本文選題：壓膜阻尼 + 穿孔　； 參考：《北京理工大學(xué)學(xué)報》2017年06期

【摘要】：針對微機(jī)械結(jié)構(gòu)中的穿孔平板提出了一種精簡的壓膜阻尼計算模型,計算時考慮了氣體的稀薄效應(yīng)和穿孔造成的壓力損失及其內(nèi)壁產(chǎn)生的氣流剪切力.分析時將穿孔平板分解為多個壓力分布相同的圓環(huán)板,通過修正的雷諾方程得到每個圓環(huán)板的壓力分布.考慮邊界滑移解釋了氣體的稀薄效應(yīng),根據(jù)氣體的流量守恒給出了穿孔造成的壓力損失.為了驗(yàn)證理論模型的正確性,分別與Kwok、Veijola的理論模型和Pasquale的實(shí)驗(yàn)結(jié)果進(jìn)行了對比.結(jié)果表明本文給出的阻尼計算模型相對于Kwok給出的阻尼計算模型計算起來更準(zhǔn)確,相對于Veijola給出的阻尼計算模型在精度相差不大的情況計算起來更方便.
[Abstract]:A simplified model for calculating the pressure film damping of perforated plates in micromachined structures is presented. The rarefied effect of gas and the pressure loss caused by perforation and the flow shear force caused by the inner wall are considered in the calculation. The perforated plate is decomposed into several annular plates with the same pressure distribution. The pressure distribution of each ring plate is obtained by the modified Reynolds equation. Considering the boundary slip, the rarefied effect of the gas is explained, and the pressure loss caused by the perforation is given according to the gas flow conservation. In order to verify the correctness of the theoretical model, it is compared with the theoretical model of Kwoku Veijola and the experimental results of Pasquale. The results show that the damping calculation model presented in this paper is more accurate than that given by Kwok, and is more convenient than that given by Veijola.
【作者單位】： 北京理工大學(xué)爆炸科學(xué)與技術(shù)重點(diǎn)實(shí)驗(yàn)室;
【基金】：國家“八六三”計劃項(xiàng)目(SS2013AA041104)
【分類號】：TH-39

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