【摘要】：石英音叉諧振器的諧振頻率對音叉臂的質(zhì)量和剛度的變化極其敏感,基于石英音叉諧振器結(jié)構(gòu),將敏感聚合物薄膜覆蓋在石英音叉臂上或?qū)⒚舾芯酆衔锞�橫跨音叉臂兩端,可以通過檢測石英音叉諧振器的諧振頻率變化來反映聚合物薄膜質(zhì)量的變化或聚合物線剛度的變化,設(shè)計(jì)出質(zhì)量敏感型或力敏感型石英音叉?zhèn)鞲衅?該傳感器具有結(jié)構(gòu)緊湊、體積小,分辨力高和穩(wěn)定性好等特點(diǎn)。聚合物線石英音叉復(fù)合溫度傳感器是將熱敏感的聚合物線作為熱敏元件附著在石英音叉諧振器的兩個(gè)音叉臂上,將溫度的變化通過聚合物線轉(zhuǎn)變?yōu)榱Φ淖兓┘拥揭舨姹凵?導(dǎo)致石英音叉諧振器諧振頻率的變化,屬于熱/力敏感型壓電諧振式傳感器。在保持壓電諧振式傳感器固有的輸出信號信噪比高和抗干擾能力強(qiáng)等優(yōu)點(diǎn)的同時(shí),通過熱敏聚合物線提高傳感器的靈敏度和響應(yīng)速度,該傳感器可以應(yīng)用于快速精密測溫領(lǐng)域,亦可作為熱探測器應(yīng)用到非接觸紅外測溫領(lǐng)域。本論文以熱敏聚合物線與石英音叉復(fù)合結(jié)構(gòu)的溫度傳感器為研究目標(biāo),研究了聚合物線石英音叉溫度傳感器熱敏機(jī)理;提出了聚合物線與石英音叉復(fù)合結(jié)構(gòu)的溫度傳感器設(shè)計(jì)方法和制備工藝;完成了傳感器特性測試試驗(yàn),并設(shè)計(jì)制作出相應(yīng)的傳感器陣列測溫系統(tǒng)。論文主要完成以下工作:1.提出了聚合物線石英音叉復(fù)合溫度傳感器的結(jié)構(gòu),確定了傳感器研究的總體方案。2.闡述了聚合物線石英音叉復(fù)合溫度傳感器的工作原理,設(shè)計(jì)了熱敏聚合物線與石英音叉諧振器復(fù)合的傳感器結(jié)構(gòu),分析了石英音叉諧振器頻率溫度特性對傳感器性能的影響因素,確定了石英音叉諧振器石英晶體的新切型,通過實(shí)驗(yàn)比對方法篩選出高溫度靈敏度的聚合物材料,設(shè)計(jì)了聚合物線石英音叉復(fù)合溫度傳感器的制作工藝流程。3.結(jié)合彈性壓電理論和有限元仿真分析方法,利用ANSYS有限元軟件對聚合物線石英音叉復(fù)合諧振器的振動(dòng)模態(tài)、諧響應(yīng)和結(jié)構(gòu)進(jìn)行仿真分析。研究了聚合物線與石英音叉復(fù)合位置對傳感器靈敏度的影響,確定了聚合物線與石英音叉理想的復(fù)合位置。4.建立了聚合物線石英音叉復(fù)合溫度傳感器特性測試平臺,在-10°C~80°C的溫度范圍內(nèi),對聚合物線石英音叉復(fù)合溫度傳感器的特性進(jìn)行測試,量化了石英音叉諧振頻率偏移與溫度變化的對應(yīng)關(guān)系。測試結(jié)果表明:聚合物線石英音叉復(fù)合溫度傳感器可以實(shí)現(xiàn)對環(huán)境溫度變化的檢測,其靈敏度為8.2Hz/°C,非線性誤差為0.005%,分辨力為0.003°C,響應(yīng)時(shí)間為1.5s,,置信概率為95%時(shí)的重復(fù)性為0.006%,同時(shí)具有很好的穩(wěn)定性。5.設(shè)計(jì)制作出測溫傳感器陣列,研究了多傳感器數(shù)據(jù)融合技術(shù),研制了陣列傳感器信號處理電路,開發(fā)了基于LabView平臺的上位機(jī)應(yīng)用軟件,提高了溫度測量的精確性。
[Abstract]:The resonant frequency of the quartz tuning fork resonator is very sensitive to the change of the quality and stiffness of the tuning fork arm. Based on the structure of the quartz tuning fork resonator, the sensitive polymer film is covered on the quartz tuning fork arm or the sensitive polymer wire is crossed across the two ends of the tuning fork arm. The quartz tuning fork sensor with a compact structure can be designed by detecting the change of resonant frequency of the quartz tuning fork resonator to reflect the change of the mass of polymer film or the change of the linear stiffness of the polymer. Small size, high resolution and good stability. The composite temperature sensor of polymer wire quartz tuning fork is a thermo-sensitive polymer wire attached to two tuning fork arms of quartz tuning fork resonator. The change of temperature is applied to the tuning fork arm through the change of polymer wire to force. The change of resonant frequency of quartz tuning fork resonator belongs to a thermal / force sensitive piezoelectric resonant sensor. While maintaining the advantages of high signal-to-noise ratio (SNR) and strong anti-interference ability of the piezoelectric resonant sensor, the sensor can be used in the field of rapid and precise temperature measurement by improving the sensitivity and response speed of the sensor by means of the thermosensitive polymer wire. It can also