基于光聲機理的激光微驅(qū)動機構(gòu)研究
發(fā)布時間：2018-08-12 20:27
【摘要】：微光機電系統(tǒng)(Micro-Opto-Electro-Mechanical System, MOEMS)的研究是進入21世紀以來極具活力的研究熱點之一。其中,微納米量級的小型馬達或驅(qū)動機構(gòu)是引領(lǐng)未來科技微型化、智能化、人機一體化的主導(dǎo)科技。隨著激光技術(shù)的快速發(fā)展,將激光應(yīng)用到對微型馬達機構(gòu)的驅(qū)動當中,實現(xiàn)從傳統(tǒng)電磁馬達到光動力微馬達的轉(zhuǎn)變,已成為世界各國學(xué)者重點關(guān)注的新型技術(shù)突破。本課題在充分了解當前各類型微驅(qū)動機構(gòu)研究現(xiàn)狀的基礎(chǔ)上,利用現(xiàn)代激光技術(shù),將納秒級、小功率激光應(yīng)用到微米量級馬達的驅(qū)動研究當中,提出了一種通過激光誘導(dǎo)產(chǎn)生光聲振動和光聲表面波來實現(xiàn)驅(qū)動的新方法,設(shè)計研究了兩種光聲微驅(qū)動機構(gòu),即光聲諧振微驅(qū)動機構(gòu)(Photoacoustic Resonation Microactuator, PRMA)和光聲表面波微驅(qū)動機構(gòu)(Laser Surface Acoustic Wave Microactuator),具有非接觸驅(qū)動與控制,便于小型化、集成化,響應(yīng)快,輸出效率高,結(jié)構(gòu)簡單,選材廣泛等優(yōu)點,是一種具有重要科學(xué)和科研價值的新型微驅(qū)動機構(gòu)。本文首先分析了光聲相互轉(zhuǎn)化的基本原理,建立了物理和數(shù)學(xué)計算模型。針對納米級超短脈沖激光源,創(chuàng)建了基于高斯函數(shù)的熱源方程,推導(dǎo)了熱傳導(dǎo)方程和熱彈性方程。針對光聲諧振微驅(qū)動機構(gòu)的研究,理論分析了光聲諧振原理,設(shè)計了光聲諧振基本作用單元,光聲諧振臂。利用多物理場仿真分析軟件COMSOL Multiphysics求解了光聲諧振臂的共振頻譜,得出相應(yīng)的振動狀態(tài),仿真了熱源能量、溫度、形變?nèi)齻�關(guān)鍵參數(shù)的基本特性。在光聲諧振臂的研究基礎(chǔ)上,設(shè)計了帶有儲能單元的PRMA-1型、PRMA-2型諧振驅(qū)動機構(gòu),儲能單元的設(shè)計使這兩種機構(gòu)能獲得更大的振幅輸出。進一步優(yōu)化參數(shù)后,設(shè)計了PRMA-3型諧振驅(qū)動機構(gòu),實現(xiàn)了微型化、大振幅、快響應(yīng)的MOEMS設(shè)計目標�；谕捷椛銵IGA (Lithographe Galvanoformung Abformtechnik)技術(shù)和線切割技術(shù)制備了光聲諧振驅(qū)動機構(gòu),并實驗研究了其動態(tài)響應(yīng)特性和驅(qū)動特性。使用電磁超聲探測器(Electromagnetic acoustic transducer, EMAT)探測了振動曲線,對比了振幅輸出能力；選擇10μm量級的Si02微球和100μm量級的銅球作為驅(qū)動目標體,使用光學(xué)顯微辦法動態(tài)觀測了驅(qū)動效果,討論了四類諧振驅(qū)動機構(gòu)的驅(qū)動能力。PRMA-3型機構(gòu)無論是在微型化、振幅輸出、響應(yīng)速度還是驅(qū)動能力上都表現(xiàn)最優(yōu)。利用光聲效應(yīng)產(chǎn)生的表面波,研究了光聲表面波馬達。其利用激光誘導(dǎo)的表面波在馬達定子上的傳播對目標動子進行驅(qū)動,搭建了表面波傳播數(shù)學(xué)求解模型,仿真了激光誘導(dǎo)表面波的波動特性及傳播樣貌；從理論上分析了光聲表面波馬達在設(shè)計時應(yīng)注意的問題,以保證最大程度提高馬達驅(qū)動效率；設(shè)計了直線型、旋轉(zhuǎn)型光聲表面波馬達,并基于此設(shè)計思想對環(huán)形表面波馬達定子進行了理論仿真研究。使用激光可視化實驗辦法對表面波在環(huán)形馬達定子上的傳播特性進行了分析研究,得出馬達定子的凹槽設(shè)計能保證表面波實現(xiàn)完整環(huán)形驅(qū)動。通過EMAT、 PZT探測手段定點研究了表面波在環(huán)形定子上的傳播特性,從另一個角度驗證了激光誘導(dǎo)表面波的環(huán)形驅(qū)動可行性。初步嘗試了使用激光驅(qū)動微型齒輪,取得了一定成果。最后對本課題的研究成果進行了總結(jié)：提出了基于光聲原理的激光微驅(qū)動機構(gòu)的設(shè)計方案,建立了物理、數(shù)學(xué)計算模型,設(shè)計研究了光聲諧振微驅(qū)動機構(gòu),研究了光聲表面波馬達。在文末展望中,提出了本課題尚存的待改進之處,并對今后的研究工作提出了設(shè)計和規(guī)劃。
[Abstract]:Micro-Opto-Electro-Mechanical System (MOEMS) is one of the most active research hotspots since the beginning of the 21st century. Among them, micro-and nano-scale small motor or driving mechanism is the leading technology to lead the future technology of miniaturization, intellectualization and man-machine integration. It has become a new technological breakthrough that scholars all over the world pay close attention to the realization of the transformation from the traditional electromagnetic motor to the photodynamic micro-motor by using the driving of the micro-motor mechanism.On the basis of fully understanding the current research situation of various types of micro-drive mechanism,this subject uses modern laser technology to make nanosecond and low power laser response. A new method of driving a micro-motor by laser-induced photoacoustic vibration and photoacoustic surface wave is proposed. Two kinds of photoacoustic micro-actuators, photoacoustic Resonation Microactuator (PRMA) and photoacoustic surface wave micro-actuator (Las), are designed and studied. The Er Surface Acoustic Wave Microactuator is a new type of micro-actuator with the advantages of non-contact drive and control, easy miniaturization, integration, fast response, high output efficiency, simple structure and wide selection of materials. It is a new type of micro-actuator with important scientific and scientific value. The heat source equation based on Gauss function is established for nanometer ultrashort pulse laser source, and the heat conduction equation and thermoelastic equation are derived. The principle of photoacoustic resonance is theoretically analyzed for the study of photoacoustic resonant micro-drive mechanism, and the basic action unit of photoacoustic resonance, photoacoustic resonant arm, is designed. The analysis software