發(fā)布時間：2018-11-23 08:25

【摘要】：近年來,諧振式微光學陀螺儀逐漸成為國內(nèi)外研究的熱點之一。以薩格納克效應為原理的諧振式微光學陀螺在集成化、小型化的發(fā)展方面非常具有潛力。諧振式微光學陀螺利用成熟的半導體加工工藝將光源、調(diào)制器、探測器以及諧振腔和其他關(guān)鍵器件集成在芯片上,具有體積小、全固態(tài)、抗沖擊等優(yōu)點。光波導諧振腔作為諧振式微光學陀螺的核心敏感元件,其光學特性嚴重影響著陀螺的性能。本文深入分析了光波導諧振腔的光學傳輸特性,對影響陀螺性能的諧振腔關(guān)鍵特征參數(shù)進行了討論。針對目前光波導諧振腔品質(zhì)因數(shù)低、對諧振腔的結(jié)構(gòu)參數(shù)缺乏優(yōu)化等關(guān)鍵問題開展了系統(tǒng)的研究,提出了二氧化硅光波導諧振腔的設(shè)計加工方法,提高了諧振腔的品質(zhì)因數(shù)。論文主要研究內(nèi)容可分為以下幾個方面:1)提出了高Q鍺摻雜二氧化硅光波導諧振腔的設(shè)計加工方法。針對諧振式微光學陀螺應用對光波導諧振腔的需求,采用有效折射率法和光束傳播法對掩埋型鍺摻雜二氧化硅光波導進行了分析,計算出了光波導的深寬、最大彎曲弧度等參數(shù)。在硅基底上采用等離子體化學氣相沉積、光刻以及反應離子刻蝕等工藝制備了鍺摻雜二氧化硅光波導諧振腔。所制備的硅光波導的橫截面尺寸為6μm×6μm,傳輸損耗為0.017 dB/cm,光波導諧振腔為環(huán)形跑道結(jié)構(gòu),尺寸為2 cm×3.6 cm。構(gòu)建了光波導諧振腔諧振曲線測試系統(tǒng),測試得到所制備的鍺摻雜二氧化硅光波導諧振腔品質(zhì)因數(shù)高達107。2)提出了面向諧振式微光學陀螺的光波導諧振腔結(jié)構(gòu)優(yōu)化方法。結(jié)合諧振式光波導陀螺的信號檢測原理,從陀螺靈敏度的角度提出了欠耦合狀態(tài)且諧振深度等于0.75是光波導諧振腔應用于諧振式微光學陀螺的設(shè)計參數(shù)。通過對諧振腔的分析發(fā)現(xiàn),在不同的耦合狀態(tài)下,諧振腔所表現(xiàn)出來的諧振譜的半高與諧振深度等特征參量都有所不同。對比了理論上與實驗上諧振腔的品質(zhì)因數(shù)、諧振深度在不同耦合狀態(tài)下的變化趨勢,結(jié)合諧振式微光學陀螺的三角波調(diào)制解調(diào)過程,得出了使陀螺靈敏度最大化的光波導諧振腔的特征結(jié)構(gòu)參數(shù)。3)提出了雙圈光波導諧振腔設(shè)計結(jié)構(gòu)。根據(jù)諧振腔腔長與諧振譜半高全寬的關(guān)系,提出了一種雙圈式光波導諧振腔的設(shè)計結(jié)構(gòu)。這種結(jié)構(gòu)可以在有限的芯片空間內(nèi)通過提升光波導諧振腔的腔長來提高其品質(zhì)因數(shù)。論文通過對光纖耦合器進行熔接上不同長度的光纖實驗驗證了諧振腔的腔長對其品質(zhì)因數(shù)的影響,最高得到了腔長100米,品質(zhì)因數(shù)高達6.74×109的光纖環(huán)形諧振腔。在硅基底上,也設(shè)計加工出雙圈式設(shè)計結(jié)構(gòu),腔長21.6 cm的二氧化硅光波導諧振腔,測試得到其品質(zhì)因數(shù)達到2×107。通過以上研究,制備出高品質(zhì)因數(shù)的光波導諧振腔,并提出了面向諧振式微光學陀螺應用的優(yōu)化方法和雙圈光波導結(jié)構(gòu),解決了光波導諧振腔現(xiàn)有的關(guān)鍵技術(shù)難題,為諧振式微光學陀螺的研究奠定了良好的基礎(chǔ)。
[Abstract]:In recent years, the resonant micro-optical gyroscope has become one of the hot spots of the research at home and abroad. The resonant micro-optical gyro based on the Sagnac effect is of great potential in the development of integration and miniaturization. the resonant micro-optical gyroscope integrates a light source, a modulator, a detector and a resonant cavity and other key devices on a chip by a mature semiconductor processing technology, and has the advantages of small volume, all-solid-state, impact resistance and the like. The optical waveguide resonant cavity is used as the core sensitive element of the resonant type micro-optical gyroscope, and the optical characteristic of the optical waveguide resonant cavity is seriously affected by the performance of the gyroscope. In this paper, the optical transmission characteristics of the optical waveguide resonant cavity are deeply analyzed, and the key characteristic parameters of the resonant cavity influencing the performance of the gyroscope are discussed. In the light of the low quality factor of the current optical waveguide resonant cavity, the key problems such as the lack of optimization of the structure parameters of the resonant cavity are studied, the design and processing method of the silicon dioxide optical waveguide resonant cavity is proposed, and the quality factor of the resonant cavity is improved. The main contents of this paper can be divided into the following aspects: 1) The design and processing method of high Q-doped silicon dioxide optical waveguide resonant cavity is proposed. In the light of the requirement of the resonant micro-optical gyro to the optical waveguide resonant cavity, an effective refractive index method and a beam propagation method are adopted to analyze the