本文關(guān)鍵詞： 光探測(cè) 等離激元光學(xué) 天線 偏振依賴性 法布里珀羅共振 熱電子 入射光子-電流轉(zhuǎn)化率　出處：《南京大學(xué)》2016年博士論文　論文類(lèi)型：學(xué)位論文

【摘要】：隨著微加工和化學(xué)制備水平的提高,等離激元光學(xué)在近年來(lái)得到了迅速的發(fā)展。金屬納米結(jié)構(gòu)的表面等離激元的波長(zhǎng)要遠(yuǎn)小于自由空間中的光的波長(zhǎng),所以電磁場(chǎng)能被束縛在比光波長(zhǎng)小得多的尺度,實(shí)現(xiàn)了亞波長(zhǎng)尺度的近場(chǎng)增強(qiáng)�；谶@個(gè)特性,表面等離激元已被廣泛用于納米光刻,納米光子學(xué),生物探測(cè)器,光探測(cè)等領(lǐng)域。在光探測(cè)領(lǐng)域,能產(chǎn)生等離激元共振的金屬納米結(jié)構(gòu)一方面可以用作增強(qiáng)光探測(cè)器響應(yīng)的天線,另一方面也可以與半導(dǎo)體材料結(jié)合通過(guò)抽取金屬等離激元共振產(chǎn)生的熱電子直接進(jìn)行光探測(cè)。但等離激元自身的共振波長(zhǎng)一般都在可見(jiàn)光波段,難以被用于紅外波段的光探測(cè)。設(shè)計(jì)可用于紅外波段的等離激元天線和等離激元熱電子探測(cè)器則成為了新的挑戰(zhàn)。本文工作主要利用有限時(shí)域差分法(Finite Difference Time Domain, FDTD)和其它數(shù)值模擬方法在紅外波段研究和設(shè)計(jì)了性能遠(yuǎn)高于傳統(tǒng)牛眼結(jié)構(gòu)(Bull'sEye,BE)天線的劈裂牛眼結(jié)構(gòu)(Split Bull's Eye, SBE)天線和具有高響應(yīng)率的等離激元Si-Au共振腔熱電子探測(cè)器。所取得的創(chuàng)新研究成果主要包括以下幾個(gè)方面：1.系統(tǒng)的研究了SBE天線的透射增強(qiáng)機(jī)制,發(fā)現(xiàn)該結(jié)構(gòu)天線在保留了BE天線匯聚特性的同時(shí)將中心孔的傳播模式從倏逝模轉(zhuǎn)變?yōu)榱藗鞑ツ?且在特定膜層厚度下會(huì)發(fā)生法布里珀羅共振增強(qiáng)透射,使得其在紅外波段的透射增強(qiáng)遠(yuǎn)大于傳統(tǒng)的BE天線。我們進(jìn)一步優(yōu)化了SBE天線結(jié)構(gòu)參數(shù),將其工作波長(zhǎng)擴(kuò)展至中紅外,在4μm處其透射增強(qiáng)值高于BE天線6個(gè)數(shù)量級(jí)。2.提出了中心孔為兩個(gè)交叉狹縫的雙劈裂牛眼結(jié)構(gòu)(Dual Split Bull's Eye, DSBE)天線結(jié)構(gòu),其偏振依賴性能通過(guò)改變兩個(gè)狹縫的夾角來(lái)被有效的調(diào)控。當(dāng)兩狹縫相互垂直時(shí),DSBE天線則為完全偏振無(wú)關(guān)。而且,DSBE天線的透射增強(qiáng)特性類(lèi)似于SBE天線,在紅外波段的透射增強(qiáng)遠(yuǎn)大于BE天線。該新型天線結(jié)構(gòu)可應(yīng)用于紅外波段非偏振光和任意偏振光的探測(cè)。3.建立了等離激元熱電子探測(cè)器從光吸收,熱電子產(chǎn)生到熱電子收集的全過(guò)程模擬計(jì)算方法。首次在模擬過(guò)程中考慮了金屬結(jié)構(gòu)內(nèi)具體的吸收分布,能得到更精確的光響應(yīng)的模擬計(jì)算結(jié)果。4.設(shè)計(jì)了基于等離激元Si-Au復(fù)合共振腔結(jié)構(gòu)的肖特基結(jié)熱電子光探測(cè)器。該探測(cè)器結(jié)構(gòu)不僅可對(duì)紅外1550 nm的通訊波長(zhǎng)實(shí)現(xiàn)98%的近乎全吸收,而且能更好的將等離激元共振產(chǎn)生的熱電子轉(zhuǎn)為光電流,提高了探測(cè)器的光響應(yīng)率。
[Abstract]:With the improvement of the level of microfabrication and chemical preparation, the isobaric optics has been developed rapidly in recent years. The wavelength of the surface isophosphors of metal nanostructures is much smaller than that of the light in the free space. So the electromagnetic field can be bound to a scale much smaller than the wavelength of the light, and the near-field enhancement of the subwavelength scale is achieved. Based on this property, the surface isotherms have been widely used in nanophotography, nanophotonics, biological detectors. In the field of optical detection, metal nanostructures, which can produce isopheric resonance, on the one hand, can be used as antennas to enhance the response of photodetectors. On the other hand, it can also be combined with semiconductor materials to detect the light directly by extracting the hot electrons generated by the resonance of metal isoexcitators. But the resonance wavelengths of the isophosphors themselves are generally in the visible wavelength. It is difficult to be used in infrared band optical detection. It is a new challenge to design an isolator antenna and an isolator thermionic detector which can be used in infrared band. In this paper, finite Difference Time domain (FDTD) is mainly used in this work. And other numerical simulation methods have been used to study and design split split bullite Eyees (SBEE) antennas and Si-Au resonator thermoelectronic detectors with high responsivity in infrared band. The innovative research results mainly include the following aspects: 1.The transmission enhancement mechanism of SBE antenna is studied systematically. It is found that the structure antenna can change the propagation mode of the center hole from evanescent mode to propagating mode while retaining the convergence characteristic of the be antenna, and the Fabry-Perot resonance enhanced transmission will occur under the specific film thickness. The transmission enhancement in the infrared band is much larger than that of the traditional be antenna. We further optimize the structure parameters of the SBE antenna and extend its working wavelength to the middle infrared. The transmission enhancement value at 4 渭 m is higher than that of be antenna by 6 orders of magnitude. 2. A dual split Split Bull's eye (DSBE) antenna structure with two cross slits in the center hole is proposed. The polarization dependence can be effectively regulated by changing the angle of the two slits. When the two slits are perpendicular to each other, the DSBE antenna is completely polarization-independent. Moreover, the transmission enhancement characteristics of the DSBE antenna are similar to those of the SBE antenna. The transmission enhancement in infrared band is much greater than that in be antenna. The new antenna structure can be used to detect infrared band non-polarized light and arbitrary polarized light. The whole process simulation calculation method from hot electron generation to hot electron collection. The specific absorption distribution in the metal structure is considered for the first time in the simulation process. 4. A Schottky junction thermoelectron photodetector based on the Si-Au resonator structure is designed. The structure of the detector can not only achieve nearly full absorption of 98% for the communication wavelength of 1550nm. In addition, the hot electrons generated by Isoexciton resonance can be converted into photocurrent better, and the photoresponse rate of the detector is improved.
【學(xué)位授予單位】：南京大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類(lèi)號(hào)】：TN215;TN820

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