COMSOL Multiphysics solves the resonance spectrum of the photoacoustic resonator arm and obtains the corresponding vibration state. The basic characteristics of the three key parameters of heat source energy, temperature and deformation are simulated. Based on the research of the photoacoustic resonator arm, the PRMA-1, PRMA-2 resonant driving mechanism with energy storage unit and the design of energy storage unit are designed. After further optimizing the parameters, a PRMA-3 resonant drive mechanism was designed to achieve the design goal of miniaturization, large amplitude and fast response. A photoacoustic resonant drive mechanism was fabricated based on synchrotron radiation LIGA (Lithographe Galvanoformung Abformtechnik) technology and wire cutting technology. The dynamic response and driving characteristics were studied. The vibration curves were detected by electromagnetic acoustic transducer (EMAT), and the amplitude output ability was compared. The Si02 microspheres of 10 micron magnitude and the copper microspheres of 100 micron magnitude were selected as the driving targets, and the driving effect was dynamically observed by optical microscopy. The driving ability of four types of resonant driving mechanism is discussed. The PRMA-3 mechanism is the best in miniaturization, amplitude output, response speed and driving ability. The surface wave motor is studied by using the surface wave produced by the photoacoustic effect. The target driver is driven by the laser-induced surface wave propagation on the motor stator. A mathematical model of surface wave propagation is built to simulate the wave characteristics and propagation patterns of laser-induced surface wave. The problems that should be paid attention to in the design of a photoacoustic surface wave motor are analyzed theoretically to ensure the maximum driving efficiency of the motor. The theoretical simulation of the stator of the ring surface wave motor is studied. The propagation characteristics of the surface wave on the stator of the ring motor are analyzed by means of the laser visualization experiment. It is concluded that the groove design of the motor stator can ensure the complete ring drive of the surface wave. The feasibility of laser-induced surface wave ring driving is verified by the propagation characteristics of the ring stator from another point of view. A preliminary attempt is made to use laser to drive micro-gears, and some achievements are achieved. Finally, the research results of this subject are summarized. A design scheme of laser micro-driving mechanism based on photoacoustic principle is proposed and established. Physical and mathematical calculation models are given. The photoacoustic resonant micro-drive mechanism is designed and studied. The photoacoustic surface wave motor is also studied. In the end of this paper, the problems to be improved are pointed out, and the design and planning for future research work are put forward.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2015
【分類號】：TH-39
[Abstract]:Micro-Opto-Electro-Mechanical System (MOEMS) is one of the most active research hotspots since the beginning of the 21st century. Among them, micro-and nano-scale small motor or driving mechanism is the leading technology to lead the future technology of miniaturization, intellectualization and man-machine integration. It has become a new technological breakthrough that scholars all over the world pay close attention to the realization of the transformation from the traditional electromagnetic motor to the photodynamic micro-motor by using the driving of the micro-motor mechanism.On the basis of fully understanding the current research situation of various types of micro-drive mechanism,this subject uses modern laser technology to make nanosecond and low power laser response. A new method of driving a micro-motor by laser-induced photoacoustic vibration and photoacoustic surface wave is proposed. Two kinds of photoacoustic micro-actuators, photoacoustic Resonation Microactuator (PRMA) and