發(fā)布時(shí)間：2018-03-15 06:25

  本文選題：整形飛秒激光　切入點(diǎn)：精密加工　出處：《吉林大學(xué)》2016年博士論文　論文類型：學(xué)位論文

【摘要】：飛秒激光對(duì)材料的超精細(xì)加工是飛秒激光技術(shù)在材料加工領(lǐng)域的一個(gè)重要應(yīng)用。飛秒激光超精細(xì)微加工與先進(jìn)的器件制造技術(shù)緊密相關(guān),對(duì)國防、醫(yī)療和工業(yè)加工等領(lǐng)域的發(fā)展起到了直接的推動(dòng)作用。飛秒激光對(duì)不同材料的微加工過程,其物理機(jī)制研究涉及到原子分子物理、材料科學(xué)和等離子體物理等不同學(xué)科的交叉。因而研究飛秒激光對(duì)不同材料的微加工過程不僅對(duì)其物理機(jī)制的理解具有重大的意義,而且對(duì)材料的微加工應(yīng)用也有指導(dǎo)作用。通過發(fā)展新的激光操控手段(飛秒激光整形技術(shù)),并研究整形激光對(duì)不同材料的微加工過程,有助于增加人們對(duì)材料加工過程的理解,同時(shí)也有助于發(fā)展新的微加工手段,提高材料微加工的精度和速度�；趯�(duì)激光聚變靶材微孔加工的應(yīng)用需求,本論文將飛秒激光脈沖整形技術(shù)應(yīng)用于不同材料的精密微加工,對(duì)飛秒激光雙脈沖和整形激光脈沖作用下金屬材料、碳?xì)渚酆衔锊牧媳∧ひ约疤細(xì)渚酆衔锊牧衔⑶虻臒g機(jī)制和微孔加工精度進(jìn)行了大量的研究。論文的主要內(nèi)容包括:利用飛秒激光雙脈沖研究了金屬鋁和銅的鉆孔過程。通過分析鉆透樣品的透射光信號(hào)和微孔形貌圖,詳細(xì)討論了鋁和銅在飛秒激光作用下的燒蝕機(jī)制。通過對(duì)兩種金屬的燒蝕形貌觀測,發(fā)現(xiàn)孔直徑隨著雙脈沖延遲時(shí)間增加而減小,鉆孔速度隨著延遲時(shí)間增加而變慢。在短延遲時(shí)間內(nèi)在孔周圍有大顆粒的沉積物,而在長延遲時(shí)間內(nèi)在孔周圍只有細(xì)小的沉積物。研究發(fā)現(xiàn)等離子體的屏蔽作用在孔的形成和納米顆粒產(chǎn)生都有重要作用,同時(shí)還發(fā)現(xiàn)在鋁的鉆孔過程中氧化物的形成也會(huì)對(duì)燒蝕產(chǎn)生影響。通過改變整形飛秒激光脈沖形狀、激光重復(fù)頻率、激光偏振、激光能量通量和激光焦點(diǎn)距樣品表面位置等實(shí)驗(yàn)條件對(duì)金屬銅箔進(jìn)行了鉆孔研究。我們測量了不同實(shí)驗(yàn)條件下激光的透射信號(hào)和銅箔的燒蝕形貌,探究了金屬材料的燒蝕機(jī)制,并最終獲得了實(shí)現(xiàn)高質(zhì)量圓微孔的微加工技術(shù)。研究發(fā)現(xiàn),利用脈沖間隔td=0.6 ps的五脈沖序列鉆孔可以獲得較少噴濺物的微孔,高重復(fù)頻率的激光脈沖作用可以減小噴濺物的顆粒尺寸,圓偏振激光脈沖鉆孔可以獲得圓度很好的微孔。通過反復(fù)優(yōu)化實(shí)驗(yàn)條件,可以獲得尺寸小、圓而且入口和出口尺寸接近并且孔周圍無明顯噴濺物的微孔。在整形飛秒激光脈沖燒蝕輝光放電聚合物平面薄膜的研究中,我們發(fā)現(xiàn)激光的脈沖形狀對(duì)聚合物材料的燒蝕效率和精度有非常重要的影響,利用整形脈沖可以提高薄膜的加工效率和精度。研究還發(fā)現(xiàn)在真空環(huán)境下加工可以得到無明顯噴濺物的微孔。材料加工效率和精度與激光的焦點(diǎn)位置也有著非常重要的關(guān)系,當(dāng)激光先聚焦后作用在樣品表面時(shí)會(huì)得到“小”而“圓”的微孔。通過在實(shí)驗(yàn)中選擇合適的焦點(diǎn)位置,可以極大程度的優(yōu)化燒蝕效率并得到高精度的微孔。我們采用膜加玻璃基底的組合方法來模擬聚合物材料微球的前表面和內(nèi)表面;通過對(duì)燒蝕之后的基底進(jìn)行表征,成功的模擬了燒蝕過程中微球內(nèi)部噴濺物的產(chǎn)生情況,并且獲得了微球內(nèi)壁無損傷的加工條件。通過對(duì)燒蝕后的基底進(jìn)行表征,發(fā)現(xiàn)在真空度為2.5 Pa和激光能量為6.0μJ時(shí)利用多個(gè)子脈沖組成的脈沖序列鉆孔,不僅可以減少在微孔加工過程中向微球內(nèi)壁的噴濺物而且可以減小激光對(duì)微球內(nèi)壁的加工熱影響區(qū)域,并獲得了高質(zhì)量微孔。當(dāng)激光能量降低到4.0μJ時(shí),已經(jīng)完全觀察不到激光對(duì)基底的燒蝕痕跡。所以用此能量進(jìn)行微孔加工可以得到更高質(zhì)量的微孔,從而不影響微球在激光聚變中的進(jìn)一步應(yīng)用。在整形飛秒激光脈沖對(duì)聚合物材料微球的微孔加工中,我們建立了微球空間定位技術(shù),確保激光的入射方向嚴(yán)格垂直于球表面、通過球心。在此基礎(chǔ)上,我們進(jìn)行了整形飛秒激光對(duì)不同壁厚微球的燒蝕鉆孔研究。發(fā)現(xiàn)鉆透不同厚度的樣品所需要的最低能量不同。隨著鉆孔深度的增加,激光在孔內(nèi)傳遞過程發(fā)生的反射、折射和散射等過程,激光傳遞到孔底部進(jìn)行燒蝕的激光能量降低,導(dǎo)致鉆透越厚的微球所需激光能量越高。我們成功的實(shí)現(xiàn)了微球上高質(zhì)量的微孔加工,研究還發(fā)現(xiàn)利用整形激光脈沖可以大大提高微球的加工精度,通過飛秒激光整形技術(shù)可以實(shí)現(xiàn)對(duì)微球的超精細(xì)加工,制備可用于實(shí)際應(yīng)用的微球靶。以上的研究表明,飛秒激光脈沖整形技術(shù)應(yīng)用于材料的微加工,增加了加工過程的操控手段,可以根據(jù)實(shí)際需要設(shè)計(jì)出合適的整形激光以獲得最好的加工條件,從而大大提高材料的加工精度。因而,飛秒激光整形技術(shù)可以被廣泛的應(yīng)用于不同材料的微加工應(yīng)用和研究中。
[Abstract]:The ultra fine processing of femtosecond laser materials is an important application of femtosecond laser technology in the field of material processing. Femtosecond laser micro machining and advanced device manufacturing technology is closely related to the development of national defense, medical and industrial processing and other fields has played a direct role in promoting. Femtosecond laser micro processing of different materials Study on the process, the physical mechanisms involved in atomic and molecular physics, plasma