【摘要】：高真空直排大氣干泵結(jié)構(gòu)緊湊、干凈無(wú)油、極限真空度高，是真空獲得領(lǐng)域的研究熱點(diǎn)。其中旋渦結(jié)構(gòu)由于體積小、結(jié)構(gòu)簡(jiǎn)單且可進(jìn)行多級(jí)設(shè)計(jì)，常用于其低真空側(cè)的排氣。 旋渦結(jié)構(gòu)抽氣特性的優(yōu)劣直接決定了高真空直排大氣干泵的性能，是干泵設(shè)計(jì)的關(guān)鍵技術(shù)之一。為了深入研究結(jié)構(gòu)參數(shù)、結(jié)構(gòu)形式以及各種工況條件（包括轉(zhuǎn)速、溫度、入口流量、出口壓強(qiáng)）等對(duì)旋渦結(jié)構(gòu)抽氣特性的影響，本文采用計(jì)算流體力學(xué)方法對(duì)連續(xù)流態(tài)下旋渦結(jié)構(gòu)的抽氣特性進(jìn)行數(shù)值模擬，取得了以下研究成果： 1）用CFX軟件滑移網(wǎng)格方法的模擬結(jié)果表明，氣體在環(huán)形通道內(nèi)沿螺旋線爬行，產(chǎn)生了明顯的縱向旋渦，且監(jiān)測(cè)點(diǎn)壓強(qiáng)變化曲線與理論的變化曲線相吻合，說(shuō)明該方法可以有效模擬連續(xù)流態(tài)下旋渦結(jié)構(gòu)的內(nèi)部流動(dòng)；而采用CFX軟件浸入實(shí)體方法的模擬發(fā)現(xiàn)氣體在通道內(nèi)沒(méi)有產(chǎn)生旋渦，與實(shí)測(cè)結(jié)果不符，說(shuō)明該方法結(jié)果不準(zhǔn)確； 2）壓縮比隨轉(zhuǎn)速的增大而增大；隨溫度、入口流量、出口壓強(qiáng)的增大而減小。通過(guò)增大轉(zhuǎn)速，設(shè)計(jì)冷卻降低氣體溫度，可獲得更好的抽氣性能。旋渦結(jié)構(gòu)多級(jí)串聯(lián)，可以獲得較高的極限真空，，將氣體抽到過(guò)渡流狀態(tài)； 3）壓縮比隨間隙的減小而增大。在不同轉(zhuǎn)速和不同壓強(qiáng)時(shí)，本文旋渦結(jié)構(gòu)在48-72個(gè)葉片范圍內(nèi)都有較好的抽氣性能，最佳葉片數(shù)目都在60附近。圓形流道比矩形流道抽氣性能更好； 4）比較了幾種單級(jí)旋渦結(jié)構(gòu)的抽氣性能，發(fā)現(xiàn)EPX泵旋渦結(jié)構(gòu)的抽氣性能要優(yōu)于Ontool泵旋渦結(jié)構(gòu)。多級(jí)串聯(lián)旋渦結(jié)構(gòu)的壓縮比不僅取決于每一級(jí)的壓縮比，還取決于級(jí)間的間隙返流情況。在設(shè)計(jì)中對(duì)間隙進(jìn)行合理預(yù)估，減小間隙的返流，可以提高多級(jí)旋渦結(jié)構(gòu)的抽氣性能。
[Abstract]:High vacuum air dry pump with compact structure, clean and oil free, high limit vacuum, is the research hotspot in vacuum acquisition field. Because of its small volume, simple structure and multistage design, vortex structure is often used to exhaust the low vacuum side of vortex structure. The exhaust characteristics of vortex structure directly determine the performance of high vacuum air dry pump, which is one of the key technologies of dry pump design. In order to study the influence of structure parameters, structure form and various operating conditions (including speed, temperature, inlet flow rate, outlet pressure) on the exhaust characteristics of vortex structure, In this paper, the extraction characteristics of vortex structures under continuous flow are numerically simulated by using computational fluid dynamics method. The following results are obtained: 1) the simulation results of the sliding mesh method with CFX software show that, The gas crawls along the helical line in the annular channel, resulting in obvious longitudinal vortex, and the pressure variation curve of the monitoring point coincides with the theoretical variation curve, which shows that this method can effectively simulate the internal flow of the vortex structure in the continuous flow state. However, the simulation using the CFX software immersion entity method found that the gas did not produce vortex in the channel, which was not consistent with the measured results, which indicated that the results of the method were not accurate; 2) the compression ratio increased with the increase of rotational speed, and the flow rate increased with the increase of temperature and inlet flow. The outlet pressure increases and decreases. By increasing the rotational speed and cooling down the gas temperature, a better exhaust performance can be obtained. A high limit vacuum can be obtained by multi-stage series vortex structure, and the gas will be pumped into the transition flow state. 3) the compression ratio increases with the decrease of the gap. At different speeds and pressures, the vortex structure in this paper has better exhaust performance in the range of 48-72 blades, and the optimum number of blades is about 60. The pumping performance of the circular channel is better than that of the rectangular channel. 4) the pumping performance of several single-stage vortex structures is compared and it is found that the pumping performance of the vortex structure of the EPX pump is better than that of the vortex structure of the Ontool pump. The compression ratio of multi-stage series vortex structure depends not only on the compression ratio of each stage, but also on the gap reflux between stages. In the design, the clearance is estimated reasonably and the backflow of the clearance is reduced, which can improve the pumping performance of the multi-stage vortex structure.
【學(xué)位授予單位】：合肥工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2014
【分類(lèi)號(hào)】：TB752

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