基于半導(dǎo)體工藝微熱再生干燥系統(tǒng)的研究
發(fā)布時(shí)間：2018-07-25 09:19
【摘要】：壓縮氣體是僅次于電力的第二大動(dòng)力能源,又是具有多種用途的工業(yè)氣源。在工業(yè)中有三種方法來處理壓縮氣體的干燥問題:1、利用壓縮氣體中水蒸氣分壓由壓縮氣體溫度的高低決定的特性進(jìn)行降溫脫水干燥;2、采用某些化學(xué)物質(zhì)的潮解特性進(jìn)行脫水干燥;3、采用吸附劑對(duì)壓縮氣體中的水蒸氣具有選擇性吸附的特性進(jìn)行脫水干燥。目前一般使用第三種方法處理壓縮氣體,但是吸附式干燥器大多采用雙塔式結(jié)構(gòu)和定時(shí)周期控制法,每塔循環(huán)經(jīng)歷吸附-再生的工藝流程,為用戶連續(xù)提供干燥氣體[1],這種傳統(tǒng)的生產(chǎn)和控制方法,由于缺乏對(duì)生產(chǎn)過程實(shí)時(shí)有效的監(jiān)控,無法使吸干機(jī)運(yùn)行在最佳工作狀態(tài),同時(shí)也不能保證成品氣質(zhì)量穩(wěn)定,而且還會(huì)造成能源的浪費(fèi)。針對(duì)現(xiàn)狀分析,本論文研制了一款新型式的微熱再生干燥系統(tǒng)控制器,主要解決以下問題:1、微熱式再生氣體干燥系統(tǒng)如何能確保提供質(zhì)量穩(wěn)定氣源連續(xù)的成品氣體給用戶的同時(shí),能源還可以得到合理有效利用。2、微熱式再生氣體干燥系統(tǒng)如何保證在加熱再生氣體時(shí)不會(huì)因過熱而導(dǎo)致系統(tǒng)在安全方面出現(xiàn)問題。為了解決上述的兩問題,在本論文中主要采用了過程自適應(yīng)優(yōu)選法來保證成品氣的質(zhì)量和流量,同時(shí)減少再生氣用量,最大限度節(jié)能降耗;采取了加熱超溫報(bào)警和加熱氣電源自動(dòng)脫扣保護(hù)措施來解決因過熱引起的安全問題。該新型專用控制器已經(jīng)解決了預(yù)期要解決的兩大技術(shù)難點(diǎn):在線露點(diǎn)測(cè)量儀器為自適應(yīng)優(yōu)選法提供算法中所需參數(shù),實(shí)現(xiàn)了對(duì)再生氣體生產(chǎn)工藝時(shí)間參數(shù)的實(shí)時(shí)調(diào)整,達(dá)到在保證成品氣質(zhì)量的基礎(chǔ)上,減少再生氣用量和縮短了再生氣的加熱時(shí)間,最大限度節(jié)能降耗;測(cè)溫傳感器或加熱執(zhí)行部件出現(xiàn)故障時(shí),加熱器電源空開都會(huì)自動(dòng)脫扣,切斷加熱器的電源,由微熱運(yùn)行轉(zhuǎn)變?yōu)闊o熱運(yùn)行保證了系統(tǒng)的安全性。微熱再生干燥系統(tǒng)專用控制器已經(jīng)批量應(yīng)用。
[Abstract]:Compressed gas is the second largest power source after electric power, and it is also a multi-purpose industrial gas source. In industry, there are three ways to deal with the drying problem of compressed gas: 1. Using the characteristic of partial pressure of water vapor in compressed gas, which is determined by the temperature of compressed gas, to carry out cooling, dehydration and drying. The water vapor in compressed gas was desorbed selectively by adsorbent. At present, the third method is generally used to deal with compressed gas, but most of the adsorptive desiccators adopt the two-tower structure and timing cycle control method. Each tower cycle goes through the process of adsorption-regeneration. This traditional production and control method can not make the suction machine run in the best working condition because of the lack of real-time and effective monitoring of the production process, and also can not guarantee the quality of the finished gas. But also will cause the waste of energy. According to the analysis of the present situation, a new type of controller of micro-heat regenerative drying system is developed in this paper. The following problems are mainly solved: 1. How can the micro-heat regenerative gas drying system ensure the supply of continuous finished gas with stable quality gas sources to customers at the same time? Energy can also be used reasonably and efficiently. How to ensure that the heating regenerative gas drying system will not cause safety problems due to overheating of regenerated gas. In order to solve the above two problems, this paper mainly adopts the process adaptive optimization method to ensure the quality and flow rate of the finished gas, at the same time, reduce the amount of re-gas, maximize energy saving and consumption reduction; The overheating alarm and automatic tripping protection measures are adopted to solve the safety problems caused by overheating. The new special controller has solved two technical difficulties which are expected to be solved: On-line Dew Point measuring instrument provides the parameters needed in the adaptive optimization algorithm and realizes the real-time adjustment of the process parameters of regenerated gas production. On the basis of ensuring the quality of finished gas, reducing the amount of regenerated gas and shortening the heating time of regenerated gas, the maximum energy saving and consumption reduction can be achieved. When the temperature sensor or heating executive parts fail, the heater power supply will automatically release. The power supply of the heater is cut off and the safety of the system is ensured. The special controller of micro-heat regenerative drying system has been applied in batch.
