨偏壓的變化變化趨勢(shì)相似,但大氣中薄膜的摩擦系數(shù)和磨損率均高于海水中,表明薄膜在海水中的減摩抗磨能力比大氣中強(qiáng)。(3)采用熱絲化學(xué)氣相沉積法在高速鋼沖針表面沉積金剛石薄膜。直接在高速鋼沖針上沉積的金剛石薄膜不完整,存在大量非金剛石相,表面有炭黑聚積成的顆粒。一般基體溫度下高速鋼沖針可能因?yàn)闇囟冗^(guò)高導(dǎo)致針尖熔化。通過(guò)沉積Ti N過(guò)渡層可有效消除直接鍍膜產(chǎn)生的不利影響,過(guò)渡層上沉積的金剛石薄膜均勻完整,無(wú)明顯缺陷,但金剛石薄膜表面粗糙度大,可通過(guò)增大碳源濃度、降低沉積氣壓等方法降低表面粗糙度。
[Abstract]:Carbon film is widely used in special environment because of its excellent properties such as high hardness, high wear resistance, low friction coefficient, high resistivity, high thermal conductivity, chemical inertia and corrosion resistance. The tribological performance of special environment is very different from that of normal working condition, and the requirement of performance is also different in different environment. The friction and wear properties of carbon film in geophysical exploration and spinneret punching. The results show that the diamond film is deposited on the surface of cemented carbide by hot-filament chemical vapor deposition. The friction coefficient of diamond film was measured at four different temperatures in atmosphere and vacuum environment. It was found that the friction coefficient curve of diamond film was stable and the friction coefficient decreased with the increase of temperature. Wear is mainly related to wear debris and oxide film protective layer, while in vacuum environment, the friction coefficient curve fluctuates sharply, and decreases with the increase of temperature at first, at 650oC. The wear is mainly related to the transition layer and surface cracks. The wear in vacuum environment is more serious than that in atmospheric environment, and the failure temperature of film is lower. When the temperature rises to 650 OC, graphitization occurs in both environments. Cr/Cr Nx/CryCz/Cr-DLC multilayer gradient films were deposited on the surface of Cr12Mo4V steel by unbalanced medium frequency double target magnetron sputtering method. The surface morphology of the films was observed to be smooth and compact at the bias voltage of -140V. The film has high hardness, good adhesion, the lowest friction and wear rate, and the best performance. The variation trend of the tribological properties with bias voltage is similar in atmosphere and seawater environment. However, the friction coefficient and wear rate of the films in the atmosphere are higher than those in seawater. The results show that the antifriction and antiwear ability of the thin film in seawater is stronger than that in atmosphere. The diamond film deposited on the surface of high speed steel punching needle by hot filament chemical vapor deposition method is incomplete, and the diamond film deposited directly on the high speed steel punching needle is incomplete. There are a large number of non-diamond phases on the surface, and there are particles of carbon black accumulation on the surface. In general, the high speed steel punching needle may lead to tip melting due to excessive temperature at substrate temperature. The adverse effect of direct coating can be effectively eliminated by deposition of tin transition layer. The diamond film deposited on the transition layer is uniform and complete without obvious defects, but the surface roughness of the diamond film is large, and the surface roughness can be reduced by increasing the concentration of carbon source and reducing the deposition pressure.
【學(xué)位授予單位】：中國(guó)地質(zhì)大學(xué)(北京)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：TQ127.11;TB383.2

【參考文獻(xiàn)】

相關(guān)期刊論文 前3條

1 于德洋,薛群基;空間摩擦學(xué)研究的前沿領(lǐng)域[J];摩擦學(xué)學(xué)報(bào);1997年04期

2 ■田一彥;蔣修治;;類(lèi)金剛石膜的實(shí)用化現(xiàn)狀與今后展望[J];超硬材料工程;2006年04期

3 崔雨瀟;張建國(guó);孫方宏;張志明;;硅摻雜CVD金剛石薄膜(英文)[J];Transactions of Nonferrous Metals Society of China;2013年10期

，

本文編號(hào)：1509688