本文選題：鉭酸鋰 + 磁控濺射�。� 參考：《電子科技大學》2017年碩士論文

【摘要】：鉭酸鋰(LiTaO_3)具有非線性光學,熱釋電效應等具有研發(fā)價值的性能。其作為光學器件、探測器件等器件的重要材料是當前研究的重點。課題中對磁控濺射制備鉭酸鋰薄膜的工藝及薄膜的光學、電學性能進行了重點研究,使用磁控濺射工藝制備了具有良好光學及電學性能的鉭酸鋰薄膜。研究了不同磁控濺射工藝對鉭酸鋰薄膜性能的影響。重點研究了不同射頻磁控濺射功率、襯底、退火溫度和退火氣氛對鉭酸鋰薄膜性能的影響。通過橢偏儀測試了鉭酸鋰薄膜的各項光學參數(shù),計算出了薄膜的光學禁帶寬度。研究了鉭酸鋰薄膜的極化工藝,并對極化后的薄膜的介電性能,鐵電性能以及熱釋電性能進行了表征。最終,搭建熱釋電探測平臺,測試了鉭酸鋰薄膜作為敏感元的探測器的熱釋電響應電流。通過對鉭酸鋰薄膜的詳細表征,確定了能夠制備良好性能薄膜的濺射工藝。600oC時退火薄膜的Li含量高,但是結(jié)晶性能沒有650oC好,選擇600oC及650oC度退火,薄膜各有優(yōu)劣。200 W時濺射的薄膜的晶體性能較好,但是濺射速率沒有250W時快,250 W功率下濺射的鉭酸鋰薄膜更接近(012)擇優(yōu)取向的單晶薄膜。這兩種功率下濺射的薄膜都具有一定的研究價值。使用橢偏儀測試了薄膜的光學參數(shù)。測試了具有最好的晶體性能的鉭酸鋰薄膜的光學參數(shù):折射率為2.33、消光系數(shù)為0.00234、光學禁帶寬度為3.66 eV。研究了鉭酸鋰薄膜的電學性能,使用熱極化法對鉭酸鋰薄膜進行了極化實驗,通過多次實驗得到了較好的極化工藝。并對極化前及極化后的薄膜的漏電流,鐵電性能進行了比較。發(fā)現(xiàn)極化過后,薄膜的鐵電性能進一步加強,剩余極化比自發(fā)極化提高了5倍,達到0.684μC/cm~2。測試了取得良好極化后薄膜的電學參數(shù)。薄膜漏電流為1.2×10~(-7) A,相對介電常數(shù)為14.08,介電損耗為0.139。搭建平臺對薄膜的熱釋電電流進行了測量。薄膜在40oC時熱釋電系數(shù)為5.4 nC.cm~(-2).K~(-1),最終使用上面的電學參數(shù)對探測優(yōu)值及探測電壓響應值進行了計算,dF為6.705nC.cm.J~(-1),其vF為93.87 nC.cm.J~(-1)。搭建測試平臺對鉭酸鋰薄膜作為熱釋電探測單元的性能進行了測試,在黑體輻射下的功率為6.9 mW時,經(jīng)過斬波,頻率為1.6 Hz,放大倍數(shù)為20 pA/V時,示波器顯示器件最大電壓差為0.173 V,得到薄膜產(chǎn)生的熱釋電電流為3.46×10~(-12) A。
[Abstract]:Lithium tantalate (LiTaO _ 3) has many properties, such as nonlinear optics, pyroelectric effect and so on. As an important material of optical devices, detectors and other devices, it is the focus of current research. The optical and electrical properties of lithium tantalate thin films prepared by magnetron sputtering were studied. The lithium tantalate thin films with good optical and electrical properties were prepared by magnetron sputtering. The effects of different magnetron sputtering processes on the properties of lithium tantalate thin films were investigated. The effects of RF magnetron sputtering power, substrate, annealing temperature and annealing atmosphere on the properties of lithium tantalate thin films were investigated. The optical parameters of lithium tantalate film were measured by ellipsometry, and the optical band gap was calculated. The polarization process of lithium tantalate thin films was studied. The dielectric properties, ferroelectric properties and pyroelectric properties of the films were characterized. Finally, the pyroelectric response current of the detector using lithium tantalate thin film as the sensor was measured. Through the detailed characterization of lithium tantalate thin films, it was determined that the Li content of the annealed films was high when the sputtering technology was. 600oC, but the crystallinity was not as good as 650oC, and 600 OC and 650 OC degree annealing was chosen. The crystal properties of the thin films deposited at 200 W are better, but the lithium tantalate films sputtering at 250 W power at a sputtering rate of less than 250 W are closer to the (012) preferred orientation single crystal thin films. The thin films deposited under these two kinds of power have some research value. The optical parameters of the films were measured by ellipsometry. The optical parameters of the lithium tantalate thin film with the best crystal properties are as follows: refractive index is 2.33, extinction coefficient is 0.00234, and optical band gap is 3.66 EV. The electrical properties of lithium tantalate thin films were studied. The polarization experiments of lithium tantalate thin films were carried out by means of thermal polarization, and a better polarization process was obtained through many experiments. The leakage current and ferroelectric properties of the films before and after polarization were compared. It is found that after polarization, the ferroelectric properties of the films are further enhanced, and the residual polarization is 5 times higher than that of spontaneous polarization, reaching 0.684 渭 C / cm ~ (2). The electrical parameters of well polarized films were measured. The leakage current is 1.2 脳 10 ~ (-7) A, the relative dielectric constant is 14.08, and the dielectric loss is 0.139. A platform was built to measure the pyroelectric current of the film. The pyroelectric coefficient of the film is 5.4 nC.cm-2. K-1 at 40oC. Finally, using the above electrical parameters, the detection excellent value and the detection voltage response value are calculated, and the VF is 93.87 nC.cm.J-1, and the detection voltage response value is 6.705nC.cm.J-1. The performance of lithium tantalate thin film as pyroelectric detection unit was tested by using a test platform. When the power of the film was 6.9 MW under blackbody radiation, the frequency was 1.6 Hz and the amplification was 20 Pa / V after chopping. The maximum voltage difference of the oscilloscope display device is 0.173 V, and the pyroelectric current generated by the film is 3.46 脳 10 ~ (-12) A.
【學位授予單位】：電子科技大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：O484

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