本文關(guān)鍵詞： 柔性納米褶皺 柔性傳感 非接觸式 力學(xué)信號 單芯片矢量檢測　出處：《中北大學(xué)》2016年博士論文　論文類型：學(xué)位論文

【摘要】：近年來,柔性電子、仿生皮膚、可穿戴電子等柔性傳感技術(shù)成為國內(nèi)外研究的熱點(diǎn)之一,以柔性傳感技術(shù)替代傳統(tǒng)的傳感技術(shù),顛覆了對傳統(tǒng)電子器件、傳感器件及系統(tǒng)等形態(tài)和功能的認(rèn)知。柔性傳感技術(shù)通過柔性功能單元感知力學(xué)信號觸發(fā),實(shí)現(xiàn)對柔性形態(tài)系統(tǒng)的測量。目前柔性形態(tài)系統(tǒng)中力學(xué)信號測試主要有兩種方法:力電敏感檢測和力光敏感檢測方法。通過力敏功能單元感知力學(xué)信號,結(jié)合測試電路進(jìn)行信號處理實(shí)現(xiàn)信號傳感,但存在著拉伸導(dǎo)致導(dǎo)線斷裂、引線互連接口脫落、功能單元與金屬粘附等問題。本課題研究了一種柔性系統(tǒng)力學(xué)信息非接觸式測量方法,開展了基于納米褶皺結(jié)構(gòu)的金屬導(dǎo)電電線結(jié)構(gòu)制造、非接觸式信號讀取與解算方法、聚合物表面聯(lián)合改性技術(shù)以及矢量信息檢測方法研究。(1)開發(fā)了柔性金屬納米褶皺導(dǎo)電電線結(jié)構(gòu)制備工藝和PDMS雙面正交褶皺結(jié)構(gòu)的可控制造方法。研究了表面聯(lián)合改性工藝提高了金屬和聚合物的粘附性能,制備了直徑為50μm的金屬納米褶皺導(dǎo)電電線結(jié)構(gòu),可拉伸導(dǎo)電性能達(dá)到襯底的預(yù)拉伸極限200%,電阻誤差小于4%,經(jīng)過400次的重復(fù)性測試后,該結(jié)構(gòu)的電阻變化僅為1.1Ω,具有良好的重復(fù)性,且研究了各向異性和各向同性柔性金屬納米褶皺導(dǎo)電電線結(jié)構(gòu),擴(kuò)展了應(yīng)用領(lǐng)域。(2)研究了柔性系統(tǒng)力學(xué)信息非接觸式檢測結(jié)構(gòu)制造及測量方法。設(shè)計(jì)了一種柔性LC振蕩電路的振動頻率變化來進(jìn)行力學(xué)信號檢測方法,采用碳納米管復(fù)合結(jié)構(gòu)進(jìn)行力學(xué)信息檢測,作為LC振蕩電路的電容結(jié)構(gòu);以柔性金屬納米褶皺電感結(jié)構(gòu)作為非接觸式讀出結(jié)構(gòu),應(yīng)變?yōu)?00%時(shí),誤差優(yōu)于5%,溫度系數(shù)優(yōu)于0.003℃-1,相對濕度系數(shù)優(yōu)于0.00075RH%-1;以此設(shè)計(jì)了非接觸式力學(xué)信息檢測結(jié)構(gòu),并實(shí)現(xiàn)了對手指運(yùn)動信息的檢測。(3)研究了矢量信息解算方法及應(yīng)用實(shí)現(xiàn)。利用雙面正交褶皺在力學(xué)信息作用下的產(chǎn)生的相反的衍射光斑位移和光強(qiáng)信息,實(shí)現(xiàn)對單軸向和矢量力學(xué)信息的定量檢測,結(jié)合自主開發(fā)的信息解算方法,矢量應(yīng)力/應(yīng)變信息測量誤差小于0.6%,矢量位移信息測量誤差小于0.4%,實(shí)現(xiàn)了對柔性系統(tǒng)中的力學(xué)信息的高性能檢測。通過以上的研究,基于納米褶皺結(jié)構(gòu)的非接觸式力學(xué)信號檢測方法解決了現(xiàn)有檢測方法中面臨的關(guān)鍵技術(shù)難題,且開發(fā)了針對性加工工藝方法,提高了柔性形態(tài)傳感器件和系統(tǒng)的便攜性、集成化能力,為未來的高性能、智能化柔性傳感技術(shù)發(fā)展提供新的研究思路和研究基礎(chǔ)。
[Abstract]:In recent years, flexible sensing technology, such as flexible electronics, bionic skin, wearable electronics and so on, has become one of the hotspots in domestic and foreign research. Recognition of forms and functions such as sensor devices and systems. Flexible sensing technology is triggered by flexible functional unit sensing mechanical signals, At present, there are two main methods to measure the mechanical signal in the flexible morphological system: electroforce sensitivity detection and force-light sensitive detection method. The mechanical signal is sensed by the force sensitive function unit, and the mechanical signal can be detected by the force sensitive function unit, and the mechanical signal can be detected by the force sensitive function unit. The signal sensing is realized by combining the signal processing with the test circuit, but there is a tension that leads to the wire breaking and the lead interconnecting interface shedding. In this paper, a non-contact measurement method for mechanical information of flexible system is studied, and the fabrication of metal conductive wire structure based on nano-fold structure, non-contact signal reading and calculation method are carried out. The preparation process of flexible metal nanofold conductive wire structure and the controllable fabrication method of PDMS double-sided orthogonal fold structure were developed. The modification process improves the adhesion of metals to polymers. A metal nanofold conductive wire structure with diameter of 50 渭 m was prepared. The tensile conductivity reached the pre-tensile limit of the substrate 200 and the resistance error was less than 4. After 400 repeatability tests, The resistance variation of the structure is only 1.1 惟, which has good repeatability. The anisotropic and isotropic flexible metal nanofold conductive wire structures are studied. In this paper, the manufacturing and measurement methods of non-contact testing structures for mechanical information of flexible systems are studied, and a method for detecting mechanical signals of flexible LC oscillating circuits is designed. The carbon nanotube composite structure is used to detect the mechanical information as the capacitance structure of LC oscillating circuit, and the flexible metal nanofold inductor structure is used as the non-contact readout structure, when the strain is 100, The error is better than 5, the temperature coefficient is better than 0.003 鈩，

本文編號：1552267