紫外光驅(qū)動下半導體微納結(jié)構(gòu)薄膜的氣敏特性研究
發(fā)布時間:2018-05-28 12:56
本文選題:膠體晶體球 + 紫外光驅(qū)動; 參考:《中國科學技術(shù)大學》2017年博士論文
【摘要】:紫外光驅(qū)動型氣體傳感器由于其結(jié)構(gòu)簡單、成本低廉、操作方便以及可實現(xiàn)室溫工作等優(yōu)點,備受國內(nèi)外科研人員的廣泛關(guān)注。然而,發(fā)展高靈敏度、快速響應/恢復、高穩(wěn)定性及低檢測下限的高性能光驅(qū)動型氣體傳感器目前仍然是人們所面臨的挑戰(zhàn)。本文從敏感材料及其薄膜的結(jié)構(gòu)調(diào)控出發(fā),研究材料微結(jié)構(gòu)、薄膜形態(tài)及關(guān)聯(lián)尺寸等對氣敏特性的影響,發(fā)展高性能紫外光驅(qū)動型氣體傳感器的構(gòu)筑方法,初步開展氣體傳感器的應用研究,取得的結(jié)果主要如下:(1)研究了微納結(jié)構(gòu)陣列薄膜的微結(jié)構(gòu)參數(shù)對氣敏性能的影響。通過改變陣列周期探索了陣列周期尺寸與氣敏性能的關(guān)系,考察了優(yōu)化氣敏性能的最佳光驅(qū)動功率,基于氣敏性能結(jié)構(gòu)參數(shù)關(guān)聯(lián)性解釋了微納結(jié)構(gòu)陣列薄膜氣敏增強特性的內(nèi)在機制。通過改變合成微納結(jié)構(gòu)陣列薄膜前驅(qū)體溶液的濃度,制備了兩種不同結(jié)構(gòu)的微納米有序多孔陣列薄膜:閉環(huán)結(jié)構(gòu)和碗狀結(jié)構(gòu)。對兩種結(jié)構(gòu)薄膜進行氣敏測試分析可知,實驗發(fā)現(xiàn)閉環(huán)結(jié)構(gòu)薄膜對NO2氣敏性能有顯著的增強效果。(2)構(gòu)建了分析多孔薄膜厚度與靈敏度關(guān)系的理論模型。通過理論模型分析發(fā)現(xiàn),當紫外光滲透多孔薄膜的深度(h)大于多孔薄膜的厚度(H)時,隨著厚度的增加,薄膜的靈敏度增大;當h≤H時,進一步增大薄膜厚膜,靈敏度會漸漸減小。為了驗證該理論模型,我們研究了三種不同結(jié)構(gòu)和不同致密度薄膜的厚度對氧化性氣體氣敏性能的影響。分析顯示,實驗結(jié)果與理論模型結(jié)果相吻合。(3)提出了一種簡單、普適的方法制備金屬氧化物空心球陣列薄膜。通過硫化聚苯乙烯微球(PS)模板結(jié)合水熱法可制備出金屬氧化物、有機半導體空心球陣列薄膜,改變PS球直徑和水熱反應時間可分別調(diào)控空心球陣列薄膜的直徑和殼層厚度;尤為重要的是通過這種方法可實現(xiàn)在任意襯底上合成空心球陣列薄膜,這對其在多個領(lǐng)域中的應用非常重要。基于這種方法,我們在氣體傳感器襯底上成功合成了氧化鐵和氧化鋅空心球陣列薄膜,并研究了其氣敏性能。結(jié)果表明,在低溫下氧化鐵空心球陣列薄膜對硫化氫有很好的選擇性和較高的靈敏度;紫外光照射下氧化鋅多孔空心球陣列薄膜對NO2有超快的響應/恢復速度并有較高的靈敏度。本論文研究建立了紫外光驅(qū)動下微納結(jié)構(gòu)的形態(tài)參數(shù)與氣敏性能的關(guān)聯(lián),發(fā)展了高性能氣體傳感器的構(gòu)筑及優(yōu)化方法,并初步實現(xiàn)了對二氧化氮等氣體的高敏感特性,具有重要的應用價值。
[Abstract]:Because of its simple structure, low cost, convenient operation and the ability to work at room temperature, ultraviolet light driven gas sensor has attracted wide attention from researchers at home and abroad. However, the development of high sensitivity, fast response / recovery, high stability and low detection limit of high performance light driven gas sensors is still a challenge. In this paper, based on the structural control of sensitive materials and their films, the effects of microstructure, film morphology and correlation size on gas sensing characteristics are studied, and the construction methods of high performance ultraviolet light driven gas sensors are developed. The main results are as follows: (1) the effect of microstructural parameters on the gas sensing properties of nanoscale array films is studied. By changing the array period, the relationship between the array cycle size and the gas sensing performance is explored, and the optimal light driving power for optimizing the gas sensing performance is investigated. Based on the correlation of gas sensing structure parameters, the intrinsic mechanism of gas sensing enhancement of micro / nano structure array films is explained. By changing the concentration of the precursor solution, two kinds of micro-nano ordered porous array films with different structures were prepared: closed loop structure and bowl structure. The experimental results show that the closed-loop structure films have significant enhancement effect on the gas sensitivity of NO2. A theoretical model for analyzing the relationship between the thickness of porous films and the sensitivity is established. Through theoretical model analysis, it is found that the sensitivity of porous films increases with the increase of thickness when the depth of porous films under ultraviolet light is greater than that of porous films, and the thickness of films increases further when h 鈮,
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