【摘要】：上海光源軟X射線自由電子激光器光束線主要用于X射線的傳輸與診斷,為了減少光子吸收,其傳輸環(huán)境須為無窗潔凈的超高真空系統(tǒng)。氣體通量衰減器和氣體探測器是光束線診斷區(qū)域的關(guān)鍵設(shè)備,二者均需要充入一定量的氣體,且工作精度依賴于氣體壓強的穩(wěn)定度。文中介紹了一種具有壓強反饋調(diào)節(jié)功能的多級真空差分系統(tǒng)直接過渡至其他超高真空設(shè)備,可在2.5 m內(nèi)實現(xiàn)7個量級以上的差分比。
[Abstract]:The beam line of Shanghai soft X-ray free electron laser is mainly used for X-ray transmission and diagnosis. In order to reduce photon absorption, the transmission environment of Shanghai soft X-ray free electron laser must be a windowless and clean ultra-high vacuum system. The gas flux attenuator and the gas detector are the key equipment in the beam line diagnosis area. Both of them need to be filled with a certain amount of gas, and the working accuracy depends on the stability of the gas pressure. In this paper, a multistage vacuum differential system with pressure feedback regulation function is introduced, which can directly transfer to other ultra-high vacuum equipment. It can achieve more than 7 orders of magnitude difference ratio in 2.5 m.
【作者單位】： 同濟大學(xué);中國科學(xué)院上海應(yīng)用物理研究所;
【分類號】：TB75

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