本文選題：薄膜　切入點(diǎn)：厚度測(cè)量　出處：《西南科技大學(xué)》2017年碩士論文　論文類型：學(xué)位論文

【摘要】：薄膜厚度是衡量薄膜質(zhì)量的主要指標(biāo)。目前薄膜種類越來(lái)越多,薄膜產(chǎn)品正朝著高精度方向發(fā)展。針對(duì)現(xiàn)有薄膜厚度測(cè)量方法難以實(shí)現(xiàn)大厚度薄膜測(cè)量、成本高等問(wèn)題。本文利用光驅(qū)內(nèi)的DVD激光頭,研究開(kāi)發(fā)了基于像散原理的薄膜厚度測(cè)量系統(tǒng),實(shí)驗(yàn)結(jié)果表明,本系統(tǒng)厚度測(cè)量范圍為100~800μm,重復(fù)測(cè)量精度為8μm,測(cè)量薄膜尺寸為140mm×50mm。論文主要研究?jī)?nèi)容如下:(1)像散位移傳感器的研制。針對(duì)像散光學(xué)系統(tǒng)中光電探測(cè)器輸出的微弱電壓信號(hào),設(shè)計(jì)了信號(hào)放大電路和基于K60微處理器的聚焦誤差信號(hào)采集處理系統(tǒng),實(shí)現(xiàn)了像散光學(xué)系統(tǒng)輸出信號(hào)到聚焦誤差信號(hào)的轉(zhuǎn)換。通過(guò)模擬仿真分析得出了像散光學(xué)系統(tǒng)參數(shù)對(duì)像散位移傳感器測(cè)量精度和量程的影響規(guī)律。設(shè)計(jì)并實(shí)現(xiàn)了測(cè)量精度和量程可靈活改變的像散位移傳感器。(2)掃描抖動(dòng)誤差實(shí)時(shí)校正。掃描式測(cè)量系統(tǒng)通常包含直線運(yùn)動(dòng)平臺(tái),然而直線運(yùn)動(dòng)平臺(tái)一般存在10μm以上的隨機(jī)抖動(dòng)誤差,將引起系統(tǒng)測(cè)量誤差擴(kuò)大。本文針對(duì)直線運(yùn)動(dòng)平臺(tái)隨機(jī)抖動(dòng)誤差,提出了雙像散位移傳感器掃描抖動(dòng)誤差實(shí)時(shí)校正方案。實(shí)驗(yàn)結(jié)果表明,通過(guò)該方案誤差實(shí)時(shí)校正后直線運(yùn)動(dòng)平臺(tái)的隨機(jī)抖動(dòng)誤差由原來(lái)的12μm降低到了2μm。(3)薄膜厚度測(cè)量系統(tǒng)設(shè)計(jì)與實(shí)現(xiàn)。詳細(xì)對(duì)比分析了掃描式和陣列式兩種薄膜厚度測(cè)量方案優(yōu)缺點(diǎn),并結(jié)合直線運(yùn)動(dòng)平臺(tái)隨機(jī)抖動(dòng)誤差實(shí)時(shí)校正,設(shè)計(jì)并實(shí)現(xiàn)了基于像散原理的雙傳感器掃描式薄膜厚度測(cè)量系統(tǒng)。實(shí)驗(yàn)結(jié)果表明,系統(tǒng)厚度測(cè)量范圍為100~800μm,重復(fù)測(cè)量精度為8μm,測(cè)量薄膜尺寸為140mm×50mm。
[Abstract]:Film thickness is the main index to measure the film quality. At present, there are more and more kinds of films, and the film products are developing towards high precision. In this paper, a thin film thickness measurement system based on astigmatic principle is developed using DVD laser head in optical drive. The experimental results show that, The thickness measurement range of the system is 100 渭 m, the precision of repeated measurement is 8 渭 m, and the measurement film size is 140 mm 脳 50 mm. The main contents of this paper are as follows: 1) the development of astigmatic displacement sensor. The signal amplification circuit and the signal acquisition and processing system based on K60 microprocessor are designed. The conversion from astigmatic optical system output signal to focusing error signal is realized. The influence of astigmatic optical system parameters on the measurement accuracy and range of astigmatic displacement sensor is obtained by simulation and analysis, and the measurement accuracy and range of astigmatic displacement sensor are designed and realized. The scanning jitter error is corrected in real time by using a flexible astigmatic displacement sensor. The scanning measurement system usually includes a linear motion platform. However, there is a random jitter error of more than 10 渭 m in the linear motion platform, which will cause the system measurement error to be enlarged. In this paper, the random jitter error of the linear moving platform is discussed. A real-time correction scheme for scanning jitter error of dual-astigmatic displacement sensor is proposed. The experimental results show that, The random jitter error of the linear motion platform is reduced from 12 渭 m to 2 渭 m.m3) after the real-time correction of the scheme error. The advantages and disadvantages of the scanning and array thickness measurement schemes are compared and analyzed in detail. Combined with the real-time correction of random jitter error of linear motion platform, a double-sensor scanning film thickness measurement system based on astigmatism principle is designed and implemented. The experimental results show that, The thickness measurement range of the system is 100 渭 m, the precision of repeated measurement is 8 渭 m, and the film size is 140 mm 脳 50 mm.
【學(xué)位授予單位】：西南科技大學(xué)
【學(xué)位級(jí)別】：碩士
【學(xué)位授予年份】：2017
【分類號(hào)】：TP212;O484.5

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本文編號(hào)：1595742