本文選題：MEMS + 壓電��； 參考：《南京航空航天大學(xué)》2017年碩士論文

【摘要】：基于微機(jī)電(MEMS)和逆壓電效應(yīng)高頻驅(qū)動(dòng)技術(shù)發(fā)展而來(lái)的壓電驅(qū)動(dòng)型超聲波霧化器是一種高性能超聲波霧化裝置。目前,超聲霧化技術(shù)在3D打印、噴墨打印機(jī)、醫(yī)用藥劑霧化等方面得到應(yīng)用,尤其是3D打印技術(shù)在航空航天制造領(lǐng)域具有重要應(yīng)用價(jià)值。本文立足于壓電驅(qū)動(dòng)的網(wǎng)孔型超聲霧化器,結(jié)合理論與實(shí)驗(yàn)研究,力求完善霧化理論和優(yōu)化霧化性能,旨在為以后的超聲霧化器研究工作提供理論和實(shí)踐基礎(chǔ)。本文主要研究?jī)?nèi)容概括如下:首先,概述了超聲霧化器的分類及國(guó)內(nèi)外研究現(xiàn)狀,簡(jiǎn)單介紹了各種超聲霧化器的優(yōu)缺點(diǎn)及應(yīng)用前景,說(shuō)明本文課題研究的目的和意義。其次,分析了霧化理論及原理。根據(jù)力學(xué)知識(shí)和本文所采用霧化器結(jié)構(gòu)的基礎(chǔ)上,進(jìn)行了霧化片金屬基板的薄板變形分析、錐孔流阻問(wèn)題探究、霧化片錐孔變形過(guò)程分析;并利用力學(xué)知識(shí)對(duì)錐孔流阻進(jìn)行了理論推導(dǎo),證明了錐孔的變形能使液體產(chǎn)生流動(dòng),說(shuō)明利用壓電泵原理的可行性;并將一個(gè)周期內(nèi)霧化量來(lái)源分為兩部分,一部分是金屬基板產(chǎn)生的壓力霧化,另一部分是錐孔變形產(chǎn)生的噴嘴霧化。再次,進(jìn)行網(wǎng)孔型超聲霧化片振子振動(dòng)仿真分析。利用有限元軟件,進(jìn)行相關(guān)的建模與仿真分析,根據(jù)仿真結(jié)果,選擇霧化器的合理振型與諧振頻率。最后,進(jìn)行相關(guān)的實(shí)驗(yàn)研究。運(yùn)用多普勒激光測(cè)振系統(tǒng)對(duì)霧化器進(jìn)行掃頻、定頻實(shí)驗(yàn);進(jìn)行霧化效果實(shí)驗(yàn),解釋說(shuō)明有限元分析和多普勒掃頻、定頻實(shí)驗(yàn)結(jié)果,根據(jù)實(shí)驗(yàn)的定性分析,確定霧化器參數(shù)與輸入條件(電壓、驅(qū)動(dòng)頻率)的關(guān)系,提供霧化器工作頻率與電壓的參考數(shù)據(jù);在理論分析與實(shí)驗(yàn)結(jié)果相結(jié)合下,解釋說(shuō)明了霧化片金屬基板和錐孔變形對(duì)霧化器霧化效果的影響。
[Abstract]:Piezoelectric ultrasonic atomizer based on MEMS and high frequency driving technology of inverse piezoelectric effect is a high performance ultrasonic atomizer. At present, ultrasonic atomization technology has been applied in 3D printing, ink jet printer, medical agent atomization, etc. Especially, 3D printing technology has important application value in aerospace manufacturing field. Based on the piezoelectric actuated meshed ultrasonic atomizer and combining the theoretical and experimental studies, this paper tries to perfect the atomization theory and optimize the atomization performance, in order to provide the theoretical and practical basis for the future research of the ultrasonic atomizer. The main research contents of this paper are summarized as follows: firstly, the classification of ultrasonic nebulizer and the research status at home and abroad are summarized. The advantages, disadvantages and application prospects of various ultrasonic nebulizers are briefly introduced, and the purpose and significance of the research in this paper are explained. Secondly, the theory and principle of atomization are analyzed. Based on the knowledge of mechanics and the structure of atomizer used in this paper, the thin plate deformation analysis of atomized sheet metal substrate, the flow resistance of cone hole and the analysis of deformation process of atomized sheet cone hole are carried out. The flow resistance of conical hole is deduced by using mechanical knowledge, it is proved that the deformation of conical hole can make liquid flow, the feasibility of using the principle of piezoelectric pump is explained, and the source of atomization quantity in a period is divided into two parts. One part is pressure atomization produced by metal substrate, the other part is nozzle atomization caused by conical hole deformation. Thirdly, the vibration simulation analysis of the ultrasonic atomizer is carried out. The finite element software is used for modeling and simulation analysis. According to the simulation results, the reasonable mode and resonant frequency of the atomizer are selected. Finally, the related experimental research is carried out. Doppler laser vibration measurement system is used to sweep and fix frequency of atomizer, and atomization effect experiment is carried out to explain the finite element analysis and Doppler frequency sweep, the results of fixed frequency experiment, according to the qualitative analysis of the experiment, The relationship between the atomizer parameters and the input conditions (voltage, driving frequency) is determined, and the reference data of the atomizer working frequency and voltage are provided. The effect of metal substrate and conical hole deformation on atomizing effect of atomizer is explained.
【學(xué)位授予單位】：南京航空航天大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TH137;V260.6

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本文編號(hào)：2109410