本文選題：標(biāo)準(zhǔn)漏孔 + 陽極多孔氧化鋁�。� 參考：《合肥工業(yè)大學(xué)》2017年碩士論文

【摘要】：標(biāo)準(zhǔn)漏孔是真空計(jì)量技術(shù)的標(biāo)尺,它的性能直接影響著真空測量和真空檢漏結(jié)果的準(zhǔn)確性。目前,常用的通道型標(biāo)準(zhǔn)漏孔存在著形狀尺寸不可控、漏率不確定、漏孔中氣體多處于復(fù)雜過渡流等問題,這些問題的存在導(dǎo)致無法對檢漏儀和真空計(jì)進(jìn)行準(zhǔn)確的標(biāo)定和校準(zhǔn)。針對傳統(tǒng)標(biāo)準(zhǔn)漏孔存在的問題,本文提出了利用陽極多孔氧化鋁模板(anodic aluminum oxide,AAO)結(jié)合掩模輔助鍍膜方法制備新型分子流標(biāo)準(zhǔn)漏孔的方案。AAO是微納加工中常用的一種納米級多孔材料,其中單個(gè)孔的直徑在100nm以下,本文通過掩模輔助鍍膜方法對AAO進(jìn)行了二次鍍膜處理,并利用光學(xué)顯微鏡對鍍膜結(jié)果進(jìn)行了觀察,實(shí)驗(yàn)結(jié)果表明通過采用不同尺寸的掩模板可以制備出具有不同有效面積即不同通道數(shù)目的AAO。然后,我們利用自行設(shè)計(jì)搭建的差壓法漏孔校準(zhǔn)裝置,以氦氣(He)、氮?dú)?N2)、氬氣(Ar)為實(shí)驗(yàn)氣體對鍍膜后的AAO封裝形成的標(biāo)準(zhǔn)漏孔的漏率和流導(dǎo)進(jìn)行了測量。實(shí)驗(yàn)結(jié)果表明:(1)對于不同有效面積封裝形成的漏孔,漏孔流導(dǎo)與AAO的有效面積成正比;(2)對于特定漏孔,在大氣壓下漏孔中氣體始終處于完全分子流狀態(tài),即漏孔流導(dǎo)與前級壓強(qiáng)無關(guān),在大氣壓下為一常數(shù);漏孔流導(dǎo)與所用實(shí)驗(yàn)氣體質(zhì)量方根的倒數(shù)成正比。本文所提出的基于AAO的完全分子流標(biāo)準(zhǔn)漏孔具有制作成本低廉、制作方法簡單、壓強(qiáng)適用范圍廣(最高壓強(qiáng)可達(dá)100k Pa)、漏孔流導(dǎo)可控、漏孔對于不同種類氣體的流導(dǎo)具有可預(yù)測性等優(yōu)點(diǎn)。
[Abstract]:The standard leak hole is the scale of vacuum metering technology, and its performance directly affects the accuracy of vacuum measurement and vacuum leak detection. At present, there are many problems such as uncontrollable shape and size, uncertain leakage rate and complex transition flow of gas in the common channel type standard hole. These problems make it impossible to calibrate and calibrate the leak detector and vacuum gauge accurately. Aiming at the problems existing in the traditional standard holes, this paper presents a new type of molecular flow standard porous material, which is prepared by anodic aluminum oxide-AAO-anodic aluminum process and mask assisted coating method. AAO is a kind of nanoscale porous material commonly used in micro-nano machining. The diameter of single hole is below 100nm. In this paper, the secondary coating treatment of AAO was carried out by mask assisted coating method, and the results of coating were observed by optical microscope. The experimental results show that AAOs with different effective area or different channel number can be prepared by using different size mask. Then, using the self-designed differential pressure leak calibration device, the leakage rate and flow conductance of the standard leak formed by AAO encapsulation after coating were measured by using helium gas, nitrogen N _ 2N _ 2N _ 2N _ 2 and ar _ (2) as experimental gases. The experimental results show that for the holes encapsulated in different effective areas, the leakage conductance is proportional to the effective area of AAO. For a particular leak, the gas in the hole is always in the state of full molecular flow at atmospheric pressure. The leakage flow conductance is a constant at atmospheric pressure and is proportional to the reciprocal of the mass square root of the experimental gas used. In this paper, the standard hole of full molecular flow based on AAO has the advantages of low cost, simple fabrication method and wide range of pressure application (the maximum pressure can be up to 100kPa, and the flow conductance of the leak hole can be controlled. Leak holes have the advantages of predictability for the flow conductance of different gases.
【學(xué)位授予單位】：合肥工業(yè)大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TB774

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