本文關(guān)鍵詞：PZT厚膜的電射流沉積研究　出處：《大連理工大學(xué)》2015年碩士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： PZT 厚膜 電射流沉積 拋光 柔性襯底

【摘要】：PZT厚膜具有高壓電性能和機(jī)電耦合系數(shù),在高頻超聲傳感器、微換能器、微變形鏡等高性能微器件方面具有廣闊的應(yīng)用前景。利用電射流沉積技術(shù)(Electrohydrodynamic jet deposition, EJD)制備膜時(shí),具有沉積速率高、膜結(jié)構(gòu)可控性強(qiáng)等優(yōu)點(diǎn)。本文配制了PZT懸浮液,利用電射流沉積技術(shù)制備了PZT厚膜,首先研究了電射流沉積參數(shù)、懸浮液混合條件對厚膜致密性的影響,并對PZT厚膜進(jìn)行了溶膠的滲透；然后對電射流沉積的PZT厚膜進(jìn)行了拋光處理,研究了厚膜表面粗糙度和厚度對PZT厚膜壓電性質(zhì)的影響；最后研究了柔性襯底的PZT厚膜沉積。首先,制備了PZT復(fù)合懸浮液,以硅片為襯底,電射流沉積了PZT厚膜,研究了電射流沉積高度、流量及懸浮液混合條件對厚膜致密性的影響,降低電射流沉積高度和流量有助于提高PZT厚膜致密性,利用球磨方法混合的PZT懸浮液,沉積的PZT厚膜致密性明顯提高,制備了無裂紋的PZT厚膜。為了進(jìn)一步提高厚膜的致密性,研究了PZT厚膜的溶膠滲透,溶膠滲透后的PZT厚膜致密性明顯提高。然后,研究了電射流沉積PZT厚膜的機(jī)械拋光工藝,經(jīng)過機(jī)械拋光處理,PZT厚膜的表面粗糙度Ra從422nm降低到23nnm。此外,分析了厚膜表面粗糙度和厚度對PZT厚膜壓電性質(zhì)的影響,降低表面粗糙度促進(jìn)了PZT厚膜壓電性質(zhì)的提高,當(dāng)PZT膜厚為10μm-60μm之間時(shí),PZT膜壓電性質(zhì)隨著膜厚的增加顯著增大,當(dāng)膜厚在60μm-80μm之間時(shí),厚膜壓電性質(zhì)趨于平緩,當(dāng)膜厚高于80μm時(shí),其壓電性質(zhì)明顯下降。在PZT膜厚為68μm時(shí),壓電常數(shù)d33為91pC/N。最后,在不銹鋼和鐵鎳合金柔性襯底上沉積了PZT厚膜,采用雙面均勻沉積PZT厚膜,解決了應(yīng)力不均導(dǎo)致柔性襯底彎曲問題,獲得了柔性襯底/PZT厚膜復(fù)合元件,并集成在壓電式振動(dòng)能量采集器和磁電換能式振動(dòng)能量采集器中。
[Abstract]:PZT thick film has high piezoelectric performance and electromechanical coupling coefficient in high frequency ultrasonic sensors, micro transducers. High performance microdevices such as microdeformable mirrors have broad application prospects. Electrohydrodynamic jet deposition is used in electrojet deposition. In this paper, PZT suspensions were prepared and PZT thick films were prepared by electrojet deposition. Firstly, the influence of electrojet deposition parameters and suspension mixing conditions on the densification of thick film was studied, and the sol permeation of PZT thick film was carried out. The effect of surface roughness and thickness on the piezoelectric properties of PZT thick film was studied. Finally, PZT thick film deposition on flexible substrate was studied. Firstly, PZT composite suspension was prepared. PZT thick film was deposited by electrojet on silicon substrate, and the deposition height of PZT was studied. The effect of flow rate and suspension mixing condition on the density of thick film was studied. The density of thick film of PZT was improved by reducing the deposition height and flow rate of electrojet. The PZT suspension mixed by ball milling method was used. The density of the deposited PZT thick film was improved obviously, and the crack-free PZT thick film was prepared. In order to further improve the densification of the thick film, the sol permeation of the PZT thick film was studied. The densification of PZT thick film was improved obviously after the sol permeated. Then, the mechanical polishing process of PZT thick film deposited by electrojet was studied and treated by mechanical polishing. The surface roughness Ra of PZT film is reduced from 422nm to 23nm. In addition, the effect of surface roughness and thickness on piezoelectric properties of PZT thick film is analyzed. The reduction of surface roughness promotes the improvement of piezoelectric properties of PZT thick films. When the thickness of PZT films is between 10 渭 m and 60 渭 m, the piezoelectric properties of PZT films increase significantly with the increase of film thickness. When the thickness of the film is between 60 渭 m and 80 渭 m, the piezoelectric property of the thick film tends to be smooth, and when the thickness of the film is higher than 80 渭 m, the piezoelectric property of the film decreases obviously. When the thickness of PZT film is 68 渭 m, the piezoelectric property of the film tends to be flat. The piezoelectric constant D33 is 91 PC / N. finally, PZT thick films were deposited on stainless steel and Fe-Ni alloy flexible substrates, and PZT thick films were uniformly deposited on both sides. The bending problem of flexible substrate caused by uneven stress is solved, and the flexible substrate / PZT thick film composite element is obtained and integrated into piezoelectric vibration energy collector and magnetoelectric transducer vibration energy collector.
【學(xué)位授予單位】：大連理工大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2015
【分類號】：TQ153;TB383.2

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本文編號：1410888