be used as a thermal detector in the field of non-contact infrared temperature measurement. In this paper, the thermosensitive mechanism of polymer wire quartz tuning fork temperature sensor is studied. The design method and fabrication process of temperature sensor with composite structure of polymer wire and quartz tuning fork are presented, and the testing test of sensor characteristics is completed, and the corresponding sensor array temperature measuring system is designed and manufactured. The main work of this paper is as follows: 1. The structure of polymer linear quartz tuning fork composite temperature sensor is presented, and the overall scheme of sensor research is determined. 2. The working principle of polymer wire quartz tuning fork composite temperature sensor is described. The sensor structure of thermal sensitive polymer wire and quartz tuning fork resonator is designed. The influence factors of the frequency and temperature characteristics of quartz tuning fork resonator on the performance of the sensor are analyzed. The new cut form of quartz crystal of quartz tuning fork resonator is determined. The polymer materials with high temperature sensitivity are screened by the method of experimental comparison. The fabrication process of polymer wire quartz tuning fork composite temperature sensor is designed. 3. Combined with elastic piezoelectric theory and finite element simulation method, the vibration mode, harmonic response and structure of polymer linear quartz tuning fork composite resonator are simulated and analyzed by ANSYS finite element software. The influence of the compound position of polymer wire and quartz tuning fork on the sensitivity of the sensor is studied, and the ideal compound position of polymer line and quartz tuning fork is determined. The testing platform of polymer linear quartz tuning fork composite temperature sensor is established. The characteristics of polymer linear quartz tuning fork composite temperature sensor are tested in the temperature range of -10 擄C ~ (80 擄C). The relationship between quartz tuning fork resonance frequency offset and temperature change is quantified. The test results show that the temperature change can be detected by the composite temperature sensor with quartz tuning fork, the sensitivity is 8.2Hz/ 擄C, the nonlinear error is 0.005, the resolution is 0.003 擄C, and the response time is 1.5 sg. The reproducibility is 0.006 when the confidence probability is 95 and has good stability at the same time. The temperature sensor array is designed and fabricated, the multi-sensor data fusion technology is studied, the signal processing circuit of the array sensor is developed, the application software of host computer based on LabView platform is developed, and the accuracy of temperature measurement is improved.
【學(xué)位授予單位】：哈爾濱理工大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2015
【分類號】：TP212

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