基于表面等離激元的低損耗半導(dǎo)體納米激光器研究
本文選題:表面等離激元激光器 + 納米激光器 ; 參考:《哈爾濱工業(yè)大學(xué)》2017年博士論文
【摘要】:小型化是激光器技術(shù)發(fā)展的必然要求,對光學(xué)元件的集成化起著關(guān)鍵作用;诒砻娴入x激元的半導(dǎo)體納米激光器是一種具有超快動力學(xué)特性的深亞波長納米尺度相干光源,被稱為世界上最小的激光器,是目前激光器克服衍射極限,實(shí)現(xiàn)小型化最有效的技術(shù)方法。這種激光器能夠以前所未有的分辨能力和超快物理作用在納米尺度下實(shí)現(xiàn)光學(xué)相互作用,不僅有助于在更小的尺度下研究光和物質(zhì)的相互作用,為新科學(xué)發(fā)現(xiàn)提供技術(shù)支撐,同時(shí)在光學(xué)集成、高靈敏度生物探測等領(lǐng)域有著廣闊的應(yīng)用前景。然而目前在表面等離激元激光器研究領(lǐng)域仍存在以下兩個(gè)主要問題:首先,高質(zhì)量金屬薄膜制備理論及工藝不完善導(dǎo)致金屬所帶來的損耗過高,影響表面等離激元激光器的閾值性能;其次,由無機(jī)或有機(jī)增益材料構(gòu)成的表面等離激元激光器閾值仍然較高。這兩個(gè)問題嚴(yán)重限制了表面等離激元激光器的實(shí)際應(yīng)用。本文“基于表面等離激元的低損耗半導(dǎo)體納米激光器研究”針對上述兩個(gè)問題開展了理論分析和實(shí)驗(yàn)研究,力圖為表面等離激元激光器的實(shí)際應(yīng)用奠定技術(shù)基礎(chǔ)。本文的研究成果進(jìn)一步豐富了表面等離激元激光器的理論體系,為表面等離激元激光器的性能提升提供了技術(shù)儲備,在非線性光學(xué)、超分辨探測、亞波長光子集成等領(lǐng)域具有重要的應(yīng)用價(jià)值。本文的主要研究內(nèi)容包括:1.在前人的基礎(chǔ)上,開展了表面等離激元激光器的理論研究。采用有限元方法分析了表面等離激元激光器的超強(qiáng)模式約束特性;討論了表面等離激元激光器的自發(fā)輻射增強(qiáng)特性及其對激光行為的影響;研究了表面等離激元激光器的動力學(xué)過程;研究了表面等離激元激光器的損耗特性。以上研究為表面等離激元激光器的制備、實(shí)驗(yàn)表征及性能優(yōu)化提供了理論指導(dǎo)。2.從降低諧振腔損耗的角度出發(fā),對金屬薄膜的制備理論及工藝進(jìn)行了深入研究。以銀薄膜制備為研究主體,研究在不同沉積工藝條件下銀薄膜的生長過程。以一種簡單的低成本工藝實(shí)現(xiàn)了銀薄膜的外延生長,獲得了具有大面積超光滑表面的單晶銀薄膜,在介電性能及表面平整度兩個(gè)方面同時(shí)獲得了接近理想狀態(tài)的金屬薄膜。分別采用單晶銀薄膜,模板剝離銀薄膜及常規(guī)熱蒸發(fā)銀薄膜研究了金屬薄膜質(zhì)量對Zn O納米線表面等離激元激光器性能的影響。結(jié)果表明單晶銀薄膜有效提升了表面等離激元激光器的閾值性能。針對實(shí)驗(yàn)結(jié)果,進(jìn)行了諧振腔損耗及材料損耗的補(bǔ)償分析,結(jié)果表明材料損耗是限制激光器閾值降低的主要因素。3.從降低材料損耗的角度出發(fā),通過研究光學(xué)轉(zhuǎn)換效率更高的增益材料,提出采用有機(jī)-無機(jī)雜化型鈣鈦礦材料作為增益半導(dǎo)體充分補(bǔ)償器件中的損耗,實(shí)現(xiàn)室溫條件下低閾值激射的表面等離激元激光器。采用改進(jìn)的低成本低溫溶液合成法制備了高質(zhì)量單晶CH3NH3Pb I3納米線,所制備的納米線具有良好的幾何形貌和優(yōu)秀的光學(xué)性質(zhì)。制備了基于鈣鈦礦納米線的表面等離激元激光器,光學(xué)實(shí)驗(yàn)表征結(jié)果表明該納米激光器在室溫條件下可實(shí)現(xiàn)低閾值激射,最低閾值為13.5μJ cm-2,并且具有超快動力學(xué)特性,該激光器的最高工作溫度可達(dá)43.6℃。
[Abstract]:Miniaturization is an inevitable requirement for the development of laser technology and plays a key role in the integration of optical elements. Semiconductor nanoscale based on surface plasmons is a kind of deep sub wavelength coherent light source with super fast dynamic characteristics, which is called the smallest laser in the world. It is the present laser to overcome the diffraction limit, and it is true that the laser can overcome the diffraction limit. The most effective technique is miniaturization. This laser can achieve optical interaction at nanoscale with unprecedented resolution and ultrafast physical action. It not only helps to study the interaction of light and matter at a smaller scale, and provides technical support for new scientific discoveries, while in optical integration, highly sensitive organisms. There are two major problems in the field of surface plasmon lasers. However, there are still two main problems in the field of surface plasmon lasers: first, high quality metal film preparation theory and process are not perfect, which lead to high loss of metal and influence the threshold performance of surface plasmon lasers; secondly, inorganic or there are The threshold of the surface plasmon laser formed by the machine gain material is still high. These two problems seriously restrict the practical application of the surface plasmon laser. This