本文關(guān)鍵詞：表面功能性微納復(fù)合結(jié)構(gòu)的飛秒激光加工　出處：《北京理工大學(xué)》2016年碩士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 飛秒激光 光柵結(jié)構(gòu) 熱處理 金納米粒子 表面增強(qiáng)拉曼

【摘要】：自然界在億萬年進(jìn)化演變中形成了很多奇趣現(xiàn)象,壁虎能飛檐走壁、色彩斑斕的蝴蝶翅膀和荷花出淤泥而不染等現(xiàn)象引發(fā)了科研人員的深入研究。分析發(fā)現(xiàn)這些特殊現(xiàn)象與生物組織表面結(jié)構(gòu)相關(guān),由規(guī)則且有序的微納米結(jié)構(gòu)組成,正是這些微納結(jié)構(gòu)改變了材料的力學(xué)、光學(xué)和疏水性等性能。因此,尋求高效實(shí)用的微納復(fù)合型功能性表面結(jié)構(gòu)的制備技術(shù)將具有重大意義。近年來隨著超快激光技術(shù)的快速發(fā)展,飛秒激光在功能性表面微納結(jié)構(gòu)制造方向嶄露頭角。飛秒激光加工具備精度高、裂紋少、熱影響區(qū)小的特點(diǎn),使制備規(guī)則有序的微納結(jié)構(gòu)表面成為可能。因?yàn)轱w秒激光的脈寬要小于電子-晶格的弛豫時(shí)間,在先前于晶格變化時(shí)材料已完成對(duì)激光能量的吸收過程,此時(shí)電子與晶格處于非平衡態(tài),正是這種非平衡、非線性效應(yīng),為實(shí)現(xiàn)微納加工奠定基礎(chǔ)。本論文在前人飛秒激光加工理論和實(shí)驗(yàn)研究的基礎(chǔ)上,進(jìn)一步研究?jī)?yōu)化激光偏振等參數(shù)對(duì)加工形貌連續(xù)性的影響,提出氮?dú)廨o助加工改進(jìn)方法,獲得大面積規(guī)整無碎屑沉積的類光柵結(jié)構(gòu)表面,也是目前為止飛秒激光直寫技術(shù)在硅上直接獲得的最優(yōu)質(zhì)量大表面光柵結(jié)構(gòu)。并結(jié)合鍍膜和熱處理結(jié)合的創(chuàng)新方法,在其結(jié)構(gòu)上獲得沉積的金納米顆粒陣列微納復(fù)合結(jié)構(gòu),實(shí)現(xiàn)了表面增強(qiáng)拉曼(SERS)基底的制備。本論文主要的研究工作和創(chuàng)新點(diǎn)可概括如下:(1)使用飛秒脈沖激光在單晶硅材料表面制備大面積、超規(guī)整的微納級(jí)的類光柵結(jié)構(gòu)。實(shí)驗(yàn)分析發(fā)現(xiàn):燒蝕深度,連續(xù)性和形貌質(zhì)量等與激光偏振方向、脈沖總能量、掃描速度、掃描間隔及加工環(huán)境等參數(shù)息息相關(guān)。本文研究發(fā)現(xiàn),采用10×物鏡,以低速、小間隔豎掃方式使掃描方向垂直于偏振方向等系列措施,并輔助以高壓N2吹屑裝置,使光柵結(jié)構(gòu)的加工精度和連續(xù)性得到巨大提高。(2)創(chuàng)新性的采用飛秒激光加工、濺射鍍膜和熱處理的復(fù)合方法,有效地制備SERS活性基底。在上述制備的規(guī)整光柵結(jié)構(gòu)上濺射一層納米級(jí)金膜,通過熱處理在形成金納米粒子自組裝有序陣列,實(shí)現(xiàn)高效、均勻且穩(wěn)定的SERS基底制備。研究表明在膜厚為5nm時(shí),經(jīng)過馬沸爐1000℃保溫1h后,所得SERS活性基底的拉曼增強(qiáng)因子高達(dá)9.2×107,在空氣中放置一個(gè)月后衰減仍不超過6%的高穩(wěn)定性。
[Abstract]:A lot of interesting phenomena in nature formed millions of years of evolution, house lizard can butterfly wings and lotus phenomenon, colorful fly over the walls triggered deep research of scientific research personnel. It is found that these special phenomena are related to the surface structure of biological tissues, which are composed of regular and ordered micro and nano structures. These micro and nano structures change the mechanical, optical and hydrophobic properties of materials. Therefore, it is of great significance to seek the efficient and practical preparation technology of the functional surface structure of micro nano composite. In recent years, with the rapid development of ultra fast laser technology, femtosecond laser has come to the fore in the manufacturing direction of functional surface microstructures. Femtosecond laser processing has the characteristics of high precision, little crack and small heat impact zone, which makes it possible to prepare regular and ordered micro nano structure surface. Because the pulse width of femtosecond laser is smaller than the electron lattice relaxation time in the previous changes have been completed in the crystal material absorption of laser energy, the electron and lattice in non-equilibrium state, it is this nonequilibrium and nonlinear effect, lay the foundation for the realization of micro nano processing. Based on the theoretical and Experimental Research on femtosecond laser processing of predecessors, further study the influence of laser parameters on the optimal polarization processing morphology continuity, proposed nitrogen assisted machining method, surface grating structure for large area without regular clastic sediments, also is the optimal quality of large surface grating structure so far femtosecond laser direct writing the technology obtained directly on silicon. Combined with the innovative method of coating and heat treatment, the gold nanoparticle array micro nano composite structure was obtained, and the surface enhanced Raman (SERS) substrate was prepared. The main research and innovation in this paper can be summarized as follows: (1) using large femtosecond pulse laser to fabricate large area and super regular grating structure on the surface of monocrystalline silicon. Experimental analysis shows that ablation depth, continuity and morphology quality are closely related to parameters such as laser polarization direction, total pulse energy, scanning speed, scanning interval and processing environment. In this paper, a series of measures such as low speed and small interval vertical scanning are used to make the scanning direction perpendicular to the polarization direction and so on. With the aid of the high pressure N2 scraping device, the machining accuracy and continuity of the grating structure can be greatly improved by using 10 * objective lens. (2) an innovative composite method of femtosecond laser processing, sputtering coating and heat treatment is used to effectively prepare the SERS active substrate. On the above structured grating structure, we have sputtered a layer of nanometer gold film, and formed a self-assembled ordered array of gold nanoparticles by heat treatment to achieve an efficient, uniform and stable SERS substrate. Research results show that the film thickness is 5nm, after boiling 1000 DEG C for 1h, the SERS Raman active substrate enhancement factor of up to 9.2 x 107, attenuation of high stability is still less than 6% placed in air after a month.
【學(xué)位授予單位】：北京理工大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2016
【分類號(hào)】：TB306

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