本文關(guān)鍵詞：新型結(jié)構(gòu)的光纖的微壓傳感器的研究　出處：《南京師范大學(xué)》2016年博士論文　論文類型：學(xué)位論文

  更多相關(guān)文章： 光纖傳感 壓力傳感 法布里-珀羅干涉 角度拋磨光纖 SU-8光刻膠

【摘要】：光纖法布里-珀羅傳感器自上世紀(jì)八十年代開始發(fā)展,現(xiàn)已成為傳感領(lǐng)域一個研究熱點。此類傳感器結(jié)構(gòu)簡單、測量精度高、抗電磁干擾、化學(xué)性質(zhì)穩(wěn)定,且普遍體積小、質(zhì)量輕,便于集成傳感網(wǎng)絡(luò),能在狹窄空間和惡劣環(huán)境下正常工作,在工程建設(shè)中具有很大的應(yīng)用價值。微機(jī)電系統(tǒng)(MEMS)微細(xì)加工技術(shù)的發(fā)展為光纖法布里-珀羅(F-P)傳感器的制造提供了新的方法。本文提出了三種光纖法布里-珀羅微壓傳感器結(jié)構(gòu),制作過程中采用了近紫外光刻、磁控濺射鍍膜、硅片濕法腐蝕、陽極鍵合等多項MEMS工藝。設(shè)計并制作了基于45度光纖的法布里-珀羅波紋膜微壓傳感器,獲得了較高的傳感靈敏度。該傳感器采用金屬波紋膜作為敏感元件,其與厚度相同的無波紋膜片相比,在同等壓力下的形變量更大。借助仿真軟件對波紋膜的波紋寬度、波紋高度、波紋間距等參數(shù)進(jìn)行了優(yōu)化。制作完成的傳感器在0～0.1MPa范圍內(nèi)靈敏度達(dá)到705.6μm/MPa。設(shè)計采用MEMS工藝,通過SU-8膠兩次光刻制作光纖槽,一方面便于光纖的固定,另一方面可以通過控制勻膠速度來控制膠層厚度,從而控制F-P腔腔長。經(jīng)實驗測試,該傳感器的線性度高、重復(fù)性好、遲滯誤差小。利用傳感器溫度特性穩(wěn)定,腔長隨溫度變化呈線性的特點,對傳感器進(jìn)行了粗略的溫度補(bǔ)償。設(shè)計并制作了基于45度光纖的復(fù)合法布里-珀羅干涉腔微壓傳感器,實現(xiàn)了溫度補(bǔ)償。該傳感器利用了45度光纖結(jié)構(gòu)在傳感頭中形成三個反射面,分別是光纖的纖芯包層分界面、光纖側(cè)壁和硅敏感膜。前兩者組成第一個F-P干涉腔,腔長僅隨溫度變化；后兩者組成第二個F-P干涉腔,腔長隨著外界壓力和溫度的變化一起發(fā)生變化。在外界溫度變化較大時,可以利用兩個腔長的變化關(guān)系進(jìn)行溫度補(bǔ)償,補(bǔ)償效果明顯。實驗表明,該傳感器在0～0.1MPa范圍內(nèi)的靈敏度為60.9μm/MPa,遲滯誤差小,線性度好。設(shè)計并制作了基于光纖法蘭盤結(jié)構(gòu)的法布里-珀羅微壓傳感器。該傳感器結(jié)構(gòu)簡單,價格低廉,工作穩(wěn)定。設(shè)計采用硅膜-玻璃環(huán)-光纖結(jié)構(gòu),利用了商業(yè)法蘭盤和跳線,可以直接進(jìn)行光線的固定與對準(zhǔn)。玻璃環(huán)進(jìn)行了嚴(yán)格的拋光處理,通過陽極鍵合與硅敏感膜連接在一起,保證了裝置的氣密性。F-P干涉腔的腔長可以由玻璃環(huán)的長度唯一確定并精確控制,同時玻璃環(huán)保證了敏感膜與光纖端面的平行。在0～0.1MPa范圍內(nèi),傳感器靈敏度為61.9μm/MPa,與我課題組之前的研究成果相比靈敏度提升了一個數(shù)量級。傳感器重復(fù)性好,機(jī)械強(qiáng)度高,制作成本低廉。
[Abstract]:Fiber Fabri Perot sensor since the last century began to develop in 80s, has become a hot research field. This kind of sensor sensor has the advantages of simple structure, high precision, anti electromagnetic interference, stable chemical properties, and generally small size, light weight, easy integration of sensor network, can work normally in the narrow space and harsh environment, with great application value in engineering construction. Microelectromechanical system (MEMS) development of micro machining technology for fiber Fabri Perot (F-P) provides a new method for the fabrication of sensors. This paper presents three kinds of optical fiber Fabri Perot micro pressure sensor structure, production process using near UV lithography, magnetron sputter coating, silicon wet etching, anodic bonding and other MEMS technology. The design and fabrication of 45 fiber Fabri Perot corrugated membrane based micro pressure sensor, the higher the sensitivity. The sensor uses corrugated metal film as the sensitive element, the corrugated diaphragm and the thickness of the same than in the same pressure form a more variable. By the simulation software of the corrugated corrugated membrane width, wave height, wave spacing and other parameters were optimized. The sensor made of sensitivity in the range of 0 ~ 0.1MPa to 705.6 m/MPa. design using MEMS technology, the SU-8 gel two times lithography fiber slot, one hand to facilitate the fixation of the optical fiber, on the other hand can control the spin speed to control the layer thickness, so as to control the F-P cavity length. After testing, the sensor has high linearity, repeatability, hysteresis error is small. The temperature characteristic of the sensor is stable, the cavity length is linear temperature change characteristics of temperature compensation sensor is designed and fabricated. The rough composite Fabri 45 degree fiber Perot interference cavity based on micro pressure Sensor to realize the temperature compensation. The sensor uses 45 optical fiber structure is formed of three reflecting surfaces in the sensing head, which is the core of the fiber cladding interface, fiber wall and silicon sensitive film. The composition of the first F-P interference cavity, the cavity length only with the temperature change; two second F-P interference cavity, cavity length with the change of external temperature and pressure changes in the outside world. With large temperature changes, can be used for temperature compensation of two cavity length variation, obvious compensation effect. Experimental results show that the sensor sensitivity in 0 ~ 0.1MPa range is 60.9 m/MPa, the hysteresis error is small. Good linearity. The design and fabrication of the fiber flange structure Fabri Perot based on micro pressure sensor. The sensor has the advantages of simple structure, low price, stable design using silicon film - glass fiber ring structure, the use of commercial flange and Jumper, can direct light and fixed alignment. The glass ring of the polished strictly, and silicon sensitive film are connected together by anodic bonding, ensure the tightness of the.F-P device interference cavity length can be made of glass ring length is only determined and precise control, at the same time the environmental sensitive film glass and the fiber end is parallel. In the range of 0 ~ 0.1MPa, the sensitivity of the sensor is 61.9 m/MPa, compared with the results of my research group before study sensitivity is improved by one order of magnitude. The sensor has good repeatability, high mechanical strength, low production cost.

【學(xué)位授予單位】：南京師范大學(xué)
【學(xué)位級別】：博士
【學(xué)位授予年份】：2016
【分類號】：TP212

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