本文選題：MEMS傳感器　切入點(diǎn)：穩(wěn)健設(shè)計(jì)　出處：《北方工業(yè)大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：隨著微機(jī)械加工技術(shù)的發(fā)展,MEMS傳感器的研究受到廣泛重視。其中壓電式MEMS傳感器因可實(shí)現(xiàn)多功能化、智能化、集成化和無需輔助電源等優(yōu)勢(shì),有著極高的應(yīng)用前景。然而MEMS傳感器的特征尺寸在納、微米量級(jí),使得其力學(xué)行為和運(yùn)動(dòng)規(guī)律等與宏觀機(jī)械系統(tǒng)有很大不同。傳統(tǒng)機(jī)械設(shè)計(jì)理論不再適用于MEMS器件的設(shè)計(jì),本文在壓電式MEMS傳感器的設(shè)計(jì)中引入穩(wěn)健設(shè)計(jì)思想,對(duì)壓電式MEMS傳感器的穩(wěn)健設(shè)計(jì)方法進(jìn)行了理論研究、數(shù)值計(jì)算和仿真驗(yàn)證。本文分別研究了基于隨機(jī)模型、容差模型和模糊模型的微傳感器的穩(wěn)健設(shè)計(jì)原理和建模方法。通過對(duì)單根納米纖維壓電性能的穩(wěn)健設(shè)計(jì)研究,建立了其基于容差模型和隨機(jī)模型的穩(wěn)健設(shè)計(jì)數(shù)學(xué)模型,得到單根納米纖維結(jié)構(gòu)設(shè)計(jì)參數(shù)的優(yōu)化解,有效提高其壓電性能。對(duì)比發(fā)現(xiàn)其容差和隨機(jī)穩(wěn)健優(yōu)化結(jié)果具有較好的一致性,表明穩(wěn)健設(shè)計(jì)在MEMS傳感器敏感元件結(jié)構(gòu)優(yōu)化設(shè)計(jì)中的重要意義,為后續(xù)壓電雙晶梁MEMS傳感器的穩(wěn)健設(shè)計(jì)提供了思路和方法。為了避免壓電雙晶梁MEMS傳感器的穩(wěn)健設(shè)計(jì)過程中的盲目性,提高M(jìn)EMS傳感器的設(shè)計(jì)效率。采用ANSYS仿真分析了壓電雙晶梁結(jié)構(gòu)參數(shù)對(duì)其輸出電壓的影響,合理選取壓電雙晶梁MEMS傳感器的穩(wěn)健設(shè)計(jì)變量。通過ANSYS仿真討論壓電雙晶梁結(jié)構(gòu)參數(shù)對(duì)其最大位移的影響,將壓電雙晶梁最大位移的ANSYS仿真結(jié)果與Simts理論值對(duì)比發(fā)現(xiàn)兩者誤差率小于9%,說明ANSYS仿真結(jié)果正確可靠,為有限元仿真驗(yàn)證穩(wěn)健設(shè)計(jì)結(jié)果提供理論依據(jù)。利用本文所提到的三種穩(wěn)健設(shè)計(jì)模型研究了壓電雙晶梁MEMES傳感器的優(yōu)化設(shè)計(jì)。詳細(xì)地分析了壓電雙晶梁中的可控和不可控因素,考慮穩(wěn)健設(shè)計(jì)參數(shù)的不確定性(隨機(jī)性和模糊性)和MEMS工藝中存在的加工偏差;以保證壓電雙晶梁邊界約束、應(yīng)力約束和應(yīng)變約束的穩(wěn)健可行性為基礎(chǔ),建立了壓電雙晶梁MEMS傳感器的穩(wěn)健設(shè)計(jì)數(shù)學(xué)模型并求解。設(shè)計(jì)結(jié)果與原方案相比較,表明穩(wěn)健設(shè)計(jì)能提高M(jìn)EMS傳感器的質(zhì)量性能,控制其加工成本;當(dāng)MEMS傳感器實(shí)際加工尺寸與穩(wěn)健設(shè)計(jì)參數(shù)發(fā)生變差(在一定范圍內(nèi))時(shí)能保持性能穩(wěn)定,提升MEMS傳感器微加工的成品率,驗(yàn)證了穩(wěn)健設(shè)計(jì)方法的實(shí)用性和有效性。應(yīng)用ANSYS仿真驗(yàn)證了壓電雙晶梁MEMS傳感器的穩(wěn)健設(shè)計(jì)結(jié)果正確可靠。ANSYS仿真驗(yàn)證還表明穩(wěn)健設(shè)計(jì)在提高M(jìn)EMS傳感器質(zhì)量性能的基礎(chǔ)上,不僅壓電雙晶梁整體結(jié)構(gòu)尺寸下降,壓電雙晶梁的最大位移也減小,提高M(jìn)EMS傳感器的安全性。
[Abstract]:With the development of micromachining technology, the research of MEMS sensors has been paid more and more attention. Among them, piezoelectric MEMS sensors have the advantages of multifunction, intelligence, integration and no auxiliary power supply. However, the characteristic size of MEMS sensor is in the order of nanometers and microns, which makes its mechanical behavior and motion law very different from macroscopic mechanical system. The traditional mechanical design theory is no longer suitable for the design of MEMS devices. In this paper, the robust design idea of piezoelectric MEMS sensor is introduced, and the robust design method of piezoelectric MEMS sensor is studied theoretically, numerically and simulated. The robust design principle and modeling method of micro sensor based on tolerance model and fuzzy model are studied. The robust design mathematical model based on tolerance model and stochastic model is established by studying the robust design of piezoelectric properties of a single nanofiber. The optimal solution of the design parameters