本文選題：密封性檢測(cè) + 積累氦質(zhì)譜　； 參考：《中國(guó)電子科學(xué)研究院學(xué)報(bào)》2016年04期

【摘要】：作者在積累氦質(zhì)譜組合檢測(cè)中發(fā)現(xiàn)存在粗漏漏檢現(xiàn)象,美國(guó)宇航局2013年2014年的研究報(bào)告揭示,各種組合檢測(cè)復(fù)測(cè)中均存在粗漏細(xì)漏漏檢現(xiàn)象。文章對(duì)積累氦質(zhì)譜組合檢測(cè)和氬粗漏氦細(xì)漏組合檢測(cè)的粗漏檢測(cè),提出了確定最長(zhǎng)粗漏檢測(cè)時(shí)間的方法;對(duì)這兩種組合檢測(cè)和氦質(zhì)譜檢測(cè)的細(xì)漏檢測(cè),綜合給出了定量確定和拓展細(xì)漏檢測(cè)最長(zhǎng)候檢時(shí)間的方法,論證了壓氦壓力不應(yīng)小于2倍的大氣壓力,提出了確定預(yù)充氦法和預(yù)充氦氬法最小候檢時(shí)間的方法,提出了確定最長(zhǎng)細(xì)漏檢測(cè)時(shí)間的方法,從而可減少和防止粗漏和細(xì)漏漏檢;并通過對(duì)美國(guó)宇航局報(bào)告中實(shí)例的分析,驗(yàn)證了以上方法的有效性。同時(shí)指出漏孔堵塞是造成漏檢的原因之一,但不是形成微型元器件高比率漏檢的主要原因。
[Abstract]:The authors found the phenomenon of coarse leak leakage in the combined detection of accumulative helium mass spectrometry. The 2013 NASA research report revealed that there was a phenomenon of coarse leak leakage in the repeated testing of all kinds of combination tests.In this paper, the method of determining the maximum coarse leak detection time is proposed for the combined detection of accumulated helium mass spectrometry and argon coarse leak helium thin leak detection, and the fine leak detection for these two kinds of combined detection and helium mass spectrometry detection is given.The method of quantifying and extending the maximum waiting time for fine leak detection is given, the atmospheric pressure of pressure helium pressure should not be less than 2 times, and the method of determining the minimum waiting time of precharge helium method and precharge helium argon method is put forward.A method to determine the maximum fine leak detection time is proposed, which can reduce and prevent coarse leakage and fine leak detection, and the effectiveness of the above method is verified by the analysis of examples in NASA report.At the same time, it is pointed out that leak blocking is one of the causes of leak detection, but it is not the main cause of high ratio leakage of micro components.
【作者單位】： 北京市科通電子繼電器總廠有限公司;
【分類號(hào)】：TB774.3
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本文編號(hào)：1765694