本文關(guān)鍵詞： 光纖濕度傳感器 物理氣相沉積 薄膜 毛細(xì)冷凝 法布里-珀羅干涉　出處：《武漢理工大學(xué)》2015年碩士論文　論文類(lèi)型：學(xué)位論文

【摘要】：相比于傳統(tǒng)濕度傳感器,光纖濕度傳感器具有結(jié)構(gòu)緊湊、制備簡(jiǎn)單、濕敏性好、響應(yīng)速度快、重復(fù)性良好和抗電磁干擾等許多優(yōu)勢(shì)。本課題將功能薄膜材料與光纖傳感相結(jié)合,通過(guò)物理氣相沉積法將濕敏薄膜沉積在光纖平整端面上,利用介質(zhì)薄膜的干涉原理和微小孔隙的濕敏特性,制備了一種基于多孔薄膜的法布里-珀羅(Fabry-Perot)干涉型光纖相對(duì)濕度傳感器。本文的主要研究工作如下:(1)分析課題研究背景:濕度傳感研究的意義,濕度及相對(duì)濕度的定義,光纖濕度傳感器的分類(lèi),國(guó)內(nèi)外光纖濕度傳感器的研究進(jìn)展,以及本文所采用的實(shí)驗(yàn)方案。(2)干涉型光纖濕度傳感器的原理分析和數(shù)值模擬:分析濕敏薄膜的傳感機(jī)理和薄膜干涉?zhèn)鬏數(shù)幕纠碚?對(duì)F-P干涉儀進(jìn)行矩陣運(yùn)算,模擬了確定孔隙分布、孔隙率和孔徑大小的介質(zhì)薄膜在不同濕度環(huán)境下所表現(xiàn)出的干涉譜,用來(lái)估算傳感器的響應(yīng)性能,為膜系的設(shè)計(jì)和傳感器的制備工藝改進(jìn)提供理論依據(jù)。(3)多層光學(xué)薄膜的膜系設(shè)計(jì)、制備和測(cè)試:介紹濕敏薄膜的膜系設(shè)計(jì)方案,比較彼此優(yōu)劣;介紹光學(xué)薄膜常用的制備方法,本課題中使用的制備方法,設(shè)備和制備工藝,以及制備出來(lái)的濕敏薄膜的測(cè)試。(4)基于Ti O2/Si O2/Ti O2膜系的多孔薄膜F-P型光纖相對(duì)濕度傳感器實(shí)驗(yàn)研究:介紹了傳感器的制備方法和實(shí)驗(yàn)方法,實(shí)驗(yàn)研究了不同制備工藝的傳感器在不同相對(duì)濕度下的響應(yīng)特性。測(cè)試了最佳工藝下制備的傳感器的濕度響應(yīng)特性、重復(fù)性、響應(yīng)時(shí)間、溫度串?dāng)_,最后,重點(diǎn)研究了薄膜形貌、濕度敏感性和熱處理對(duì)傳感器穩(wěn)定性的影響。并分別展示了由武漢計(jì)量測(cè)試技術(shù)研究院進(jìn)行的光纖濕度傳感器校準(zhǔn)報(bào)告以及實(shí)際應(yīng)用于綿陽(yáng)中國(guó)工程物理研究院總體工程研究所的光纖濕度傳感器測(cè)量校驗(yàn)結(jié)果。本文的創(chuàng)新點(diǎn)在于利用物理氣相沉積的方法將多層干涉薄膜技術(shù)與光纖傳感技術(shù)結(jié)合,而基于該種方式得到的濕度傳感器較于其他光纖濕度傳感器有突出的傳感性能,尤其對(duì)于中低濕度的測(cè)量,具有極大的應(yīng)用前景。
[Abstract]:Compared to the traditional humidity sensor, optical fiber sensor has the advantages of compact structure, simple preparation, good moisture sensitivity, fast response speed, good repeatability and anti electromagnetic interference and many other advantages. The functional film material and optical fiber sensing combined by physical vapor deposition method of humidity sensitive thin films deposited on flat end fiber on the humidity sensitive characteristics of interference principle and the micro pores of dielectric thin films, a porous film based on Fabri Perot prepared (Fabry-Perot) interferometric fiber optic humidity sensor. The main research work is as follows: (1) the analysis of the research background, research significance of humidity sensor, relative humidity and definition humidity, classification of optical fiber humidity sensor, domestic and foreign research progress of optical fiber sensor, and the experimental program. (2) numerical analysis and principle of interferometric fiber optic humidity sensor Simulation: the basic theory of the sensing mechanism and the analysis of thin film humidity sensitive thin film interference transmission, the F-P interferometer by matrix operation simulation to determine the pore size distribution, porosity and pore size of the dielectric film shown in different humidity conditions under the interference spectrum, used to estimate the response performance of the sensor, and provide a theoretical basis for the improvement of preparation process design and sensor films. (3) film system design of the multilayer optical film, preparation and testing: the film system design of humidity sensing film, comparing the advantages and disadvantages; the optical thin film preparation, preparation method used in this research, equipment and preparation process. Humidity sensitive thin film preparation and test out. (4) Ti O2/Si O2/Ti O2 film based on porous F-P film optical fiber humidity sensor experimental research: introduced the sensor preparation method and experimental method, the effect of different The sensor response preparation at different relative humidity conditions. The optimum test prepared under sensor humidity response, repeatability, response time, temperature of crosstalk, finally, focus on the influence of film morphology, moisture sensitivity and heat treatment on the stability of the sensor. And were displayed by the Wuhan Institute of measurement and testing technology of optical fiber humidity sensor calibration report and the actual application in Mianyang Chinese Academy of Engineering Physics Institute of optical fiber sensor for measuring and checking the results. The innovation of this paper is the method by physical vapor deposition of multilayer interference film technology and optical fiber sensing technologies, and to get the way of humidity sensor the other fiber optic humidity sensor based on sensing performance is outstanding, especially for the measurement of low humidity, has great application prospect.

【學(xué)位授予單位】：武漢理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2015
【分類(lèi)號(hào)】：TB383.2;TP212

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