本文選題：MEMS傳感器　切入點：穩(wěn)健設計　出處：《北方工業(yè)大學》2017年碩士論文　論文類型：學位論文

【摘要】：隨著微機械加工技術的發(fā)展,MEMS傳感器的研究受到廣泛重視。其中壓電式MEMS傳感器因可實現多功能化、智能化、集成化和無需輔助電源等優(yōu)勢,有著極高的應用前景。然而MEMS傳感器的特征尺寸在納、微米量級,使得其力學行為和運動規(guī)律等與宏觀機械系統有很大不同。傳統機械設計理論不再適用于MEMS器件的設計,本文在壓電式MEMS傳感器的設計中引入穩(wěn)健設計思想,對壓電式MEMS傳感器的穩(wěn)健設計方法進行了理論研究、數值計算和仿真驗證。本文分別研究了基于隨機模型、容差模型和模糊模型的微傳感器的穩(wěn)健設計原理和建模方法。通過對單根納米纖維壓電性能的穩(wěn)健設計研究,建立了其基于容差模型和隨機模型的穩(wěn)健設計數學模型,得到單根納米纖維結構設計參數的優(yōu)化解,有效提高其壓電性能。對比發(fā)現其容差和隨機穩(wěn)健優(yōu)化結果具有較好的一致性,表明穩(wěn)健設計在MEMS傳感器敏感元件結構優(yōu)化設計中的重要意義,為后續(xù)壓電雙晶梁MEMS傳感器的穩(wěn)健設計提供了思路和方法。為了避免壓電雙晶梁MEMS傳感器的穩(wěn)健設計過程中的盲目性,提高MEMS傳感器的設計效率。采用ANSYS仿真分析了壓電雙晶梁結構參數對其輸出電壓的影響,合理選取壓電雙晶梁MEMS傳感器的穩(wěn)健設計變量。通過ANSYS仿真討論壓電雙晶梁結構參數對其最大位移的影響,將壓電雙晶梁最大位移的ANSYS仿真結果與Simts理論值對比發(fā)現兩者誤差率小于9%,說明ANSYS仿真結果正確可靠,為有限元仿真驗證穩(wěn)健設計結果提供理論依據。利用本文所提到的三種穩(wěn)健設計模型研究了壓電雙晶梁MEMES傳感器的優(yōu)化設計。詳細地分析了壓電雙晶梁中的可控和不可控因素,考慮穩(wěn)健設計參數的不確定性(隨機性和模糊性)和MEMS工藝中存在的加工偏差;以保證壓電雙晶梁邊界約束、應力約束和應變約束的穩(wěn)健可行性為基礎,建立了壓電雙晶梁MEMS傳感器的穩(wěn)健設計數學模型并求解。設計結果與原方案相比較,表明穩(wěn)健設計能提高MEMS傳感器的質量性能,控制其加工成本;當MEMS傳感器實際加工尺寸與穩(wěn)健設計參數發(fā)生變差(在一定范圍內)時能保持性能穩(wěn)定,提升MEMS傳感器微加工的成品率,驗證了穩(wěn)健設計方法的實用性和有效性。應用ANSYS仿真驗證了壓電雙晶梁MEMS傳感器的穩(wěn)健設計結果正確可靠。ANSYS仿真驗證還表明穩(wěn)健設計在提高MEMS傳感器質量性能的基礎上,不僅壓電雙晶梁整體結構尺寸下降,壓電雙晶梁的最大位移也減小,提高MEMS傳感器的安全性。
[Abstract]:With the development of micromachining technology, the research of MEMS sensors has been paid more and more attention. Among them, piezoelectric MEMS sensors have the advantages of multifunction, intelligence, integration and no auxiliary power supply. However, the characteristic size of MEMS sensor is in the order of nanometers and microns, which makes its mechanical behavior and motion law very different from macroscopic mechanical system. The traditional mechanical design theory is no longer suitable for the design of MEMS devices. In this paper, the robust design idea of piezoelectric MEMS sensor is introduced, and the robust design method of piezoelectric MEMS sensor is studied theoretically, numerically and simulated. The robust design principle and modeling method of micro sensor based on tolerance model and fuzzy model are studied. The robust design mathematical model based on tolerance model and stochastic model is established by studying the robust design of piezoelectric properties of a single nanofiber. The optimal solution of the design parameters of a single nanofiber structure is obtained, and the piezoelectric properties of the nanofiber are improved effectively. It is found that the results of tolerance and stochastic robust optimization are in good agreement with each other. The results show that robust design is of great importance in the structural optimization of MEMS sensors. In order to avoid the blindness in the robust design of piezoelectric double crystal beam MEMS sensor, the method is provided for the subsequent robust design of piezoelectric double crystal beam MEMS sensor. The design efficiency of MEMS sensor is improved. The effect of the structure parameters of piezoelectric double crystal beam on the output voltage is analyzed by ANSYS simulation. The robust design variables of piezoelectric double crystal beam MEMS sensor are reasonably selected. The influence of structural parameters of piezoelectric double crystal beam on its maximum displacement is discussed by ANSYS simulation. By comparing the ANSYS simulation results of the maximum displacement of piezoelectric double crystal beams with the theoretical values of Simts, it is found that the error rate between the two is less than 9, which shows that the ANSYS simulation results are correct and reliable. This paper provides a theoretical basis for the finite element simulation to verify the robust design results. Using the three robust design models mentioned in this paper, the optimal design of piezoelectric twin beam MEMES sensor is studied. The controllable and uncontrollable factors in piezoelectric double crystal beam are analyzed in detail. Considering the uncertainty (randomness and fuzziness) of the robust design parameters and the machining deviation in MEMS process, the robust feasibility of boundary constraint, stress constraint and strain constraint of piezoelectric double crystal beam is ensured. The mathematical model of robust design of piezoelectric double crystal beam MEMS sensor is established and solved. The results show that the robust design can improve the quality performance of MEMS sensor and control its processing cost. When the actual machining size of the MEMS sensor and the robust design parameters become worse (within a certain range), the performance of the MEMS sensor can be kept stable, and the finished product rate of the MEMS sensor can be increased. The practicability and validity of the robust design method are verified. The results of robust design of piezoelectric double crystal beam MEMS sensor are verified by ANSYS simulation. The simulation results also show that the robust design is based on improving the quality of MEMS sensor. Not only the structure size of piezoelectric double crystal beam is decreased, but also the maximum displacement of piezoelectric double crystal beam is reduced, which improves the safety of MEMS sensor.
【學位授予單位】：北方工業(yè)大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TH-39;TP212

