本文選題：薄膜測量 + 白光干涉�。� 參考：《天津大學(xué)》2014年碩士論文

【摘要】：薄膜作為一種特殊的結(jié)構(gòu),具有與塊狀材料不同的獨特性能,在光學(xué)、信息、生物、航天等領(lǐng)域得到廣泛應(yīng)用。薄膜的各種特性直接決定著其能否正常工作,因此對薄膜的檢測越發(fā)重要。白光光譜干涉技術(shù)作為一種光學(xué)測試方法,具有非接觸、高精度等特點,被廣泛應(yīng)用于薄膜特性檢測領(lǐng)域。該方法不僅能夠測量薄膜厚度、折射率等信息,而且也能測量相位特性,具有其獨特的優(yōu)勢。本課題圍繞白光光譜干涉技術(shù)展開,研究基于該技術(shù)的薄膜特性檢測,在分析相關(guān)理論的基礎(chǔ)上搭建測試系統(tǒng),實現(xiàn)薄膜特性檢測。論文的主要工作如下:1.系統(tǒng)論述了薄膜的發(fā)展和應(yīng)用,對目前常用的薄膜測試方法進行總結(jié)歸納,并詳細闡述了白光光譜干涉測試技術(shù)的發(fā)展現(xiàn)狀。2.分析了白光光譜干涉技術(shù)原理。從干涉原理、部分相干光理論和薄膜結(jié)構(gòu)反射特性三個方面分析了該技術(shù)的理論基礎(chǔ),為后續(xù)工作奠定基礎(chǔ)。3.研究了幾種常用相位提取算法,從求解精度、測量范圍、運算時間、抗噪能力、引入誤差形式等方面進行比較,選擇時間相移法作為本系統(tǒng)的相位提取算法。4.闡述了最優(yōu)化理論,針對局部算法,提出了兩種初值確定方法,基于非線性相位提取初值和基于反射率提取初值,兩種方法均能提取合適的初值用于優(yōu)化計算;針對全局算法,設(shè)計了模擬退火法和遺傳算法用于測量薄膜特性參數(shù),兩種方法均能在不需初值的情況下取得較精確的結(jié)果。從時間、精度等方面對幾種方法進行分析,結(jié)果表明局部算法相比全局算法能夠在更短的時間內(nèi)得到精度更高的結(jié)果;但全局算法不需要初值,并且能夠同時測量膜厚和折射率。5.詳細分析了影響系統(tǒng)測量精度的因素,包括光源、分光棱鏡、光譜儀等,給出了等效厚度的變化規(guī)律,提出了利用等效波長修正系統(tǒng)誤差的方法。利用高精度壓電掃描器對系統(tǒng)精度進行了測試,結(jié)果表明系統(tǒng)具有納米級測量重復(fù)性與復(fù)現(xiàn)性。通過測量NIST認證的標準薄膜樣品,驗證了系統(tǒng)和方法的可行性。
[Abstract]:As a special structure, thin film has the unique properties different from the bulk material. It has been widely used in the fields of optics, information, biology, space and other fields. The various properties of the film directly determine whether it can work properly. Therefore, the detection of the film is more important. White light spectral interferometry as an optical testing method has no connection. Touch, high precision and so on, it is widely used in the field of film characteristic detection. This method not only can measure the thickness of the film, the refractive index and the other information, but also can measure the phase characteristics. It has its unique advantages. This topic focuses on the white light spectral interference technique, and studies the film characteristics detection based on this technology, and analyzes the basis of the related theory. The main work of this paper is as follows: 1. systematically discusses the development and application of thin film, summarizes the commonly used film testing methods, and expounds the development status of white light spectral interferometry technology in detail.2. analysis the principle of white light spectral interferometry. The theoretical basis of this technology is analyzed by three aspects of the theory of partially coherent light and the reflection characteristics of the film structure. Several common phase extraction algorithms are studied for the follow-up work and.3. is studied. The time phase shift method is selected as the time phase shift method to compare the accuracy, the measurement range, the operation time, the noise resistance and the error form. The phase extraction algorithm.4. describes the optimization theory. According to the local algorithm, two initial value determination methods are proposed. Based on the nonlinear phase extraction initial value and the initial value based on the reflectivity extraction, the two methods can extract the appropriate initial value for optimization calculation. The two methods can obtain more accurate results without the initial value. The results show that the local algorithm can get more accurate results in a shorter time than the global algorithm, but the global algorithm does not need the initial value, and can measure the thickness of the film at the same time. The refractive index.5. analyses the factors affecting the measurement accuracy of the system in detail, including the light source, the optical prism, the spectrometer and so on. The variation law of the equivalent thickness is given. The method of correcting the system error by the equivalent wavelength is proposed. The precision of the system is tested by the high-precision piezoelectric scanner. The results show that the system has the nanometer scale measurement repetition. Sex and reproducibility. The feasibility of the system and method is verified by measuring NIST certified standard film samples.

【學(xué)位授予單位】：天津大學(xué)
【學(xué)位級別】：碩士
【學(xué)位授予年份】：2014
【分類號】：O484.5

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本文編號：1816284