本文關(guān)鍵詞：量子點光子晶體激光器的理論研究與工藝制備　出處：《中國科學(xué)院長春光學(xué)精密機(jī)械與物理研究所》2016年博士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 光子晶體 量子點 速率方程 微納腔激光器 耦合陣列

【摘要】：光子晶體是一種材料折射率周期性變化的微結(jié)構(gòu),在該結(jié)構(gòu)中可以對光的傳播實現(xiàn)有效的控制。光子晶體納腔激光器因其具有超高的品質(zhì)因子(Q值)、亞波長量級的模式體積,以及易于集成等優(yōu)點,在近些年中受到了廣泛的關(guān)注和研究。以量子點作為增益材料介質(zhì)的光子晶體納腔激光器因其具有低閾值、低功耗、高速調(diào)制等特點,在片上集成、量子通訊、生物傳感等領(lǐng)域有著巨大的應(yīng)用前景。本文圍繞“量子點光子晶體激光器的理論研究與工藝制備”主題,在理論上對1.3-mm In As/Ga As量子點在光子晶體微腔中的載流子動力學(xué)、閾值以及調(diào)制響應(yīng)特性進(jìn)行了系統(tǒng)的研究,在實驗上對高Q值、低模式體積Ga As基二維光子晶體納腔制備中的關(guān)鍵問題展開了一系列研究工作,最后對于耦合納腔陣列進(jìn)行了研究討論。本論文的主要研究內(nèi)容和創(chuàng)新性如下:1.納腔效應(yīng)被首次引入到1.3-mm In As/Ga As量子點全路徑弛豫動力學(xué)方程中,考慮到高珀賽爾(Purcell)效應(yīng)下自發(fā)輻射因子的增大,光子壽命的提高,以及自發(fā)輻射壽命的降低等影響。通過計算得到:高品質(zhì)因子導(dǎo)致載流子基態(tài)占據(jù)幾率的降低,并且得到閾值對于品質(zhì)因子的非線性依賴關(guān)系;理論上在Q值等于2500時,得到大于100GHz的3d B調(diào)制帶寬;在Q值為7000時,傳輸損耗最低。2.對光子晶體結(jié)構(gòu)的色散關(guān)系的計算方法進(jìn)行了具體的介紹和分析,其中重點討論了平面波展開法和有限時域差分法。其中針有限時域差分法,我們對其邊界條件、激勵源的設(shè)置以及計算的穩(wěn)定性等進(jìn)行了詳細(xì)的研究。3.對光子晶體平板結(jié)構(gòu)的工藝制備過程的關(guān)鍵問題展開了系統(tǒng)的研究工作,主要包括電子束曝光工藝、ICP干法刻蝕工藝以及濕法腐蝕工藝。重點分析了電子束曝光過程中曝光劑量,束流的速度以及步長等對圖形的影響,同時對ICP干法刻蝕和濕法腐蝕工藝進(jìn)行了優(yōu)化,制備了具有良好形貌的光子晶體平板結(jié)構(gòu)。4.使用有限元差分法(FDTD)對光子晶體納腔結(jié)構(gòu)進(jìn)行優(yōu)化設(shè)計,制備了高Q值正六邊形耦合光子晶體陣列激光器。該結(jié)構(gòu)通過相鄰腔之間的倏逝波耦合,出現(xiàn)多個光學(xué)模式,通過對相鄰納腔之間的空氣孔的尺寸的調(diào)節(jié)(即光學(xué)勢壘),優(yōu)化出了最高的Q值,這種結(jié)構(gòu)對于解決耦合陣列會降低Q值的問題提供一個有效的方法。
[Abstract]:Photonic crystal is a kind of microstructure with periodic refractive index variation, in which the propagation of light can be controlled effectively. The photonic crystal nanoscale laser has high quality factor Q value. In recent years, the mode volume of sub-wavelength and the advantages of easy integration have received extensive attention and research. The photonic crystal nanoscale laser with quantum dots as the gain material has low threshold because of its low threshold. The characteristics of low power consumption and high speed modulation have great application prospects in the field of on-chip integration, quantum communication, biosensor and so on. This paper focuses on the topic of "theoretical research and fabrication of quantum dot photonic crystal lasers". The carrier dynamics, threshold and modulation response of 1.3-mm in As/Ga as quantum dots in photonic crystal microcavities are studied in theory. A series of research work has been carried out on the key issues in the fabrication of low mode volume GaAs based two-dimensional photonic crystals. Finally, the coupled nanocavity arrays are discussed. The main contents and innovations of this thesis are as follows: 1: 1.The effect of nanocavity is first introduced to 1.3-mm in As/Ga. In the full-path relaxation kinetic equation of as quantum dots. Considering the increase of spontaneous emission factor and the increase of photon lifetime due to the high Purcell effect. Through the calculation, it is found that the high quality factor leads to the decrease of the carrier ground state occupation probability, and the nonlinear dependence of the threshold value on the quality factor is obtained. Theoretically, when Q value is equal to 2500, a 3dB modulation bandwidth greater than 100GHz is obtained. When Q value is 7000, the transmission loss is the lowest. The calculation method of dispersion relation of photonic crystal structure is introduced and analyzed in detail. The plane wave expansion method and the finite-time-domain difference method, in which the needle-finite-time-domain difference method is discussed, and the boundary conditions of the finite time-domain difference method are discussed. The setting of excitation source and the stability of calculation are studied in detail. 3. The key problems in the fabrication process of photonic crystal flat structure are studied systematically, including electron beam exposure process. ICP dry etching process and wet etching process. The effects of exposure dose, beam velocity and step size on the pattern during electron beam exposure are analyzed. At the same time, the dry etching and wet etching processes of ICP were optimized. The photonic crystal plate structure with good morphology was prepared. The finite element difference method (FDTD) was used to optimize the design of photonic crystal nanocavity structure. A high Q-value hexagonal coupled photonic crystal array laser is fabricated. The structure is coupled by evanescent waves between adjacent cavities and many optical modes appear. The maximum Q value is optimized by adjusting the size of the air hole between adjacent nanocavities (i.e. optical barrier). This structure provides an effective method to solve the problem that the coupling array will reduce the Q value.
【學(xué)位授予單位】：中國科學(xué)院長春光學(xué)精密機(jī)械與物理研究所
【學(xué)位級別】：博士
【學(xué)位授予年份】：2016
【分類號】：TN248

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本文編號：1395534