【摘要】：在微納計量領(lǐng)域,微小力值的測試技術(shù)廣泛應(yīng)用于生物醫(yī)藥、新材料、微電子等多個領(lǐng)域。建立高準(zhǔn)確度的微納計量基標(biāo)準(zhǔn)可以保證微納技術(shù)領(lǐng)域快速可持續(xù)發(fā)展。本文的研究目標(biāo)是通過建立高準(zhǔn)確度計量標(biāo)準(zhǔn)、采用適當(dāng)?shù)牧恐祩鬟f途徑和方法,實現(xiàn)微納力值的SI(International System of Units)溯源。微小力值裝置可以采用電學(xué)方法復(fù)現(xiàn),通過電學(xué)量、幾何量的精確測量實現(xiàn)微小力值的傳遞。由于微小力值易受到環(huán)境干擾,因此本文重點研究了微小力值測量過程中抗干擾技術(shù),并探索了基于懸臂梁剛度的力值標(biāo)準(zhǔn)傳遞方案,完成了理論分析和實驗驗證。本文的主要工作如下:1.系統(tǒng)分析了國內(nèi)外在微納力值計量領(lǐng)域的研究現(xiàn)狀,搭建了力值測量與溯源標(biāo)準(zhǔn)裝置,搭建了dC/dz測量模塊、內(nèi)電極平衡位置監(jiān)測模塊和誤差校正、濾波算法。2.討論了微小力值測量過程中抗干擾技術(shù)。分別研究了地面振動、空氣擾動、電磁干擾、彈性支撐的熱噪聲對微納力值的影響。采用空氣阻尼方案減小了地面振動的影響,系統(tǒng)的阻尼比由0.0005增加至0.1,從而增大了系統(tǒng)的穩(wěn)定裕度及抗振性能,使得位移輸出的均方差由原來的1μm降低到0.1μm。電磁屏蔽減小了電磁干擾對電容值的影響。提出采用牛頓差商法來減小彈性支撐熱噪聲對微小力值測量的影響。3.完成了電容梯度測試,測量結(jié)果的均值為0.9269 pF/mm,方差為0.0006pF/mm,相對方差為0.067%;分析了導(dǎo)致電容梯度不確定的來源以及相應(yīng)的解決方案。將靜電力與標(biāo)準(zhǔn)質(zhì)量比對,通過對實驗結(jié)果進行分析,得出導(dǎo)致測量分散性的固定誤差來源以及與質(zhì)量大小相關(guān)的誤差。并對實驗結(jié)果進行不確定度分析,包括地面振動、空氣擾動等A類不確定度和電容梯度、電壓源、激光尺等引起的B類不確定度。實驗結(jié)果表明,測量結(jié)果的合成誤差小于2%。4.探索了基于微力標(biāo)準(zhǔn)裝置的力值標(biāo)準(zhǔn)傳遞技術(shù)。分析原子力顯微鏡懸臂梁作為微力傳感器在力學(xué)特性上的優(yōu)勢,采用標(biāo)定懸臂梁剛度的方法進行力值標(biāo)準(zhǔn)傳遞。提出一種基于振動的快速、可靠的方法,準(zhǔn)確地確定懸臂梁剛度。在這種方法中,懸臂梁剛度可以通過測量接觸已知柔性鉸鏈平行四邊形前后的共振頻率的變化來確定。5.提出了多點法測量懸臂梁剛度,并通過不確定度分析,計算出使得總體不確定度最小的測量點位置,通過改裝現(xiàn)有的裝置完成了相關(guān)實驗,將懸臂梁剛度的不確定度ukc作為測量點的函數(shù)進行討論,并通過優(yōu)化多點測量點的位置選取使得ukc最小。結(jié)果表明:對于剛度為0.1 N/m的懸臂梁,測量的不確定度小于8%。
[Abstract]:In the field of micro / nano measurement, the measurement technology of micro force value is widely used in many fields such as biomedicine, new materials, microelectronics and so on. The rapid and sustainable development of micro / nano technology can be ensured by establishing a high accuracy standard for micro / nano metrology. The research goal of this paper is to realize the SI (International System of Units) tracing of micro-and nano-force by establishing high-accuracy measurement standard and adopting appropriate way and method of value transfer. The micro force value device can be reproduced by electrical method, and the transmission of micro force value can be realized by precise measurement of electrical quantity and geometric quantity. Because the small force value is easy to be disturbed by the environment, this paper focuses on the anti-interference technology in the process of measuring the micro force value, and explores the standard transfer scheme of the force value based on the stiffness of the cantilever beam, and completes the theoretical analysis and experimental verification. The main work of this paper is as follows: 1. The research status in the field of micro-nano force measurement at home and abroad is systematically analyzed. The standard equipment for force value measurement and traceability is set up, and the dC/dz measurement module, internal electrode balance position monitoring module and error correction, filtering algorithm. 2. The anti-interference technique in the process of measuring micro force is discussed. The effects of ground vibration, air disturbance, electromagnetic interference and thermal noise of elastic support on the micro-nano-force are studied. The air damping scheme is used to reduce the influence of ground vibration, and the damping ratio of the system is increased from 0.0005 to 0.1, which increases the stability margin and anti-vibration performance of the system, and reduces the mean square error of displacement output from 1 渭 m to 0.1 渭 m. Electromagnetic shielding reduces the influence of electromagnetic interference on capacitance. Newton difference quotient method is proposed to reduce the influence of thermal noise of elastic support on the measurement of micro force. 3. The capacitance gradient test is completed, the average value of the measurement results is 0.9269 pF/mm, variance is 0.0006 PF / mm, the phase difference is 0.067%, and the source of uncertainty of capacitance gradient and the corresponding solutions are analyzed. By comparing the electrostatic force with the standard quality and analyzing the experimental results, the source of the fixed error and the error related to the mass of the measurement dispersion are obtained. The uncertainty analysis of the experimental results, including ground vibration, air disturbance, class A uncertainty and class B uncertainty caused by capacitance gradient, voltage source and laser ruler, is carried out. The experimental results show that the synthetic error of the measured results is less than 2%. The transfer technology of force value standard based on micro-force standard device is explored. The advantages of atomic force microscope (AFM) cantilever beam as a micro force sensor in mechanical properties are analyzed, and the standard transfer of force value is carried out by the method of calibrating the stiffness of cantilever beam. A fast and reliable method based on vibration is proposed to determine the stiffness of cantilever beam accurately. In this method, the stiffness of cantilever beam can be determined by measuring the change of resonance frequency before and after contact with known flexure hinges parallelogram. The multi-point method is put forward to measure the stiffness of cantilever beam. Through the analysis of uncertainty, the position of the measuring point which makes the overall uncertainty minimum is calculated, and the related experiments are completed by modifying the existing device. The uncertainty of stiffness of cantilever beam ukc is discussed as the function of measurement point and the ukc is minimized by optimizing the location of multi-point measurement point. The results show that the uncertainty of measurement is less than 8% for the cantilever beam with a stiffness of 0.1 N / m.
【學(xué)位授予單位】：天津大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2015
【分類號】：TB93

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