本文選題：角振動　切入點：激光干涉　出處：《北京理工大學(xué)》2014年博士論文　論文類型：學(xué)位論文

【摘要】：隨著導(dǎo)航與制導(dǎo)技術(shù)的快速發(fā)展，對高頻響慣性器件的動態(tài)性能評價及其量值準(zhǔn)確提出了更高的要求，由于高頻標(biāo)準(zhǔn)角振動激勵發(fā)生器以及精密動態(tài)角度測量儀的技術(shù)實現(xiàn)難題，尚未形成國家級角振動計量標(biāo)準(zhǔn)裝置，嚴(yán)重限制了慣性器件動態(tài)性能評價水平的提升，為提高角振動量值準(zhǔn)確性、解決其量值統(tǒng)一和溯源問題、并能提供標(biāo)準(zhǔn)角振動量值復(fù)現(xiàn)裝置，針對高頻角振動校準(zhǔn)方法與技術(shù)，開展本論文研究。 本論文主要創(chuàng)新如下： 從振動校準(zhǔn)基本理論和方法出發(fā)，研究了角振動激勵發(fā)生器和激光動態(tài)測角儀的基本原理，建立系統(tǒng)模型，重點分析了角振動激勵發(fā)生器波形失真以及激光動態(tài)測角方法對校準(zhǔn)不確定度的主要影響因素，提出并開展了兩項關(guān)鍵技術(shù)研究：高頻低失真大承載角振動激勵發(fā)生器技術(shù)和高精度衍射光柵激光干涉動態(tài)測角技術(shù)。 針對高頻標(biāo)準(zhǔn)角振動激勵發(fā)生器技術(shù)實現(xiàn)難題，根據(jù)振動臺頻響特性分析理論，對比分析了電機(jī)驅(qū)動方式和多種非電機(jī)驅(qū)動方式對角振動臺實現(xiàn)的優(yōu)缺點，，重點分析了角振動激勵波形失真產(chǎn)生原因。選擇杯式電磁驅(qū)動結(jié)構(gòu)和框式電磁驅(qū)動結(jié)構(gòu)進(jìn)行了樣機(jī)設(shè)計和實驗驗證，發(fā)明了框式電磁結(jié)構(gòu)與輕質(zhì)空心杯精密空氣靜壓軸承一體化融合設(shè)計的結(jié)構(gòu)，結(jié)合對動圈電氣參數(shù)、磁場、運(yùn)動部件固有頻率的分析以及三角支撐恢復(fù)彈簧的設(shè)計，完成高頻標(biāo)準(zhǔn)角振動臺設(shè)計。 針對高頻微幅角振動絕對法測量技術(shù)難題，分析了精密激光干涉測量方法，進(jìn)而提出了一種組合反射鏡組的衍射光柵外差差動激光干涉動態(tài)角度測量方法、專門光電信號跳變穩(wěn)定高效判別算法和正交光電信號非線性補(bǔ)償方法，實現(xiàn)了0.02″的動態(tài)角位移量值復(fù)現(xiàn)精度。 實驗表明：采用上述方法和技術(shù)構(gòu)建的高頻角振動校準(zhǔn)裝置實現(xiàn)了在10Hz～550Hz頻率范圍和0.2rad/s2～1760rad/s2角加速度范圍內(nèi)，角速度波形失真度小于2%的性能指標(biāo)，角加速度幅值靈敏度校準(zhǔn)不確定度小于2%、相位延遲校準(zhǔn)不確定度小于2o（k=2）。
[Abstract]:With the rapid development of navigation and guidance technology, a higher requirement is put forward for the dynamic performance evaluation and accurate value of high-frequency inertial devices. Due to the technical problems of high frequency standard angular vibration generator and precision dynamic angle measuring instrument, the national standard device for angle vibration measurement has not been formed, which seriously limits the improvement of dynamic performance evaluation level of inertial devices. In order to improve the accuracy of angular vibration, to solve the problem of unification and traceability of angular vibration, and to provide the standard angular vibration value reproduction device, this paper studies the calibration methods and techniques of high-frequency angular vibration. The main innovations of this thesis are as follows:. Based on the basic theory and method of vibration calibration, the basic principles of angular vibration excitation generator and laser dynamic angulometer are studied, and the system model is established. The main factors affecting the calibration uncertainty of the angular vibration excitation generator and the laser dynamic angle measuring method are analyzed in detail. Two key technologies are proposed and developed: high frequency and low distortion vibration generator with large bearing angle and high precision diffraction grating laser interferometry. According to the theory of frequency response characteristic analysis of vibration table, the advantages and disadvantages of actualization of diagonal vibration table with motor drive mode and non-motor drive mode are compared and analyzed according to the technical problem of high frequency standard angular vibration generator. The causes of distortion of angular vibration excitation waveform are analyzed emphatically. The prototype design and experimental verification of cup type electromagnetic drive structure and frame electromagnetic drive structure are carried out. The structure of the integration design of frame electromagnetic structure and light hollow cup precision air static bearing is invented, which combines the analysis of the electrical parameters of the moving ring, the magnetic field, the natural frequency of the moving parts and the design of the triangle support recovery spring. Complete the design of high frequency standard angle vibration table. Aiming at the technical problem of absolute measurement method of high-frequency micro-amplitude angular vibration, the precision laser interferometry method is analyzed, and a dynamic angle measurement method based on diffractive grating heterodyne laser interferometry is proposed. The special algorithm for judging the stability of photoelectric signal jump and the nonlinear compensation method for orthogonal photoelectric signal have realized the accuracy of 0.02 "dynamic angular displacement value reappearance. The experimental results show that the calibration device of high frequency angular vibration based on the above methods and techniques has achieved the performance index of angular velocity waveform distortion less than 2% in the frequency range of 10 Hz / 550Hz and in the range of 0.2radr / s / s 1760radr / s 2 angular acceleration. The calibration uncertainty of angular acceleration amplitude sensitivity is less than 2 and the uncertainty of phase delay calibration is less than 2og / kg.
【學(xué)位授予單位】：北京理工大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2014
【分類號】：TB534.2

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