【摘要】：IC制造業(yè)是高科技產(chǎn)業(yè)的代表,受到世界各國(guó)日益重視,其核心指標(biāo)是光刻機(jī)的線寬和產(chǎn)片率。目前,隨著這兩項(xiàng)指標(biāo)的提高,超精密定位技術(shù)正向高精度、高加速度和大行程方向發(fā)展。音圈電機(jī)(Voice Coil Motor,VCM)是一種基于洛倫茲力原理設(shè)計(jì)的直線電機(jī),其具有結(jié)構(gòu)簡(jiǎn)單、體積小、加速度高和響應(yīng)快等特點(diǎn),廣泛應(yīng)用于超精密定位系統(tǒng)中。為了實(shí)現(xiàn)音圈電機(jī)超精密定位運(yùn)動(dòng)控制,本文分別從音圈電機(jī)數(shù)學(xué)模型、高精度功率變換器和超精密定位運(yùn)動(dòng)控制策略三個(gè)方面展開(kāi)研究。為了建立高頻運(yùn)動(dòng)下音圈電機(jī)精確數(shù)學(xué)模型,分別考慮空氣阻尼、電渦流阻尼和彈性剛度特性對(duì)定位精度的影響。重點(diǎn)研究音圈電機(jī)在高頻運(yùn)動(dòng)中存在的遲滯特性,并分析其產(chǎn)生機(jī)理和影響因素。通過(guò)掃描實(shí)驗(yàn)得出結(jié)論即遲滯特性與運(yùn)動(dòng)頻率和運(yùn)動(dòng)行程密切相關(guān)。與此同時(shí),分析電渦流阻尼力產(chǎn)生的原因及影響因素。在兩種不同材料定子的條件下,通過(guò)音圈電機(jī)自由振蕩實(shí)驗(yàn),準(zhǔn)確辨識(shí)空氣阻尼系數(shù)和電渦流阻尼系數(shù)。除此之外,測(cè)試音圈電機(jī)的機(jī)械諧振頻率,設(shè)計(jì)陷波器消除機(jī)械諧振峰。在響應(yīng)時(shí)間、定位精度和效率都要求極高的光刻機(jī)運(yùn)動(dòng)控制系統(tǒng)中,音圈電機(jī)功率變換器必須同時(shí)具備高功率、高精度和高帶寬等特性。為了解決傳統(tǒng)功率變換器高功率和高精度矛盾問(wèn)題,本文提出一種開(kāi)關(guān)線性串聯(lián)混合功率放大器,其中開(kāi)關(guān)功率變換器采用不對(duì)稱級(jí)聯(lián)H橋七電平拓?fù)浣Y(jié)構(gòu),多頻率載波PWM調(diào)制方法有效解決了不對(duì)稱級(jí)聯(lián)H橋七電平功率變換器的電流倒灌問(wèn)題。同時(shí),推導(dǎo)不對(duì)稱級(jí)聯(lián)H橋功率變換器輸出電壓諧波和電流紋波表達(dá)式,設(shè)計(jì)LCCR低通濾波器濾除電壓諧波和電流紋波�；诰�性功率放大器的電壓閉環(huán)控制用來(lái)補(bǔ)償開(kāi)關(guān)功率變換器所產(chǎn)生的電壓誤差,為了快速和準(zhǔn)確補(bǔ)償其電壓誤差,采用雙PI控制器,并以模擬電路方式實(shí)現(xiàn)。最終,通過(guò)直流和交流實(shí)驗(yàn)驗(yàn)證了開(kāi)關(guān)線性混合功率變換器的有效性,其性能指標(biāo),功率:750W;電流峰值:10A;電流紋波:1.2mA;電壓THD:2.4%(250Hz),實(shí)驗(yàn)結(jié)果表明開(kāi)關(guān)線性混合功率變換器同時(shí)具有高功率、高精度和低失真度等特點(diǎn)。在光刻機(jī)超精密定位運(yùn)動(dòng)控制系統(tǒng)中,音圈電機(jī)運(yùn)動(dòng)工況主要包括高精度軌跡跟蹤運(yùn)動(dòng)和高精度點(diǎn)對(duì)點(diǎn)定位運(yùn)動(dòng),針對(duì)不同運(yùn)動(dòng)工況和控制要求,采用不同控制策略。在高精度軌跡跟蹤運(yùn)動(dòng)控制中,5階S型曲線作為位置指令信號(hào),自抗擾控制(Active Disturbance Rejection Control,ADRC)策略作為位置環(huán)的控制算法。仿真結(jié)果表明,與傳統(tǒng)PID控制算法相比,自抗擾控制策略具有強(qiáng)魯棒性和高跟蹤精度。在高精度點(diǎn)對(duì)點(diǎn)定位運(yùn)動(dòng)控制中,提出一種改進(jìn)式復(fù)合非線性反饋控制策略(Composite Nonlinear Feedback,CNF),將擴(kuò)張狀態(tài)觀測(cè)器和積分器加入傳統(tǒng)復(fù)合非線性控制策略中,仿真結(jié)果表明改進(jìn)式CNF控制算法保留高動(dòng)態(tài)和低超調(diào)等優(yōu)點(diǎn),同時(shí)提高了該算法的穩(wěn)態(tài)精度和抗擾性能。為了驗(yàn)證音圈電機(jī)高精度點(diǎn)對(duì)點(diǎn)定位和高精度軌跡跟蹤運(yùn)動(dòng)性能,搭建了音圈電機(jī)超精密定位實(shí)驗(yàn)平臺(tái),分別在單軸空載和多軸帶負(fù)載的情況下進(jìn)行實(shí)驗(yàn)測(cè)試,其中在單軸空載實(shí)驗(yàn)中,音圈電機(jī)在±2mm行程范圍之內(nèi),實(shí)現(xiàn)了1μm的定位精度;在多軸帶負(fù)載實(shí)驗(yàn)中,音圈電機(jī)在500μm行程范圍之內(nèi),實(shí)現(xiàn)了0.4μm的定位精度。正弦信號(hào)和5階S型信號(hào)作為高精度軌跡跟蹤實(shí)驗(yàn)位置指令信號(hào),通過(guò)實(shí)驗(yàn)測(cè)試得出位置環(huán)帶寬:10Hz。
[Abstract]:IC manufacturing industry is the representative of high-tech industry, which is paid more and more attention by all countries in the world. Its core indicators are line width and chip yield of lithography machine. At present, with the improvement of these two indicators, ultra-precision positioning technology is developing towards high precision, high acceleration and large stroke. Voice Coil Motor (VCM) is based on Lorentz force principle. The linear motor is widely used in ultra-precision positioning system because of its simple structure, small volume, high acceleration and fast response. In order to realize the ultra-precision positioning motion control of voice coil motor, the mathematical model of voice coil motor, high-precision power converter and ultra-precision positioning motion control strategy are discussed in this paper. In order to establish