paper "study on low loss semiconductor nanoscale laser based on the surface plasmon polaritons" has carried out theoretical analysis and Experimental Research on the above two problems, trying to be the surface of the surface. The research results of this paper enrich the theoretical system of the surface plasmon laser and provide the technical reserve for the performance enhancement of the surface plasmon laser. It has important application value in the field of nonlinear optics, super-resolution detection, Ya Bo long light integration and so on. The main contents of this paper are as follows: 1. on the basis of the predecessors, the theoretical study of the surface plasmon laser is carried out. The ultra strong mode constraint characteristics of the surface plasmon laser are analyzed by the finite element method, and the spontaneous radiation intensifying characteristics of the surface plasmon laser and the effect on the laser behavior are discussed. The dynamic process of a surface plasmon laser and the loss characteristics of a surface plasmon laser are studied. The above study provides a theoretical guide for the preparation, characterization and performance optimization of a surface plasmon laser..2. is deeply studied on the theory and technology of the preparation of the gold film from the angle of reducing the loss of the resonator. The growth process of silver film under different deposition conditions was studied with silver film preparation as the main body. The epitaxial growth of silver film was realized by a simple low cost process, and a single crystal silver film with large area super smooth surface was obtained. The dielectric properties and surface roughness were obtained near ideal shape at the same time in two aspects. The effects of the mass of the metal film on the performance of the Zn O nanowire laser are investigated by using single crystal silver film, the template peeling silver film and the conventional hot evaporating silver film. The results show that the single crystal silver film improves the threshold performance of the surface plasmon laser effectively. The compensation analysis of cavity loss and material loss shows that material loss is the main factor restricting the reduction of laser threshold value.3. from the angle of reducing material loss. By studying the gain material with higher optical conversion efficiency, organic inorganic hybrid perovskite material is proposed as a full compensation device for gain semiconductor. A high quality single crystal CH3NH3Pb I3 nanowire is prepared by an improved low cost low temperature solution synthesis method. The nanowires have good geometrical morphology and excellent optical properties. The surface plasmon laser based on the perovskite nanowire is prepared. The optical experimental results show that the nanoscale laser can achieve low threshold lasing at room temperature. The minimum threshold value is 13.5 J cm-2, and the laser has super fast dynamic characteristics, and the maximum working temperature of the laser can reach 43.6.
【學(xué)位授予單位】:哈爾濱工業(yè)大學(xué)
【學(xué)位級別】:博士
【學(xué)位授予年份】:2017
【分類號】:TN248
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