of a single nanofiber structure is obtained, and the piezoelectric properties of the nanofiber are improved effectively. It is found that the results of tolerance and stochastic robust optimization are in good agreement with each other. The results show that robust design is of great importance in the structural optimization of MEMS sensors. In order to avoid the blindness in the robust design of piezoelectric double crystal beam MEMS sensor, the method is provided for the subsequent robust design of piezoelectric double crystal beam MEMS sensor. The design efficiency of MEMS sensor is improved. The effect of the structure parameters of piezoelectric double crystal beam on the output voltage is analyzed by ANSYS simulation. The robust design variables of piezoelectric double crystal beam MEMS sensor are reasonably selected. The influence of structural parameters of piezoelectric double crystal beam on its maximum displacement is discussed by ANSYS simulation. By comparing the ANSYS simulation results of the maximum displacement of piezoelectric double crystal beams with the theoretical values of Simts, it is found that the error rate between the two is less than 9, which shows that the ANSYS simulation results are correct and reliable. This paper provides a theoretical basis for the finite element simulation to verify the robust design results. Using the three robust design models mentioned in this paper, the optimal design of piezoelectric twin beam MEMES sensor is studied. The controllable and uncontrollable factors in piezoelectric double crystal beam are analyzed in detail. Considering the uncertainty (randomness and fuzziness) of the robust design parameters and the machining deviation in MEMS process, the robust feasibility of boundary constraint, stress constraint and strain constraint of piezoelectric double crystal beam is ensured. The mathematical model of robust design of piezoelectric double crystal beam MEMS sensor is established and solved. The results show that the robust design can improve the quality performance of MEMS sensor and control its processing cost. When the actual machining size of the MEMS sensor and the robust design parameters become worse (within a certain range), the performance of the MEMS sensor can be kept stable, and the finished product rate of the MEMS sensor can be increased. The practicability and validity of the robust design method are verified. The results of robust design of piezoelectric double crystal beam MEMS sensor are verified by ANSYS simulation. The simulation results also show that the robust design is based on improving the quality of MEMS sensor. Not only the structure size of piezoelectric double crystal beam is decreased, but also the maximum displacement of piezoelectric double crystal beam is reduced, which improves the safety of MEMS sensor.
【學(xué)位授予單位】：北方工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TH-39;TP212

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