本文選題：薄膜　切入點：厚度測量　出處：《西南科技大學》2017年碩士論文　論文類型：學位論文

【摘要】：薄膜厚度是衡量薄膜質(zhì)量的主要指標。目前薄膜種類越來越多,薄膜產(chǎn)品正朝著高精度方向發(fā)展。針對現(xiàn)有薄膜厚度測量方法難以實現(xiàn)大厚度薄膜測量、成本高等問題。本文利用光驅(qū)內(nèi)的DVD激光頭,研究開發(fā)了基于像散原理的薄膜厚度測量系統(tǒng),實驗結(jié)果表明,本系統(tǒng)厚度測量范圍為100~800μm,重復測量精度為8μm,測量薄膜尺寸為140mm×50mm。論文主要研究內(nèi)容如下:(1)像散位移傳感器的研制。針對像散光學系統(tǒng)中光電探測器輸出的微弱電壓信號,設(shè)計了信號放大電路和基于K60微處理器的聚焦誤差信號采集處理系統(tǒng),實現(xiàn)了像散光學系統(tǒng)輸出信號到聚焦誤差信號的轉(zhuǎn)換。通過模擬仿真分析得出了像散光學系統(tǒng)參數(shù)對像散位移傳感器測量精度和量程的影響規(guī)律。設(shè)計并實現(xiàn)了測量精度和量程可靈活改變的像散位移傳感器。(2)掃描抖動誤差實時校正。掃描式測量系統(tǒng)通常包含直線運動平臺,然而直線運動平臺一般存在10μm以上的隨機抖動誤差,將引起系統(tǒng)測量誤差擴大。本文針對直線運動平臺隨機抖動誤差,提出了雙像散位移傳感器掃描抖動誤差實時校正方案。實驗結(jié)果表明,通過該方案誤差實時校正后直線運動平臺的隨機抖動誤差由原來的12μm降低到了2μm。(3)薄膜厚度測量系統(tǒng)設(shè)計與實現(xiàn)。詳細對比分析了掃描式和陣列式兩種薄膜厚度測量方案優(yōu)缺點,并結(jié)合直線運動平臺隨機抖動誤差實時校正,設(shè)計并實現(xiàn)了基于像散原理的雙傳感器掃描式薄膜厚度測量系統(tǒng)。實驗結(jié)果表明,系統(tǒng)厚度測量范圍為100~800μm,重復測量精度為8μm,測量薄膜尺寸為140mm×50mm。
[Abstract]:Film thickness is the main index to measure the film quality. At present, there are more and more kinds of films, and the film products are developing towards high precision. In this paper, a thin film thickness measurement system based on astigmatic principle is developed using DVD laser head in optical drive. The experimental results show that, The thickness measurement range of the system is 100 渭 m, the precision of repeated measurement is 8 渭 m, and the measurement film size is 140 mm 脳 50 mm. The main contents of this paper are as follows: 1) the development of astigmatic displacement sensor. The signal amplification circuit and the signal acquisition and processing system based on K60 microprocessor are designed. The conversion from astigmatic optical system output signal to focusing error signal is realized. The influence of astigmatic optical system parameters on the measurement accuracy and range of astigmatic displacement sensor is obtained by simulation and analysis, and the measurement accuracy and range of astigmatic displacement sensor are designed and realized. The scanning jitter error is corrected in real time by using a flexible astigmatic displacement sensor. The scanning measurement system usually includes a linear motion platform. However, there is a random jitter error of more than 10 渭 m in the linear motion platform, which will cause the system measurement error to be enlarged. In this paper, the random jitter error of the linear moving platform is discussed. A real-time correction scheme for scanning jitter error of dual-astigmatic displacement sensor is proposed. The experimental results show that, The random jitter error of the linear motion platform is reduced from 12 渭 m to 2 渭 m.m3) after the real-time correction of the scheme error. The advantages and disadvantages of the scanning and array thickness measurement schemes are compared and analyzed in detail. Combined with the real-time correction of random jitter error of linear motion platform, a double-sensor scanning film thickness measurement system based on astigmatism principle is designed and implemented. The experimental results show that, The thickness measurement range of the system is 100 渭 m, the precision of repeated measurement is 8 渭 m, and the film size is 140 mm 脳 50 mm.
【學位授予單位】：西南科技大學
【學位級別】：碩士
【學位授予年份】：2017
【分類號】：TP212;O484.5

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本文編號：1595742