本文選題：溶膠凝膠法　切入點：Mg-Al共摻雜　出處：《陶瓷學(xué)報》2017年01期

【摘要】：采用溶膠凝膠法在石英襯底上制備了Mg-Al共摻的ZnO薄膜,研究了不同旋涂層數(shù)對ZnO薄膜微觀結(jié)構(gòu)、表面形貌以及光學(xué)性能的影響。利用X射線衍射儀(XRD)、掃描電子顯微鏡(SEM)、紫外-可見分光光度計(UV-VIS)、PL光致發(fā)光光譜儀對樣品進(jìn)行了表征與測試。實驗結(jié)果表明:Mg-Al共摻后的ZnO薄膜均呈現(xiàn)六角纖鋅礦結(jié)構(gòu)且沿C軸擇優(yōu)取向生長,薄膜層數(shù)的增加能夠有效提升薄膜的結(jié)晶質(zhì)量。同時Mg-Al共摻雜能夠極大地拓寬ZnO薄膜在近紅外光譜域的光透過率,平均透過率超過85%。
[Abstract]:Mg-Al co-doped ZnO films were prepared on quartz substrates by sol-gel method. The microstructure of ZnO films with different number of spin coatings was studied. The influence of surface morphology and optical properties. The samples were characterized and tested by X-ray diffractometer, scanning electron microscope (SEM), UV-Vis spectrometer (UV-VIS) PL photoluminescence spectrometer. The experimental results show that the sample is co-doped with% Mg-Al. All of the ZnO films showed hexagonal wurtzite structure and preferred orientation along the C axis. The increase in the number of layers can effectively improve the crystalline quality of the films, and Mg-Al co-doping can greatly broaden the optical transmittance of ZnO films in the near infrared spectrum domain, the average transmittance is more than 8550.
【作者單位】： 景德鎮(zhèn)陶瓷大學(xué)機械電子工程學(xué)院;
【基金】：國家自然基金項目(61464005,51562015) 江西省科技支撐計劃資助項目(2010BGA01100) 江西省對外合作資助項目(20132BDH80025,20151BDH80031) 江西省主要學(xué)科學(xué)術(shù)和技術(shù)帶頭人培養(yǎng)計劃項目(20123BCB22002) 景德鎮(zhèn)陶瓷大學(xué)創(chuàng)新創(chuàng)業(yè)訓(xùn)練計劃項目(212050-008)
【分類號】：O614.241;TB383.2
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本文編號：1654792