【學(xué)位授予單位】：北京工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2014
【分類號(hào)】：TB4
本文編號(hào)：2143357
[Abstract]:Compressed gas is the second largest power source after electric power, and it is also a multi-purpose industrial gas source. In industry, there are three ways to deal with the drying problem of compressed gas: 1. Using the characteristic of partial pressure of water vapor in compressed gas, which is determined by the temperature of compressed gas, to carry out cooling, dehydration and drying. The water vapor in compressed gas was desorbed selectively by adsorbent. At present, the third method is generally used to deal with compressed gas, but most of the adsorptive desiccators adopt the two-tower structure and timing cycle control method. Each tower cycle goes through the process of adsorption-regeneration. This traditional production and control method can not make the suction machine run in the best working condition because of the lack of real-time and effective monitoring of the production process, and also can not guarantee the quality of the finished gas. But also will cause the waste of energy. According to the analysis of the present situation, a new type of controller of micro-heat regenerative drying system is developed in this paper. The following problems are mainly solved: 1. How can the micro-heat regenerative gas drying system ensure the supply of continuous finished gas with stable quality gas sources to customers at the same time? Energy can also be used reasonably and efficiently. How to ensure that the heating regenerative gas drying system will not cause safety problems due to overheating of regenerated gas. In order to solve the above two problems, this paper mainly adopts the process adaptive optimization method to ensure the quality and flow rate of the finished gas, at the same time, reduce the amount of re-gas, maximize energy saving and consumption reduction; The overheating alarm and automatic tripping protection measures are adopted to solve the safety problems caused by overheating. The new special controller has solved two technical difficulties which are expected to be solved: On-line Dew Point measuring instrument provides the parameters needed in the adaptive optimization algorithm and realizes the real-time adjustment of the process parameters of regenerated gas production. On the basis of ensuring the quality of finished gas, reducing the amount of regenerated gas and shortening the heating time of regenerated gas, the maximum energy saving and consumption reduction can be achieved. When the temperature sensor or heating executive parts fail, the heater power supply will automatically release. The power supply of the heater is cut off and the safety of the system is ensured. The special controller of micro-heat regenerative drying system has been applied in batch.
【學(xué)位授予單位】：北京工業(yè)大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2014
【分類號(hào)】：TB4
【參考文獻(xiàn)】
相關(guān)碩士學(xué)位論文 前1條
1 鐘愛民;質(zhì)量流量計(jì)自動(dòng)校驗(yàn)控制系統(tǒng)的設(shè)計(jì)研究[D];上海交通大學(xué);2007年
，本文編號(hào)：2143357
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