physics and material science across different disciplines. Therefore not only on the physical understanding of the mechanism is of great significance to research on femtosecond laser micro machining process for different materials, but also has a guiding role for micromachining applications materials. Through the development of new laser manipulation (the femtosecond laser shaping technology), and Research on different materials of plastic laser micro machining process, help to increase our understanding of the material processing, at the same time Can also contribute to the development of new micro machining tools, improve micro machining accuracy and speed. The application requirement of laser fusion targets based on micro processing, the application of femtosecond laser pulse shaping technology in different materials precision micro machining, the femtosecond double pulses and shaping laser pulses of metal material, hydrocarbon the polymer film and polymer microsphere hydrocarbon ablation mechanism and micro hole machining precision was studied. The main contents of this paper include: femtosecond double pulses of drilling metal aluminum and copper process. Through the analysis of drilling using optical signal transmission and microporous morphology through the sample, the ablation mechanism of aluminum and copper in effect femtosecond laser is discussed in detail. The ablation morphology observation of two kinds of metal, found the hole diameter with double pulse delay time decreases with the extension of drilling speed Late time increased slowly. There are large particles of sediment in a short time delay inherent around the hole in the long delay time, the inner holes around the small sediment. The study found that the shielding effect of the plasma at the pore formation and nano particles have an important role, but also it formed in the drilling process of aluminum oxide will have an impact on the shaping of femtosecond laser ablation. By changing the shape of the pulse repetition frequency, laser, laser polarization, laser energy flux and laser focus from the sample surface position of experimental conditions on the metal foil for drilling research. We measured the transmission signal and the laser ablation morphology of copper under different experimental conditions, to explore the ablation mechanism the metal materials, and finally got the micro processing technology to achieve high quality round micropores. The study found that using five pulse sequence drilling pulse interval td=0.6 PS You can get fewer splashes of micropores, particle size of laser pulses with high repetition frequency can reduce the spatter, circularly polarized laser pulse drilling can obtain good roundness of microporous. Through repeated optimization of experimental conditions, the size of small, round and entrance and no obvious micropore splashes around the hole and close mouth size in the study of ablation of glow discharge polymer thin film laser pulse shaped femtosecond laser, we found a very important influence on the shape of pulse laser ablation of polymeric materials by pulse shaping efficiency and accuracy, improve processing efficiency and accuracy