發(fā)布時(shí)間：2018-06-11 13:25

  本文選題：靶球 + 粘著力��； 參考：《天津工業(yè)大學(xué)》2017年碩士論文

【摘要】：微納尺度對(duì)象是微機(jī)電系統(tǒng)中最廣泛的操作目標(biāo),其特征尺寸主要介于毫米和納米范圍內(nèi)的微小物體。隨著微操作技術(shù)的不斷拓展,使得對(duì)微操作的理論方法及技術(shù)研究提出了更高的挑戰(zhàn)。當(dāng)操作對(duì)象尺寸進(jìn)入微尺度范圍,由于存在尺度效應(yīng)和表面效應(yīng)等問題,這時(shí)微觀粘著力(包括范德華作用力、靜電力、毛細(xì)作用力等)便起到主導(dǎo)作用。為了實(shí)現(xiàn)100 μm尺度以下的微對(duì)象的操作轉(zhuǎn)移,本文提出了基于毛細(xì)作用和壓電振動(dòng)輔助的微對(duì)象操作方法。分析了基于毛細(xì)力拾取及壓電振動(dòng)摩擦釋放微對(duì)象的可行性,最后通過實(shí)驗(yàn)驗(yàn)證了該方法的可靠性。本文首先從微操作存在液體介質(zhì)時(shí)的粘著機(jī)理出發(fā),研究分析液體介質(zhì)存在下微對(duì)象和工具以及微對(duì)象之間的粘著作用并對(duì)典型的粘著接觸作用力模型進(jìn)行分析。之后對(duì)拾取粘著模型進(jìn)行數(shù)值仿真,分析相關(guān)參數(shù)對(duì)微對(duì)象拾取毛細(xì)力的影響大小,接著在微對(duì)象拾取粘著模型基礎(chǔ)上建立了微觀摩擦受力模型,并利用系統(tǒng)動(dòng)力學(xué)建立了微對(duì)象的動(dòng)態(tài)平衡方程。最后利用了 SIUMULINK工具對(duì)釋放過程中的外力和特征距離進(jìn)行仿真分析,得出合適的動(dòng)態(tài)參數(shù)。最后依據(jù)微操作系統(tǒng)結(jié)構(gòu)要求和微操作的方案策略,建立了基于毛細(xì)粘著作用以及振動(dòng)摩擦作用的微對(duì)象操作實(shí)驗(yàn)平臺(tái)。利用實(shí)驗(yàn)系統(tǒng)平臺(tái)對(duì)所提出的拾取方法及釋放方法進(jìn)行了實(shí)驗(yàn)研究。針對(duì)模型仿真分析所涉及的相關(guān)參數(shù)進(jìn)行了一系列的對(duì)比分析實(shí)驗(yàn),重點(diǎn)對(duì)微對(duì)象釋放操作過程開展了幾組對(duì)比實(shí)驗(yàn),最后確立了最優(yōu)動(dòng)態(tài)參數(shù)對(duì)微對(duì)象拾取及釋放操作的影響規(guī)律,對(duì)實(shí)驗(yàn)數(shù)據(jù)做出統(tǒng)計(jì)并分析了該操作方法對(duì)微對(duì)象的釋放成功率和精度。實(shí)驗(yàn)數(shù)據(jù)結(jié)果驗(yàn)證了所提的微對(duì)象操作轉(zhuǎn)移方法能夠順利可靠的對(duì)微小對(duì)象進(jìn)行拾取、轉(zhuǎn)移和釋放操作,具有較高的成功率和釋放位移精度。本文所提的基于微液以及壓電輔助作用的微對(duì)象操作方法研究對(duì)利用毛細(xì)粘著力和微觀摩擦力作用進(jìn)行微對(duì)象操作方面提供了一種新的思路和借鑒方法,為微操作技術(shù)的理論和實(shí)際應(yīng)用方面提供了一些參考。
[Abstract]:Nanoscale objects are the most widely used targets in MEMS, and their characteristic sizes are mainly in the range of millimeters and nanometers. With the development of micromanipulation technology, the theoretical methods and techniques of micromanipulation are facing more challenges. When the size of the operating object enters the microscale range, the micro adhesion (including van der Waals force, electrostatic force, capillary force, etc.) plays a leading role due to the problems of scale effect and surface effect. In order to realize the operation transfer of microobjects below 100 渭 m, a new method based on capillary action and piezoelectric vibration is proposed in this paper. The feasibility of the micro object based on capillary force pickup and friction release from piezoelectric vibration is analyzed. Finally, the reliability of the method is verified by experiments. Based on the adhesion mechanism of micromanipulation in liquid medium, the adhesion between microobjects, tools and microobjects in liquid media is studied and the typical adhesive contact force model is analyzed in this paper. Then numerical simulation is carried out on the pickup adhesion model, and the influence of relevant parameters on the capillary force of the micro-object is analyzed. Then, the micro-friction force model is established on the basis of the micro-object pickup adhesion model. The dynamic equilibrium equation of micro object is established by using system dynamics. Finally, using SIUMULINK tool, the external force and characteristic distance in the process of release are simulated and analyzed, and the appropriate dynamic parameters are obtained. Finally, according to the structure requirements of the micro operating system and the scheme strategy of micro operation, the experimental platform of micro object operation based on capillary adhesion and vibration friction is established. The methods of pickup and release are studied with the platform of experimental system. A series of contrastive analysis experiments are carried out on the related parameters involved in the simulation analysis of the model, and several sets of comparative experiments are carried out on the microobject release operation process. Finally, the influence of the optimal dynamic parameters on the pickup and release operations of microobjects is established, the experimental data are statistically analyzed and the success rate and accuracy of the method are analyzed. The experimental results show that the proposed method can pick up, transfer and release small objects smoothly and reliably, and has a high success rate and release displacement accuracy. The research of microobject operation method based on microliquid and piezoelectric assisted action in this paper provides a new way of thinking and reference for microobject operation using capillary adhesion and micro friction. Some references are provided for the theoretical and practical application of micromanipulation technology.
【學(xué)位授予單位】：天津工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TH-39

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本文編號(hào)：2005411