【參考文獻】

相關期刊論文 前10條

1 林衛(wèi)國;黃偉軍;周晨;陳康;鄭相周;;基于物理規(guī)劃與容差模型的壓桿可靠性穩(wěn)健設計[J];機械設計與研究;2016年03期

2 羅林;胥玉萍;宋春華;;傳感器的最新應用與發(fā)展[J];信息通信;2016年03期

3 郝旭歡;常博;郝旭麗;;MEMS傳感器的發(fā)展現狀及應用綜述[J];無線互聯科技;2016年03期

4 陳東紅;安坤;燕樂;孔齡婕;賀婷;丑修建;;基于八懸臂梁-中心質量塊結構MEMS壓電振動能量采集器[J];傳感技術學報;2015年12期

5 楊淑;董維杰;王大志;殷小林;;全叉指電極d_(33)模式壓電懸臂梁俘能器研究[J];傳感器與微系統;2015年11期

6 龔發(fā)云;錢坤;湯亮;;基于模糊算法的少齒差齒輪多目標優(yōu)化設計[J];湖北工業(yè)大學學報;2015年04期

7 劉恩朋;楊占才;李燕杰;陶春生;;歐美傳感器發(fā)展趨勢[J];測控技術;2014年11期

8 陳新志;孫桓五;劉榮;柳寧;周欽;;基于容差模型的半掛汽車列車行駛平順性優(yōu)化[J];汽車技術;2014年04期

9 黃步光;;壓電傳感器特性探索[J];民營科技;2013年11期

10 王淑華;;MEMS傳感器現狀及應用[J];微納電子技術;2011年08期

相關博士學位論文 前3條

1 楊亮;基于仿真的制冷系統穩(wěn)健設計方法研究[D];上海交通大學;2012年

2 許煥衛(wèi);穩(wěn)健設計建模及優(yōu)化方法研究[D];大連理工大學;2009年

3 劉夢偉;基于雙壓電PZT薄膜單元的懸臂梁式微力傳感器研究[D];大連理工大學;2006年

相關碩士學位論文 前6條

1 康杰;微傳感器的穩(wěn)健設計原理與方法研究[D];北方工業(yè)大學;2015年

2 魏艷波;基于一次逆、二次正壓電效應自感知執(zhí)行器的研究[D];黑龍江大學;2014年

3 趙曉康;壓電發(fā)電技術在道路應用中的可行性研究[D];長安大學;2013年

4 李樹平;機械零部件的模糊可靠性優(yōu)化設計[D];西安理工大學;2008年

5 游斌弟;復雜機械結構模糊優(yōu)化方法及工程應用[D];哈爾濱理工大學;2007年

6 湯保新;基于隨機優(yōu)化模型的工程結構穩(wěn)健設計方法研究[D];河海大學;2006年

，

本文編號：1615195