發(fā)布時間：2018-12-30 21:04

【摘要】：MOEMS微鏡的驅動裝置是其核心部件,通過不同的微鏡驅動裝置可以實現(xiàn)對入射光強度和相位的調制以及光路的選通。目前主要有壓電驅動、電磁驅動、電熱驅動和靜電驅動等驅動方式。這些驅動方式均需要導線連接、電磁激勵源,容易引入電磁干擾,并且無法在獨立環(huán)境中工作,因此開展利用鑭改性鋯鈦酸鉛(PLZT)陶瓷驅動的光控微鏡及其驅動控制策略的研究具有重要的意義。與傳統(tǒng)微鏡驅動方式相比,PLZT陶瓷驅動的光控微鏡無需電磁激勵源,具有非接觸遠程光控、無線能量傳輸、無電磁干擾、驅動清潔等優(yōu)點,適于潔凈操作空間及真空等獨立工作環(huán)境下的遠程非接觸操作。本文旨在利用PLZT陶瓷的光致特性實現(xiàn)對微鏡裝置的非接觸式閉環(huán)控制,分別針對PLZT陶瓷在微鏡平移和旋轉機構中的應用設計了新型的驅動機構,并基于PLZT陶瓷的多物理場耦合模型對所提出的驅動機構的閉環(huán)伺服控制進行理論建模、仿真分析與實驗驗證,為光致伸縮智能材料在微驅動工程領域的應用提供理論依據(jù)。對PLZT陶瓷在高能紫外光照射下的反常光生伏特效應、熱釋電效應、壓電效應機理進行分析的基礎上,闡述了 PLZT陶瓷多物理場耦合關系,并建立了 PLZT陶瓷光照階段與光停階段的多物理場耦合數(shù)學模型。通過對光控微鏡各組成結構的選型進行分析與討論,確定了光控微鏡的整體設計方案。對微鏡平移機構的剛度、實際位移放大倍數(shù)、固有頻率等進行分析,基于分析結果確定了相關尺寸參數(shù),并利用有限元對微鏡平移機構進行了力學分析;推導了光電-靜電復合驅動旋轉機構的旋轉角度,并分析了旋轉角度與PLZT陶瓷光生電壓之間的關系�；赑LZT陶瓷的多物理場耦合模型,分別推導PLZT陶瓷光致微位移閉環(huán)控制、PLZT/PVDF層合懸臂梁復合驅動機構撓度閉環(huán)控制以及PLZT陶瓷光生電壓閉環(huán)控制理論模型。并利用ON-OFF控制策略,在Matlab軟件中對所提出驅動機構進行數(shù)值仿真分析。仿真結果表明,通過對PLZT陶瓷以及基于PLZT陶瓷的新型復合驅動機構實施ON-OFF控制策略,能夠實現(xiàn)對光控微鏡驅動裝置的閉環(huán)伺服控制。分別針對PLZT陶瓷的光致微位移閉環(huán)伺服控制、PLZT/PVDF層合懸臂梁復合驅動機構的撓度閉環(huán)控制以及PLZT陶瓷的光生電壓閉環(huán)控制開展了實驗研究。實驗結果表明,單片式PLZT陶瓷的光致形變和光生電壓可以通過ON-OFF控制策略實現(xiàn)較高精度的動態(tài)控制,PLZT/PVDF層合懸臂梁復合驅動機構可以獲得較大的輸出位移,從而驗證了本文所提出的控制策略的有效性,證實了新型光控復合驅動方式的可行性。
[Abstract]:The driving device of MOEMS micromirror is its core component. The intensity and phase of incident light can be modulated and the optical path can be switched by different driving devices of micromirror. At present, there are piezoelectric drive, electromagnetic drive, electrothermal drive and electrostatic drive and other driving methods. All of these drives require wire connections, electromagnetic excitation sources, easy introduction of electromagnetic interference, and inability to work in an independent environment. Therefore, it is of great significance to study the light-controlled micromirror driven by lanthanum modified lead zirconate titanate (PLZT) ceramics and its driving control strategy. Compared with the traditional driving mode of micromirror, PLZT ceramic driven light-controlled micromirror has the advantages of non-contact remote optical control, wireless energy transmission, no electromagnetic interference, clean driving and so on. Suitable for remote non-contact operation in clean operating space and vacuum. The purpose of this paper is to realize the non-contact closed-loop control of micromirror devices by using the photoinduced characteristics of PLZT ceramics. A new type of driving mechanism is designed for the applications of PLZT ceramics in the micromirror translation and rotation mechanisms, respectively. Based on the multi-physical field coupling model of PLZT ceramics, the closed-loop servo control of the driving mechanism is theoretically modeled, simulated and verified by experiments, which provides a theoretical basis for the application of photostrictive smart materials in the field of micro-drive engineering. Based on the analysis of anomalous photovolt effect, pyroelectric effect and piezoelectric effect mechanism of PLZT ceramics irradiated by high energy ultraviolet light, the coupling relationship of PLZT ceramics with multiple physical fields is described. The multi-physical field coupling mathematical model of PLZT ceramics during illumination and light stoppage is established. Based on the analysis and discussion of the structure selection of the light-controlled micromirror, the overall design scheme of the light-controlled micromirror is determined. The stiffness, the actual displacement magnification and the natural frequency of the micromirror translation mechanism are analyzed. Based on the analysis results, the relevant dimension parameters are determined, and the mechanical analysis of the micro mirror translation mechanism is carried out by using the finite element method. The rotation angle of optoelectronic electrostatic compound drive rotating mechanism is deduced, and the relationship between rotation angle and photogenerated voltage of PLZT ceramics is analyzed. Based on the multi-physical field coupling model of PLZT ceramics, the theoretical models of PLZT ceramic photoinduced micro-displacement closed-loop control, PLZT/PVDF laminated cantilever composite driving mechanism deflection closed-loop control and PLZT ceramics photogenerated voltage closed-loop control are derived respectively. Using ON-OFF control strategy, numerical simulation analysis of the proposed drive mechanism is carried out in Matlab software. The simulation results show that the closed-loop servo control of the light-controlled micromirror drive device can be realized by implementing the ON-OFF control strategy for the PLZT ceramics and the new compound drive mechanism based on PLZT ceramics. In this paper, the photoinduced micro-displacement closed-loop servo control of PLZT ceramics, the deflection closed-loop control of PLZT/PVDF laminated cantilever composite drive mechanism and the photovoltage closed-loop control of PLZT ceramics are studied. The experimental results show that the photoinduced deformation and photogenerated voltage of monolithic PLZT ceramics can be controlled dynamically by ON-OFF control strategy, and the PLZT/PVDF laminated cantilever composite drive mechanism can obtain larger output displacement. The effectiveness of the proposed control strategy is verified, and the feasibility of the new optically controlled compound drive is verified.
【學位授予單位】：南京理工大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TH-39

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本文編號：2396142