an accurate mathematical model of voice coil motor in high frequency motion, the effects of air damping, eddy current damping and elastic stiffness on positioning accuracy are considered respectively. The hysteresis characteristics of voice coil motor in high frequency motion are studied emphatically, and the mechanism and influencing factors are analyzed. In addition, the mechanical resonance frequency of the voice coil motor is measured. A notch filter is designed to eliminate the mechanical resonance peak. In the motion control system of photolithographic machine, which requires high response time, positioning accuracy and efficiency, the voice coil motor power converter must have the characteristics of high power, high precision and high bandwidth at the same time. The switching power converter adopts asymmetrical cascaded H-bridge Seven-level topology, and the multi-frequency carrier PWM modulation method effectively solves the current inversion problem of asymmetrical cascaded H-bridge Seven-level power converter. At the same time, the output voltage harmonic and current ripple of asymmetrical cascaded H-bridge power converter are deduced. LCCR low-pass filter is designed to filter voltage harmonics and current ripple. The voltage closed-loop control based on linear power amplifier is used to compensate the voltage error produced by switching power converter. In order to compensate the voltage error quickly and accurately, a double PI controller is adopted and realized by analog circuit. The current experiment verifies the validity of the switched linear hybrid power converter, its performance index, power: 750W; current peak: 10A; current ripple: 1.2mA; voltage THD: 2.4% (250Hz). The experimental results show that the switched linear hybrid power converter has the characteristics of high power, high precision and low distortion. In the system, the motion condition of voice coil motor mainly includes high-precision trajectory tracking and high-precision point-to-point positioning motion, and different control strategies are adopted according to different motion conditions and control requirements. The simulation results show that the ADRC control strategy has strong robustness and high tracking accuracy compared with the traditional PID control algorithm. In the high precision point-to-point positioning motion control, an improved composite nonlinear feedback control strategy (CNF) is proposed to expand the state. The observer and integrator are added to the traditional compound nonlinear control strategy. The simulation results show that the improved CNF control algorithm retains the advantages of high dynamic and low overshoot, and improves the steady-state accuracy and anti-disturbance performance of the algorithm. The ultra-precision positioning experiment platform of the motor is tested under the condition of single-axis no-load and multi-axis with load respectively. In the single-axis no-load experiment, the positioning accuracy of the voice coil motor is within the range of 65507 Sinusoidal signal and 5th-order S-type signal are used as high-precision trajectory tracking experimental position command signals. The bandwidth of position loop is 10Hz.
【學(xué)位授予單位】：哈爾濱工業(yè)大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：TM359.4;TP273

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本文編號(hào)：2220747