【摘要】：在真空環(huán)境獲得試驗中,多數(shù)研究的都是高抽速低泄漏量的情況,很少有對高泄漏率進行分析研究的,但大泄漏量在工程應(yīng)用中卻是非常重要的部分。本文針對高抽速大泄漏量的問題進行研究,采用靜態(tài)升壓法來解決工程實踐中經(jīng)常存在的泄漏點分散和漏孔形狀不規(guī)則的問題;考慮到泵組泄漏、氣體成分和管道流導(dǎo)等因素對系統(tǒng)有效抽速的影響,對泵組的抽速計算進行了參數(shù)修正;通過將大泄漏量帶入抽速曲線進行對比計算,得出大泄漏量對于抽氣時間的影響;通過具體試驗,將試驗結(jié)果與理論計算結(jié)果進行對比分析,驗證了模型的正確性和準確性。該理論計算方法為工程實際中存在的大泄漏問題提供了理論支持,為之后的氣壓控制提供了定量計算依據(jù)。
[Abstract]:In the experiment of obtaining vacuum environment, most of the researches are on the case of high pumping speed and low leakage rate, but the large leakage rate is a very important part in engineering application. In this paper, the problem of high pumping speed and large leakage rate is studied, and the static boost method is adopted to solve the problems of dispersion of leakage points and irregular shape of holes in engineering practice. Considering the effects of pump group leakage, gas composition and pipeline flow conductance on the effective pumping speed of the system, the parameters of pump group speed calculation are revised. By comparing and calculating the large leakage volume into the pumping speed curve, the influence of the large leakage rate on the pumping time is obtained, and the correctness and accuracy of the model are verified by comparing the experimental results with the theoretical calculation results. The theoretical calculation method provides a theoretical support for the problem of large leakage in engineering practice and a quantitative calculation basis for the subsequent air pressure control.
【作者單位】： 中北大學機械工程學院;
【分類號】：TB75
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本文編號：2308270