photoacoustic surface wave micro-actuator (Las), are designed and studied. The Er Surface Acoustic Wave Microactuator is a new type of micro-actuator with the advantages of non-contact drive and control, easy miniaturization, integration, fast response, high output efficiency, simple structure and wide selection of materials. It is a new type of micro-actuator with important scientific and scientific value. The heat source equation based on Gauss function is established for nanometer ultrashort pulse laser source, and the heat conduction equation and thermoelastic equation are derived. The principle of photoacoustic resonance is theoretically analyzed for the study of photoacoustic resonant micro-drive mechanism, and the basic action unit of photoacoustic resonance, photoacoustic resonant arm, is designed. The analysis software COMSOL Multiphysics solves the resonance spectrum of the photoacoustic resonator arm and obtains the corresponding vibration state. The basic characteristics of the three key parameters of heat source energy, temperature and deformation are simulated. Based on the research of the photoacoustic resonator arm, the PRMA-1, PRMA-2 resonant driving mechanism with energy storage unit and the design of energy storage unit are designed. After further optimizing the parameters, a PRMA-3 resonant drive mechanism was designed to achieve the design goal of miniaturization, large amplitude and fast response. A photoacoustic resonant drive mechanism was fabricated based on synchrotron radiation LIGA (Lithographe Galvanoformung Abformtechnik) technology and wire cutting technology. The dynamic response and driving characteristics were studied. The vibration curves were detected by electromagnetic acoustic transducer (EMAT), and the amplitude output ability was compared. The Si02 microspheres of 10 micron magnitude and the copper microspheres of 100 micron magnitude were selected as the driving targets, and the driving effect was dynamically observed by optical microscopy. The driving ability of four types of resonant driving mechanism is discussed. The PRMA-3 mechanism is the best in miniaturization, amplitude output, response speed and driving ability. The surface wave motor is studied by using the surface wave produced by the photoacoustic effect. The target driver is driven by the laser-induced surface wave propagation on the motor stator. A mathematical model of surface wave propagation is built to simulate the wave characteristics and propagation patterns of laser-induced surface wave. The problems that should be paid attention to in the design of a photoacoustic surface wave motor are analyzed theoretically to ensure the maximum driving efficiency of the motor. The theoretical simulation of the stator of the ring surface wave motor is studied. The propagation characteristics of the surface wave on the stator of the ring motor are analyzed by means of the laser visualization experiment. It is concluded that the groove design of the motor stator can ensure the complete ring drive of the surface wave. The feasibility of laser-induced surface wave ring driving is verified by the propagation characteristics of the ring stator from another point of view. A preliminary attempt is made to use laser to drive micro-gears, and some achievements are achieved. Finally, the research results of this subject are summarized. A design scheme of laser micro-driving mechanism based on photoacoustic principle is proposed and established. Physical and mathematical calculation models are given. The photoacoustic resonant micro-drive mechanism is designed and studied. The photoacoustic surface wave motor is also studied. In the end of this paper, the problems to be improved are pointed out, and the design and planning for future research work are put forward.
【學(xué)位授予單位】：浙江大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2015
【分類號】：TH-39
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2 章肖融;第九屆國際光聲光熱會議在南京舉行[J];應(yīng)用聲學(xué);1997年01期
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