【摘要】：高密度等離子體/離子束流在等離子體材料制備和表面處理等方面有著廣泛的應(yīng)用。放電模式和放電條件決定了束流的特性,而束流的特性是其實(shí)現(xiàn)工業(yè)應(yīng)用的關(guān)鍵。研究等離子體束流的動(dòng)力學(xué)特征,對(duì)于理解等離子體上藝的機(jī)制以及優(yōu)化工藝參數(shù)都有著重要意義。本論文開展了基于ECR和ICP兩種放電的等離子體束/離子束的特性研究,進(jìn)行了束流在材料制造方面的初步應(yīng)用探索。針對(duì)ECR放電,采用多種氣體放電形成等離子體束和離子束,著重研究了這些束流的離子特性,并開展了ECR等離子體/離子束與材料相互作用的研究工作。首先,利用等離子體質(zhì)量能量分析儀EQP對(duì)ECR氮?dú)寤旌系入x子體的離子成分和能量分布函數(shù)進(jìn)行了診斷。當(dāng)改變氣體配比、放電功率和氣壓時(shí),兩種主要離子Ar+和N2+的離子能量分布會(huì)產(chǎn)生復(fù)雜變化：離子的峰形在單峰、雙峰、三峰之間相互轉(zhuǎn)變,且對(duì)于Ar+和N2+不盡相同,同時(shí)離子峰的位置將產(chǎn)生偏移。這種復(fù)雜變化主要由ECR特殊結(jié)構(gòu)引起的分布式電離以及粒子間電荷交換作用導(dǎo)致,同時(shí)與單雙原子的分子結(jié)構(gòu)有關(guān)。比較了ECR氫等離子體束和離子束中的離子成分和能量分布情況。兩種束流中均含有H+、H2+和H3+三種離子,但是相對(duì)含量不同：在氫等離子體中H2+最多而在氫離子束中H3+為主要成分。功率的增加和引出偏壓的提高會(huì)分別使等離子體束和離子束中離子特性發(fā)生改變：各離子相對(duì)濃度均會(huì)發(fā)生變化,同時(shí)離子能量分布展寬變寬,并且高能部分離子數(shù)都相對(duì)增加,這和離子間的相互轉(zhuǎn)化以及空間電場(chǎng)的加速過程有關(guān)。利用ECR氬離子束對(duì)鎢材料進(jìn)行了輻照實(shí)驗(yàn),并研究了引出偏壓、輻照時(shí)間、基底溫度、離子束入射角度等參數(shù)對(duì)于輻照結(jié)果的影響。經(jīng)過輻照后,在掃描電鏡下可觀察到鎢表面出現(xiàn)了不同程度的凹凸,表明該離子束與鎢材料相互作用方式基本為物理濺射：離子轟擊能量、轟擊時(shí)間的增加會(huì)加劇凹凸程度；基底溫度則基本不影響輻照效果：在離子束垂直入射材料表面時(shí)濺射作用最為明顯。利用ECR氮?dú)宓入x子體束進(jìn)行了制備氮化鐵磁性薄膜材料的可行性實(shí)驗(yàn)。實(shí)驗(yàn)中發(fā)現(xiàn),純氮?dú)鈼l件下和濺射靶偏壓較低時(shí)都未能成功制備氮化鐵薄膜。這是因?yàn)樵右驗(yàn)R射作用脫離靶材進(jìn)入氣相環(huán)境的過程與離子的轟擊能量相關(guān),離子能量不足時(shí),較低的濺射產(chǎn)額不足以在基底上形成膜材料。而加入一定比例氬氣進(jìn)行混合放電以及提高靶偏壓均能加強(qiáng)離子的轟擊效應(yīng),從而提高了單位時(shí)間的濺射產(chǎn)額,成功制備出薄膜材料。XRD和磁光克爾效應(yīng)表明,所獲得的薄膜材料為多種相結(jié)構(gòu)的鐵氮化合物,具有良好的鐵磁性。針對(duì)ICP放電,設(shè)計(jì)了一套大氣壓甚高頻ICP微等離子體射流產(chǎn)生裝置,研究了這種射流的放電特性,并初步開展了射流與材料相互作用的應(yīng)用研究。利用該裝置,在功率為90W的條件下得到了長(zhǎng)度近3cm寬近3mm的溫?zé)岬入x子體射流。氣流量的增加會(huì)使射流呈現(xiàn)層流到湍流的轉(zhuǎn)變,長(zhǎng)度先增后減：而功率對(duì)于射流長(zhǎng)度的影響存在著一個(gè)上限,當(dāng)饋入等離子體的能量與等離子體擴(kuò)散損失的能量達(dá)到平衡時(shí)射流最長(zhǎng)。通過二次點(diǎn)火分別得到了接近于室溫和溫度達(dá)幾百度的兩種不同的等離子體狀態(tài)。這種狀態(tài)變化同時(shí)伴隨著等離子體形態(tài)、射流長(zhǎng)度、線圈電流以及電源功率的變化,表明等離子體發(fā)生了E-H的放電模式轉(zhuǎn)變,這是由于二次點(diǎn)火導(dǎo)致了等離子體瞬間阻抗的變化。阻抗的變化導(dǎo)致了等離子體密度的驟變,并進(jìn)一步引起了功率吸收效率的改變。進(jìn)行了ICP微等離子體射流在微尺寸銅金屬快速成形技術(shù)中的初步應(yīng)用研究,得到了球冠狀和柱狀銅金屬件。在SEM下觀察到沉積物表面顆粒尺寸遠(yuǎn)小于銅粉顆粒,表明銅粉被充分熔融。XRD結(jié)果顯示沉積物表面存在較弱的Cu2+1O峰,這是由于沉積過程中周圍空氣的卷入導(dǎo)致沉積物出現(xiàn)微弱氧化。
[Abstract]:High density plasma/ion beam is widely used in plasma material preparation and surface treatment. The discharge mode and conditions determine the characteristics of the beam, and the characteristics of the beam are the key to its industrial application. In this paper, the characteristics of plasma beam/ion beam based on ECR and ICP discharges are studied, and the preliminary application of beam in material manufacturing is explored. First of all, the ionic composition and energy distribution function of ECR nitrogen-argon hybrid plasma are diagnosed by using plasma mass and energy analyzer EQP. When the gas ratio, discharge power and pressure are changed, the ionic energy of the two main ions Ar + and N2 + is determined. Complex variations in the distribution of quantities occur: the shape of the peaks of ions changes from one peak to two, and from one to three, and the positions of the peaks are different for Ar + and N2 +, while the positions of the peaks are offset. The ion composition and energy distribution in the ECR hydrogen plasma beam and ion beam are compared. Both beams contain H +, H2 + and H3 + ions, but the relative contents are different: H2 + is the most in the hydrogen plasma and H3 + is the main component in the hydrogen ion beam. The increase of power and the increase of the extraction bias will cause the plasma deviation, respectively. Ion properties in daughter and ion beams change: the relative concentration of ions changes, and the energy distribution of ions broadens, and the number of high energy ions increases. This is related to the mutual transformation between ions and the acceleration of space electric field. The effects of extraction bias, irradiation time, substrate temperature and incident angle of ion beam on the irradiation results were studied. After irradiation, the concave and convex surface of tungsten was observed under scanning electron microscope. The results show that the interaction mode between ion beam and tungsten material is basically physical sputtering: ion bombardment energy, bombardment time. The increase of substrate temperature has little effect on the irradiation effect: the sputtering effect is most obvious when the ion beam is perpendicular to the surface of the material. FeN thin films can be successfully prepared. This is because the atom escape from the target and enter the gas environment due to sputtering is related to the ion bombardment energy. When the ion energy is insufficient, the lower sputtering yield is insufficient to form the film material on the substrate. XRD and magneto-optic Kerr effect show that the obtained thin films are ferro-nitrogen compounds with various phase structures and have good ferromagnetism. A set of very high frequency ICP microplasma jet generator at atmospheric pressure is designed for ICP discharge. The discharge characteristics of the jet and the application of the interaction between the jet and the material were studied preliminarily. Using this device, a warm plasma jet with a length of nearly 3 cm and a width of nearly 3 mm was obtained under the condition of 90 W. The increase of the flow rate will make the jet change from laminar flow to turbulent flow. The length of the jet increases first and then decreases. There is an upper limit on the effect of the plasma on the plasma. The jet is the longest when the energy fed into the plasma is in equilibrium with the energy lost by the plasma diffusion. The change of coil current and power supply indicates that the E-H discharge mode of the plasma changes, which is caused by the change of instantaneous plasma impedance caused by the secondary ignition. The change of impedance leads to the sudden change of plasma density and further changes of power absorption efficiency. Spherical coronal and columnar copper parts were obtained by preliminary application of rapid prototyping technology for cu-in-cu metals. Particle sizes on the surface of deposits were observed to be much smaller than those of copper powders under SEM, indicating that copper powders were fully melted. XRD results showed that there was a weak Cu2+1O peak on the surface of deposits, which was caused by the entrainment of ambient air during deposition. Weak oxidation occurs in sediments.
【學(xué)位授予單位】：中國(guó)科學(xué)技術(shù)大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：O53

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