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基于壓敏硅橡膠的柔性壓力傳感器及其陣列的研究

發(fā)布時(shí)間:2018-01-04 13:17

  本文關(guān)鍵詞:基于壓敏硅橡膠的柔性壓力傳感器及其陣列的研究 出處:《吉林大學(xué)》2016年博士論文 論文類型:學(xué)位論文


  更多相關(guān)文章: 壓敏導(dǎo)電橡膠 交流 壓敏陣列 壓力檢測系統(tǒng)


【摘要】:柔性壓力傳感器是一種用于感知某些物體表面作用力大小的柔性電子器件,能貼附于各種不規(guī)則表面,在醫(yī)療健康、機(jī)器人、生物力學(xué)等領(lǐng)域有著廣泛的應(yīng)用前景,逐漸受到人們的重視。針對目前柔性壓力傳感器未能解決的兼具柔韌性和準(zhǔn)確測量壓力分布信息的難題,本論文進(jìn)行了傳感材料、單元傳感器件、傳感陣列及其自動感知分析系統(tǒng)等多方面的創(chuàng)新研究。具體研究內(nèi)容和創(chuàng)新點(diǎn)如下:1.通過炭黑摻雜有機(jī)硅橡膠,制作壓敏材料。研究炭黑/硅橡膠復(fù)合材料所需材料的性能、配方、制備方法以及其在直流電場和交流電場作用下的壓敏特性。通過研究不同交流頻率下炭黑/硅橡膠復(fù)合材料表面壓敏特性,得出器件的最優(yōu)化頻率為1 K Hz,建立微觀機(jī)理模型,探索壓敏復(fù)合材料的壓敏機(jī)理,同時(shí)指出基于交流電場的研究對炭黑/硅橡膠壓敏材料的重大意義。2.研究不同質(zhì)量分?jǐn)?shù)的CB粒子填充硅橡膠復(fù)合材料,找到最優(yōu)化摻雜濃度2.5%,獲得了較好靈敏度的器件;當(dāng)外界壓力0-20 N(0-0.4 M Pa)時(shí),傳感器顯示正壓阻效應(yīng);傳感器的響應(yīng)時(shí)間和恢復(fù)時(shí)間都少于3 s;與當(dāng)前文獻(xiàn)中導(dǎo)電復(fù)合材料相比,具有較高靈敏度;同時(shí)對傳感器的敏感機(jī)理進(jìn)行探索。3.設(shè)計(jì)了一種基于柔性襯底和柔性壓敏材料的壓力傳感器陣列。該4×4的柔性陣列尺寸為2.5 cm×2.5cm×0.8 mm,襯底是用光刻工藝制備的PET-ITO柔性基板,壓敏材料為導(dǎo)電橡膠(CSA57-7RSC PCR Technical)。實(shí)驗(yàn)證明,該全柔性壓力傳感陣列在0-4 N(0-0.32 M Pa)的負(fù)載下呈現(xiàn)負(fù)壓阻效應(yīng),具有高的靈敏度和快的響應(yīng)恢復(fù)特性。該壓力傳感陣列傳感單元間自帶串?dāng)_隔離功能。為了準(zhǔn)確測知所感應(yīng)到的力的大小和方位,設(shè)計(jì)和制作了該柔性傳感陣列的檢測電路,采樣數(shù)據(jù)最后通過Lab VIEW分析處理并顯示,初步測試了傳感陣列的基本性能參數(shù)。實(shí)驗(yàn)結(jié)果表明:該陣列可實(shí)現(xiàn)壓力分布的實(shí)時(shí)測量。該傳感陣列性能穩(wěn)定,制作成本低且適用于大面積制作,可應(yīng)用于智能機(jī)器人手等相關(guān)領(lǐng)域。
[Abstract]:Flexible pressure sensor is a kind of flexible electronic device which can be used to perceive the force on the surface of some objects. It can be attached to various irregular surfaces, in medical care and health, robot. Biomechanics and other fields have a wide range of application prospects, gradually attracted attention. At present, flexible pressure sensor can not solve the problem of flexibility and accurate measurement of pressure distribution information. In this paper, the sensing materials, unit sensing devices, sensor arrays and their automatic sensing analysis system are studied. The specific research contents and innovations are as follows: 1. Through the carbon black doped silicone rubber. Make pressure sensitive material. Study the properties and formula of carbon black / silicone rubber composite material. The method of preparation and the pressure sensitive characteristics of carbon black / silicone rubber composites under the action of DC and AC electric field were studied by studying the surface pressure sensitivity characteristics of carbon black / silicone rubber composites at different AC frequencies. The optimum frequency of the device is 1 K Hz. The micro mechanism model is established and the pressure sensitive mechanism of the pressure sensitive composite is explored. At the same time, it is pointed out that the research based on AC electric field is of great significance to carbon black / silicone rubber varistor materials. 2. To study CB particles filled with silicone rubber composites with different mass fraction, the optimum doping concentration is found to be 2.5%. The device with good sensitivity is obtained. The sensor shows positive piezoresistive effect when the external pressure is 0-20 Nu 0-0.4 MPA. The response time and recovery time of the sensor are less than 3 s; Compared with the conductive composites in the current literature, the composites have higher sensitivity. At the same time, the sensitivity mechanism of the sensor is explored. 3. A pressure sensor array based on flexible substrate and flexible pressure sensor material is designed. The size of the 4 脳 4 flexible sensor array is 2.5. Cm 脳 2.5cm 脳 0.8 mm. The substrate is a PET-ITO flexible substrate prepared by photolithography. The pressure sensitive material is conductive rubber CSA57-7RSC PCR technique. The fully flexible pressure sensing array exhibits a negative piezoresistive effect under the loading of 0-4 Nu 0-0.32 M Pa. It has high sensitivity and fast response recovery characteristics. The pressure sensor array sensor unit has its own crosstalk isolation function. In order to accurately determine the magnitude and orientation of the sensing force. The detection circuit of the flexible sensor array is designed and fabricated, and the sampling data is analyzed and displayed by Lab VIEW. The experimental results show that the sensor array can be used to measure the pressure distribution in real time. The sensor array is stable in performance, low in cost and suitable for large area fabrication. It can be applied to intelligent robot hand and other related fields.
【學(xué)位授予單位】:吉林大學(xué)
【學(xué)位級別】:博士
【學(xué)位授予年份】:2016
【分類號】:TP212

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