of the film. The study also found that the processing in vacuum environment can be obtained without obvious pores splashings the focus position. The efficiency and accuracy of material processing and laser also has a very important relationship. When the laser focusing effect on the surface of the sample when Will be "small" and "circle". By choosing appropriate micropore focus position in the experiment, we can optimize the ablation efficiency greatly and has high precision. The combination method of microporous membrane and glass substrate we used to simulate the polymer microspheres and the front surface and the inner surface; characterized by basement after ablation the successful simulation of the production of microspheres in the ablation process of internal splashes, processing conditions and access to the wall without damage. The microspheres were characterized on the substrate after ablation, found in the vacuum is 2.5 Pa and the laser energy is 6 J using multiple sub pulse sequence pulse drilling, not only in the micro machining process can be reduced to the inner wall of the microspheres splashes and reduce the heat on the inner wall of the laser processing microspheres affected areas, and obtain high quality microporous. When the laser energy is reduced to 4 J, was not observed on the basis of the laser ablation. So this energy can be obtained with micropore micropore with higher quality, so as not to affect the further application of microsphere in laser fusion. In the shaping of femtosecond laser pulse micro processing on polymer material microspheres, we established microspheres space positioning technology sure, strictly perpendicular to the incident direction of laser surface through the center. On this basis, we conducted research on ablation drilling with different thickness of microspheres shaping of femtosecond laser. It is found that the lowest energy drill through different thickness samples need different. With the increase of the drilling depth, laser transmission reflection process occurs in the hole in the refraction and scattering process, the laser energy transfer to laser ablation at the bottom of the hole is reduced, resulting in drilling through the thick of the microspheres required laser energy is high. We successfully The microspheres on high quality micro processing, the study also found that the use of laser pulse shaping can greatly improve the machining precision of microspheres by femtosecond laser shaping technology can achieve ultra precision machining of the microspheres, preparation for microsphere applications. All above results show that the micro processing of femtosecond laser pulse shaping technology application in materials that increase process control means, according to the design of plastic laser suitable to obtain the best processing conditions of the actual needs, thus greatly improve the machining precision of materials. Therefore, femtosecond laser shaping technology can be widely used in micro machining of different materials in application and research.

【學(xué)位授予單位】：吉林大學(xué)
【學(xué)位級(jí)別】：博士
【學(xué)位授予年份】：2016
【分類號(hào)】：O437

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