buried doped silicon dioxide optical waveguide, and the parameters such as the deep width and the maximum bending radian of the optical waveguide are calculated. A doped silicon dioxide optical waveguide resonant cavity is prepared by plasma chemical vapor deposition, photolithography and reactive ion etching on a silicon substrate. The cross-sectional dimension of the prepared silicon optical waveguide is 6. m u.m to 6. m u.m, the transmission loss is 0.017 dB/ cm, and the optical waveguide resonant cavity is an annular runway structure with a size of 2 cm to 3. 6 cm. The resonant curve test system of the optical waveguide resonant cavity is constructed, and the quality factor of the prepared silicon-doped silicon dioxide optical waveguide resonant cavity is high (107. 2), and the structure optimization method of the optical waveguide resonant cavity facing the resonant micro-optical gyroscope is proposed. Based on the principle of the signal detection of the resonant type optical waveguide gyro, the under-coupled state is proposed from the angle of the gyro's sensitivity and the resonance depth is equal to 0.75. The design parameters of the optical waveguide resonant cavity are applied to the resonant micro-optical gyro. Through the analysis of the resonant cavity, the characteristic parameters such as the half-height and the resonance depth of the resonance spectrum exhibited by the resonant cavity are different in different coupling states. Compared with the quality factor of the resonant cavity theoretically and experimentally, the variation trend of the resonance depth under different coupling conditions is compared, and the triangular wave modulation and demodulation process of the resonant micro-optical gyroscope is combined. The characteristic structure parameter of the optical waveguide resonant cavity which maximizes the sensitivity of the gyro is obtained. Based on the relation between the length of the cavity and the half-height of the resonance spectrum, a design structure of a double-loop optical waveguide resonant cavity is proposed. such a structure can improve its quality factor by lifting the cavity length of the optical waveguide cavity within a limited chip space. In this paper, the influence of the cavity length on the quality factor of the resonant cavity is verified by the optical fiber experiment of different length of the optical fiber coupler, and the optical fiber ring-shaped resonant cavity with the cavity length of 100 meters and the quality factor of 6.74-109 is obtained. On the silicon substrate, a double-ring-type design structure is also designed, with a cavity length of 21. 6cm of a silicon dioxide optical waveguide resonant cavity, and the quality factor of the silicon dioxide optical waveguide resonant cavity with the cavity length of 21. 6 cm is measured to reach 2-107. Through the above research, the optical waveguide resonant cavity with high quality factor is prepared, and the optimization method and the double-loop optical waveguide structure facing the application of the resonant micro-optical gyroscope are proposed, and the key technical problems of the prior art of the optical waveguide resonant cavity are solved, and lays a good foundation for the research of the resonant micro-optical gyroscope.
【學位授予單位】：中北大學
【學位級別】：博士
【學位授予年份】：2017
【分類號】：TH74

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