本文選題：螺桿真空泵　切入點(diǎn)：泄漏　出處：《真空科學(xué)與技術(shù)學(xué)報(bào)》2017年04期 　論文類型：期刊論文

【摘要】：基于雙螺桿真空泵氣體輸運(yùn)的特點(diǎn),將泵腔內(nèi)級(jí)間的泄漏通道簡(jiǎn)化為不同類型的真空管路,采用相鄰級(jí)間的平均壓強(qiáng)確定不同壓強(qiáng)下級(jí)間泄漏氣體的流態(tài),計(jì)算得到級(jí)間泄漏的質(zhì)量流量。根據(jù)質(zhì)量守恒定律,建立了雙螺桿真空泵氣體輸運(yùn)過程的數(shù)學(xué)模型。以漸開線型端面的等螺距螺桿真空泵為研究對(duì)象,計(jì)算分析了泵從大氣壓到極限真空的整個(gè)抽氣過程。對(duì)不同入口壓強(qiáng)下的級(jí)間泄漏量與抽速進(jìn)行了研究,研究表明:不同的泄漏通道對(duì)級(jí)間泄漏的影響有所不同。在排氣端,齒頂圓與泵腔內(nèi)壁之間的泄漏通道對(duì)級(jí)間泄漏的影響較大;在吸氣端,兩轉(zhuǎn)子齒頂齒根面之間、斜齒面之間以及凹齒面之間這三種泄漏通道對(duì)級(jí)間泄漏的影響較大。
[Abstract]:Based on the characteristics of gas transport in twin-screw vacuum pump, the leakage channel between stages in the pump cavity is simplified into different types of vacuum pipe, and the flow pattern of leakage gas between different pressures is determined by the average pressure between adjacent stages. According to the law of conservation of mass, the mathematical model of gas transport process of twin-screw vacuum pump is established. The involute screw vacuum pump with equal pitch is taken as the object of study. The whole pumping process from atmospheric pressure to limiting vacuum is calculated and analyzed. The inter-stage leakage and pumping speed at different inlet pressures are studied. The results show that the effects of different leakage channels on the leakage between stages are different. The leakage channel between the top tooth circle and the inner wall of the pump cavity has a great influence on the leakage between stages, and the three leakage channels have a great influence on the leakage between stages at the suction end, between the root surfaces of the two rotors' top teeth, between the oblique tooth surfaces and between the concave tooth surfaces.
【作者單位】： 合肥工業(yè)大學(xué)真空科學(xué)技術(shù)與裝備研究所;淄博市螺桿真空泵工程中心;安徽農(nóng)業(yè)大學(xué)理學(xué)院;
【基金】：企業(yè)技術(shù)研發(fā)項(xiàng)目(No.102-432836) 中央高�；究蒲袠I(yè)務(wù)經(jīng)費(fèi)項(xiàng)目(No.JZ2015HGBZ0465) 中國(guó)博士后科學(xué)基金面上項(xiàng)目(No.2016M590041)
【分類號(hào)】：TB752

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